JPS628630U - - Google Patents

Info

Publication number
JPS628630U
JPS628630U JP10005785U JP10005785U JPS628630U JP S628630 U JPS628630 U JP S628630U JP 10005785 U JP10005785 U JP 10005785U JP 10005785 U JP10005785 U JP 10005785U JP S628630 U JPS628630 U JP S628630U
Authority
JP
Japan
Prior art keywords
mark
pattern
substrate
mask
positive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10005785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10005785U priority Critical patent/JPS628630U/ja
Publication of JPS628630U publication Critical patent/JPS628630U/ja
Pending legal-status Critical Current

Links

JP10005785U 1985-07-02 1985-07-02 Pending JPS628630U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10005785U JPS628630U (US07534539-20090519-C00280.png) 1985-07-02 1985-07-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10005785U JPS628630U (US07534539-20090519-C00280.png) 1985-07-02 1985-07-02

Publications (1)

Publication Number Publication Date
JPS628630U true JPS628630U (US07534539-20090519-C00280.png) 1987-01-19

Family

ID=30969513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10005785U Pending JPS628630U (US07534539-20090519-C00280.png) 1985-07-02 1985-07-02

Country Status (1)

Country Link
JP (1) JPS628630U (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006165359A (ja) * 2004-12-09 2006-06-22 Canon Inc ウエハのダイシング方法および液体吐出ヘッド

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006165359A (ja) * 2004-12-09 2006-06-22 Canon Inc ウエハのダイシング方法および液体吐出ヘッド
JP4617150B2 (ja) * 2004-12-09 2011-01-19 キヤノン株式会社 ウエハのダイシング方法

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