JPS6287431U - - Google Patents

Info

Publication number

JPS6287431U

JPS6287431U JP17843185U JP17843185U JPS6287431U JP S6287431 U JPS6287431 U JP S6287431U JP 17843185 U JP17843185 U JP 17843185U JP 17843185 U JP17843185 U JP 17843185U JP S6287431 U JPS6287431 U JP S6287431U

Authority

JP

Japan

Prior art keywords

core tube

reactor core

boat

heat treatment

guide rail

Prior art date

1985-11-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims 3
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1

Cited By (1)