JPS6285386U - - Google Patents

Info

Publication number
JPS6285386U
JPS6285386U JP17686585U JP17686585U JPS6285386U JP S6285386 U JPS6285386 U JP S6285386U JP 17686585 U JP17686585 U JP 17686585U JP 17686585 U JP17686585 U JP 17686585U JP S6285386 U JPS6285386 U JP S6285386U
Authority
JP
Japan
Prior art keywords
hand
flange
arm
detachment device
attachment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17686585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17686585U priority Critical patent/JPS6285386U/ja
Publication of JPS6285386U publication Critical patent/JPS6285386U/ja
Pending legal-status Critical Current

Links

JP17686585U 1985-11-19 1985-11-19 Pending JPS6285386U (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17686585U JPS6285386U (es) 1985-11-19 1985-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17686585U JPS6285386U (es) 1985-11-19 1985-11-19

Publications (1)

Publication Number Publication Date
JPS6285386U true JPS6285386U (es) 1987-05-30

Family

ID=31117519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17686585U Pending JPS6285386U (es) 1985-11-19 1985-11-19

Country Status (1)

Country Link
JP (1) JPS6285386U (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006120799A (ja) * 2004-10-20 2006-05-11 Tokyo Electron Ltd 基板処理装置、基板載置台交換方法、及びプログラム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006120799A (ja) * 2004-10-20 2006-05-11 Tokyo Electron Ltd 基板処理装置、基板載置台交換方法、及びプログラム

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