JPS6284946U - - Google Patents

Info

Publication number
JPS6284946U
JPS6284946U JP17503985U JP17503985U JPS6284946U JP S6284946 U JPS6284946 U JP S6284946U JP 17503985 U JP17503985 U JP 17503985U JP 17503985 U JP17503985 U JP 17503985U JP S6284946 U JPS6284946 U JP S6284946U
Authority
JP
Japan
Prior art keywords
displacement response
piezoelectric element
response speed
voltage
speed detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17503985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17503985U priority Critical patent/JPS6284946U/ja
Publication of JPS6284946U publication Critical patent/JPS6284946U/ja
Pending legal-status Critical Current

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  • Control Of Position Or Direction (AREA)
JP17503985U 1985-11-15 1985-11-15 Pending JPS6284946U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17503985U JPS6284946U (de) 1985-11-15 1985-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17503985U JPS6284946U (de) 1985-11-15 1985-11-15

Publications (1)

Publication Number Publication Date
JPS6284946U true JPS6284946U (de) 1987-05-30

Family

ID=31113991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17503985U Pending JPS6284946U (de) 1985-11-15 1985-11-15

Country Status (1)

Country Link
JP (1) JPS6284946U (de)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237684A (en) * 1975-09-19 1977-03-23 Japan Servo Co Ltd Servomechanism
JPS54111072A (en) * 1978-02-17 1979-08-31 Fujitsu Ltd Displacement controlling apparatus
JPS55120186A (en) * 1979-03-09 1980-09-16 Ngk Spark Plug Co Ltd Piezoelectric element displacement control system
JPS59112669A (ja) * 1982-12-20 1984-06-29 Hitachi Ltd 微小変位発生装置
JPS5949207B2 (ja) * 1975-08-16 1984-12-01 バイエル・アクチエンゲゼルシヤフト ジエンの製造方法
JPS60108913A (ja) * 1983-11-18 1985-06-14 Canon Inc 電歪素子制御装置
JPS61285082A (ja) * 1985-06-10 1986-12-15 Toshiba Corp 圧電型駆動装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5949207B2 (ja) * 1975-08-16 1984-12-01 バイエル・アクチエンゲゼルシヤフト ジエンの製造方法
JPS5237684A (en) * 1975-09-19 1977-03-23 Japan Servo Co Ltd Servomechanism
JPS54111072A (en) * 1978-02-17 1979-08-31 Fujitsu Ltd Displacement controlling apparatus
JPS55120186A (en) * 1979-03-09 1980-09-16 Ngk Spark Plug Co Ltd Piezoelectric element displacement control system
JPS59112669A (ja) * 1982-12-20 1984-06-29 Hitachi Ltd 微小変位発生装置
JPS60108913A (ja) * 1983-11-18 1985-06-14 Canon Inc 電歪素子制御装置
JPS61285082A (ja) * 1985-06-10 1986-12-15 Toshiba Corp 圧電型駆動装置

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