JPS6287434U - - Google Patents
Info
- Publication number
- JPS6287434U JPS6287434U JP17941985U JP17941985U JPS6287434U JP S6287434 U JPS6287434 U JP S6287434U JP 17941985 U JP17941985 U JP 17941985U JP 17941985 U JP17941985 U JP 17941985U JP S6287434 U JPS6287434 U JP S6287434U
- Authority
- JP
- Japan
- Prior art keywords
- rotating table
- wafer
- shielding means
- rotating
- opposite side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17941985U JPS6287434U (tr) | 1985-11-21 | 1985-11-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17941985U JPS6287434U (tr) | 1985-11-21 | 1985-11-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6287434U true JPS6287434U (tr) | 1987-06-04 |
Family
ID=31122463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17941985U Pending JPS6287434U (tr) | 1985-11-21 | 1985-11-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6287434U (tr) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS548455A (en) * | 1977-06-22 | 1979-01-22 | Hitachi Ltd | Cleansing/drying device for products |
JPS5544780A (en) * | 1978-09-27 | 1980-03-29 | Toshiba Corp | Cleaning device for semiconductor wafer |
-
1985
- 1985-11-21 JP JP17941985U patent/JPS6287434U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS548455A (en) * | 1977-06-22 | 1979-01-22 | Hitachi Ltd | Cleansing/drying device for products |
JPS5544780A (en) * | 1978-09-27 | 1980-03-29 | Toshiba Corp | Cleaning device for semiconductor wafer |