JPS6288712A - Moving body guide device - Google Patents

Abstract

PURPOSE:To highly efficiently remove dust produced from a slide part, by a method wherein a removing passage, sucking dust produced resulting from slide between a slide body and a guide body for removal, is formed in the slide body or the guide body. CONSTITUTION:A moving body 10 has a bush support part 12 having a support hole in which a linear ball bush 11 is situated, and a pair of the linear bushes 11 are mounted in the support hole through a cylindrical spacer 13. When flange parts at both ends of the cylindrical spacer 13 are engaged with the support hole for mounting, the inner size of the flange is larger than the outer size of a guide shaft 4, and a specified gas 14 is formed between the spacer and the guide shaft 4. A through-hole 15, communicated with the gap 14, is formed in the side of the spacer 13, and is connected to a vacuum suction device through a tubular joint 16 and a flexible hose 17. This enables highly efficient suction and removal of dust produced resulting from slide of the linear ball bush 11.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a movable body guiding device such as a table on which members are loaded and conveyed.

[Technical background of the invention and its problems]

For example, when reciprocating a movable body such as a table on which parts are mounted and transported along a guide shaft, a bushing is usually interposed between the guide shaft and the movable body to reduce friction with the guide shaft. When it is desired to reduce the number of movable objects and make the movement of the movable body smoother, a linear ball bushing is used.

However, even when such a linear ball bushing is used, dust is generated from its sliding parts, which poses a problem particularly in the production of high-density semiconductor integrated circuits that require a highly clean environment. Therefore, it is necessary to prevent dust from scattering from this sliding part.

As shown in Fig. 2, the bushing ■ is attached to a support hole provided in the support part of the movable body ■, and is attached to a pair of C-shaped metal fittings ■.
■ can be placed on both ends of the bushing and fixed in the support hole, or as shown in Figure 3, both ends of the bushing ■ can be made to protrude outside the support type, and a pair of C-shaped metal fittings can be used to support the support type. Because it is attached by means such as fixing it outside, it is not possible to prevent the scattering of dust generated by the sliding between this bushing and the guide shaft. A method of suctioning the inside is used.

However, in such a dustproofing means, it is necessary to provide a cover which does not require full heat for the operation of the movable body, which not only increases the equipment cost but also makes it difficult to maintain the device. Furthermore, in terms of the operation of the device, for example, an opening or a gap may be required between the cover (1) and the movable body (2), which poses problems such as complete shielding.

[Purpose of the invention]

An object of the present invention is to construct a movable body guide device that can efficiently remove dust generated between a guide body and a sliding body without shielding the entire device with a cover or the like.

[Summary of the invention]

A movable body guiding device in which a sliding body supported by the movable body and sliding on the guide body is disposed between a movable body that reciprocates and a guide body that guides the movable body, wherein the sliding body or By providing the guide body with a removal passage that suctions and removes the dust generated by the sliding between the sliding body and the guide body, the dust can be removed from the sliding part without providing a cover to shield the entire device. Now it can be removed directly.

[Embodiments of the invention]

Hereinafter, the present invention will be described based on embodiments with reference to the drawings.

FIG. 1 shows a movable body guide device using a linear ball bushing, which is an embodiment of the present invention. Movable body (1 (1)
has a bushing support part (I2) provided with a support hole for mounting a linear ball bushing (11), and a pair of linear ball bushings (11) are attached to a cylindrical spacer (13).
The linear ball bushes (11) and (1) are mounted in the support hole through the support hole and engaged with the inner surface of the support hole.
It is fixed with a pair of C-shaped metal fittings (■, ■) that are in close contact with the outer end surface of (1).

The cylindrical spacer (13) is provided with flange parts that fit into the support holes at both ends, and when the flange parts are fitted into the support holes and installed, the axial through hole, that is, the guide shaft. A guide shaft (A) through which a pair of linear ball bushes (11) and (11) are inserted through the insertion holes.
It is designed to be coaxial with the

Moreover, its inner diameter is larger than the outer diameter of the guide shaft (A), and there is a certain gap (14 mm) between it and the guide shaft (A).
) is now configured. Further, on the side surface of this spacer (13), a gap (14) formed between the guide shaft insertion hole, that is, the guide shaft (A)
) is provided with a through hole (15) that communicates with the. This through hole (15) and the gap (14) are connected to the movable body (lO
) is a removal passage for removing dust generated by sliding of the linear ball bushes (11), (11) with respect to the guide shaft (a), and this removal passage is provided on the side of the support hole. Installed tubular fittings (16)
It is connected to a vacuum suction device (not shown) via a flexible hose (17) attached to this tubular joint (16).

When the movable body guide device is configured as described above and the vacuum suction device is operated, a pair of linear ball bushes (11),
(11) creates a flow of air flowing in the direction of the arrow through the gap between the balls of the linear ball bushes (11), (
11) Dust generated by the sliding of the guide shaft (
Although the structure is simple, the dust generated from the sliding part can be efficiently removed by suction through the removal passage consisting of the gap (14) and the through hole (15) between the spacer (13) and the spacer (13). It can prevent scattering.

Next, other embodiments will be described.

In the above embodiment, a linear ball bushing was used, but
Even if a linear metal bushing is used in place of this linear ball bushing, a movable body guide device having similar effects can be constructed.

In this case, forming a thin axial groove or spiral groove on the inner surface of the bushing or the outer surface of the guide shaft and making it part of the removal passage will improve air circulation.
You can get even better results.

Further, the present invention can be applied not only to a movable body guide device including a guide shaft and a bush, but also to other movable body guide devices including a guide body and a sliding body, such as an LM guide.

〔Effect of the invention〕

In a movable body guiding device consisting of a guide body that guides the reciprocating motion of the movable body and a sliding body that is supported by the movable body and slides on the guide body, the problem occurs due to the sliding between the sliding body and the guide body. Since a removal passage for suctioning and removing dust is provided, dust generated from the sliding portion can be efficiently removed with a simple 1M structure.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing the main parts of a movable body guide device which is an embodiment of the present invention, FIG. 2 is a cross-sectional view showing a conventional movable body guide device with a part cut away, and FIG. 1 is a partially cutaway sectional view of a conventional movable body guide device with different mounting means. (1(1)...movable body

Claims (2)

[Claims] (1) A movable body guiding device in which a sliding body that is supported by the movable body and slides on the guide body is disposed between a movable body that reciprocates and a guide body that guides the movable body, the above-mentioned A movable body guiding device characterized in that the sliding body or the guide body is provided with a removal passage for sucking and removing dust generated by sliding between the sliding body and the guide body. (2) The sliding body consists of a spacer provided with a guide shaft insertion hole having a diameter larger than the diameter of the guide body consisting of a guide shaft, and a pair of linear ball bushes disposed in close contact with both ends of the spacer. , wherein the removal passage is comprised of a gap between the guide shaft insertion hole and the guide shaft inserted into the guide shaft insertion hole, and a through hole provided in the spacer that communicates with this gap. A movable body guide device according to claim 1.