JPS628628U - - Google Patents
Info
- Publication number
- JPS628628U JPS628628U JP9854485U JP9854485U JPS628628U JP S628628 U JPS628628 U JP S628628U JP 9854485 U JP9854485 U JP 9854485U JP 9854485 U JP9854485 U JP 9854485U JP S628628 U JPS628628 U JP S628628U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- thin film
- laser beam
- optical system
- glass plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 238000001182 laser chemical vapour deposition Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 1
Description
第１図は本考案の薄膜形成用レーザ光学系の一
実施例を示す構成図、第２図は表面が平坦で均一
な膜質をもつレーザＣＶＤ膜を示す図、第３図は
従来方法の光学系をもつレーザＣＶＤ装置におい
てレーザ光強度が最適値からわすがにずれたとき
に生成される堆積膜を示す図である。
１：レーザビーム発生器、２：ビームエキスパ
ンダ、３，４：平行平板、５：金属開口、６：反
射鏡、７：結像レンズ、８：レーザＣＶＤ反応室
。
Figure 1 is a configuration diagram showing an embodiment of the laser optical system for thin film formation of the present invention, Figure 2 is a diagram showing a laser CVD film with a flat surface and uniform film quality, and Figure 3 is an optical diagram of a conventional method. FIG. 2 is a diagram illustrating a deposited film generated when the laser light intensity deviates from the optimum value in a laser CVD apparatus having a laser CVD system. 1: Laser beam generator, 2: Beam expander, 3, 4: Parallel plate, 5: Metal aperture, 6: Reflector, 7: Imaging lens, 8: Laser CVD reaction chamber.
Claims (1)
ス列のレーザビームを発生させるレーザビーム発
生器と、該レーザビームのスポツトサイズを拡大
するビームエキスパンダと、前記レーザビームの
断面形状を矩形するための金属エツジからなる矩
形開口と、その開口像をレーザ薄膜形成を行う基
板上に結像する結像レンズからなるレーザ光学系
において、 前記レーザビームの中心軸をもとのレーザビー
ムの中心軸と平行に保つたまま移動させるための
振動回転する平行板のガラス板を備えたことを特
徴とする薄膜形成用レーザ光学系。[Claims for Utility Model Registration] A laser beam generator that generates a continuous or repeated pulse train laser beam for forming a laser thin film, a beam expander that expands the spot size of the laser beam, and a cross-sectional shape of the laser beam. In a laser optical system consisting of a rectangular aperture made of a metal edge for making a rectangular shape, and an imaging lens that forms an image of the aperture onto a substrate on which a laser thin film is formed, 1. A laser optical system for thin film formation, characterized by comprising a vibrating and rotating parallel glass plate for moving the glass plate while keeping it parallel to the central axis of the laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9854485U JPS628628U (en) | 1985-06-28 | 1985-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9854485U JPS628628U (en) | 1985-06-28 | 1985-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS628628U true JPS628628U (en) | 1987-01-19 |
Family
ID=30966574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9854485U Pending JPS628628U (en) | 1985-06-28 | 1985-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS628628U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58165330A (en) * | 1982-03-25 | 1983-09-30 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
| JPS61239457A (en) * | 1985-04-16 | 1986-10-24 | Matsushita Electric Ind Co Ltd | Recording disk holding device |
-
1985
- 1985-06-28 JP JP9854485U patent/JPS628628U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58165330A (en) * | 1982-03-25 | 1983-09-30 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
| JPS61239457A (en) * | 1985-04-16 | 1986-10-24 | Matsushita Electric Ind Co Ltd | Recording disk holding device |
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