JPS6284156U - - Google Patents

Info

Publication number
JPS6284156U
JPS6284156U JP17601485U JP17601485U JPS6284156U JP S6284156 U JPS6284156 U JP S6284156U JP 17601485 U JP17601485 U JP 17601485U JP 17601485 U JP17601485 U JP 17601485U JP S6284156 U JPS6284156 U JP S6284156U
Authority
JP
Japan
Prior art keywords
cooling
conductive member
thermally conductive
pipe
cooling means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17601485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0323650Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985176014U priority Critical patent/JPH0323650Y2/ja
Publication of JPS6284156U publication Critical patent/JPS6284156U/ja
Application granted granted Critical
Publication of JPH0323650Y2 publication Critical patent/JPH0323650Y2/ja
Expired legal-status Critical Current

Links

JP1985176014U 1985-11-15 1985-11-15 Expired JPH0323650Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985176014U JPH0323650Y2 (en:Method) 1985-11-15 1985-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985176014U JPH0323650Y2 (en:Method) 1985-11-15 1985-11-15

Publications (2)

Publication Number Publication Date
JPS6284156U true JPS6284156U (en:Method) 1987-05-29
JPH0323650Y2 JPH0323650Y2 (en:Method) 1991-05-23

Family

ID=31115867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985176014U Expired JPH0323650Y2 (en:Method) 1985-11-15 1985-11-15

Country Status (1)

Country Link
JP (1) JPH0323650Y2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005100988A (ja) * 2003-09-24 2005-04-14 Carl Zeiss Nts Gmbh 粒子放射装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145848U (en:Method) * 1975-05-16 1976-11-24
JPS5478076A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Frozen sample observation device of scanning electron microscope and similar unit
JPS58165848U (ja) * 1982-04-28 1983-11-04 日本電子株式会社 電子顕微鏡等の試料交換装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145848U (en:Method) * 1975-05-16 1976-11-24
JPS5478076A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Frozen sample observation device of scanning electron microscope and similar unit
JPS58165848U (ja) * 1982-04-28 1983-11-04 日本電子株式会社 電子顕微鏡等の試料交換装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005100988A (ja) * 2003-09-24 2005-04-14 Carl Zeiss Nts Gmbh 粒子放射装置

Also Published As

Publication number Publication date
JPH0323650Y2 (en:Method) 1991-05-23

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