JPS628399U - - Google Patents

Info

Publication number
JPS628399U
JPS628399U JP9998585U JP9998585U JPS628399U JP S628399 U JPS628399 U JP S628399U JP 9998585 U JP9998585 U JP 9998585U JP 9998585 U JP9998585 U JP 9998585U JP S628399 U JPS628399 U JP S628399U
Authority
JP
Japan
Prior art keywords
substrate
vibrator
electrode
vibrators
around
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9998585U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9998585U priority Critical patent/JPS628399U/ja
Publication of JPS628399U publication Critical patent/JPS628399U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Description

【図面の簡単な説明】
第1図は本考案の1実施例の超音波ポンプの断
面図、第2図は第1図の振動子部分の断面図、第
3図は本考案の他の実施例の振動子の平面図であ
る。 1……基板、2a,2b……振動子、3……入
水穴、4……入水路ホース、5……電極、6……
発振器、7……加圧室、8……出水穴、9……出
水路ホース、10……分岐部。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 傾斜した側壁の絞られた側に出水路が接続
    され拡出された側に基板が設けられた加圧室と、
    上記基板にほぼ等間隔に設けられ、それぞれ片面
    または両面に電極が設けられた複数の振動子と、
    該振動子の電極に接続された発振器と、上記基板
    のほぼ中心あるいは上記振動子の間または上記振
    動子の外側周辺もしくは上記加圧室の周囲に設け
    られた入水路とからなることを特徴とする超音波
    ポンプ。 (2) 上記発振器は位相変調型であることを特徴
    とする実用新案登録請求の範囲第1項記載の超音
    波ポンプ。
JP9998585U 1985-06-29 1985-06-29 Pending JPS628399U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9998585U JPS628399U (ja) 1985-06-29 1985-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9998585U JPS628399U (ja) 1985-06-29 1985-06-29

Publications (1)

Publication Number Publication Date
JPS628399U true JPS628399U (ja) 1987-01-19

Family

ID=30969374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9998585U Pending JPS628399U (ja) 1985-06-29 1985-06-29

Country Status (1)

Country Link
JP (1) JPS628399U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008274932A (ja) * 2007-04-03 2008-11-13 Canon Inc マイクロ流体デバイスを用いた送液装置および送液方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183100A (ja) * 1983-03-31 1984-10-18 Agency Of Ind Science & Technol 超音波ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183100A (ja) * 1983-03-31 1984-10-18 Agency Of Ind Science & Technol 超音波ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008274932A (ja) * 2007-04-03 2008-11-13 Canon Inc マイクロ流体デバイスを用いた送液装置および送液方法

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