JPS6283980U - - Google Patents

Info

Publication number
JPS6283980U
JPS6283980U JP17546785U JP17546785U JPS6283980U JP S6283980 U JPS6283980 U JP S6283980U JP 17546785 U JP17546785 U JP 17546785U JP 17546785 U JP17546785 U JP 17546785U JP S6283980 U JPS6283980 U JP S6283980U
Authority
JP
Japan
Prior art keywords
probe
positioning device
stages
utility
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17546785U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17546785U priority Critical patent/JPS6283980U/ja
Publication of JPS6283980U publication Critical patent/JPS6283980U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)

Description

【図面の簡単な説明】
第１図に本考案の一実施例である針圧検出器付
探針位置決め装置の概要図を、第２図は従来技術
による探針位置決め装置の概要を示す。 １…探針、２……板バネ、３……上下ステージ
、４……上下ステージ位置決めバーニヤ、５……
前後ステージ、６……前後ステージ位置決めバー
ニヤ、７……左右ステージ、８……左右ステージ
位置決めバーニヤ、９……土台、１０……ボタン
、１１……トンネルダイオード。

Claims (1)

    【実用新案登録請求の範囲】
  1. 上下、左右、前後の独立した位置決めステージ
    を有する探針位置決め装置の探針取り付け部に、
    針圧を検圧する圧力センサーを取り付ける構造を
    有する探針位置決め装置。
JP17546785U 1985-11-13 1985-11-13 Pending JPS6283980U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17546785U JPS6283980U (ja) 1985-11-13 1985-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17546785U JPS6283980U (ja) 1985-11-13 1985-11-13

Publications (1)

Publication Number Publication Date
JPS6283980U true JPS6283980U (ja) 1987-05-28

Family

ID=31114815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17546785U Pending JPS6283980U (ja) 1985-11-13 1985-11-13

Country Status (1)

Country Link
JP (1) JPS6283980U (ja)

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