JPS6283877U - - Google Patents

Info

Publication number
JPS6283877U
JPS6283877U JP16567685U JP16567685U JPS6283877U JP S6283877 U JPS6283877 U JP S6283877U JP 16567685 U JP16567685 U JP 16567685U JP 16567685 U JP16567685 U JP 16567685U JP S6283877 U JPS6283877 U JP S6283877U
Authority
JP
Japan
Prior art keywords
temperature
heater
heating
single crystal
crystal growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16567685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16567685U priority Critical patent/JPS6283877U/ja
Publication of JPS6283877U publication Critical patent/JPS6283877U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP16567685U 1985-10-30 1985-10-30 Pending JPS6283877U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16567685U JPS6283877U (cs) 1985-10-30 1985-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16567685U JPS6283877U (cs) 1985-10-30 1985-10-30

Publications (1)

Publication Number Publication Date
JPS6283877U true JPS6283877U (cs) 1987-05-28

Family

ID=31095926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16567685U Pending JPS6283877U (cs) 1985-10-30 1985-10-30

Country Status (1)

Country Link
JP (1) JPS6283877U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0380181A (ja) * 1989-08-24 1991-04-04 Mitsubishi Monsanto Chem Co 単結晶製造装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59137399A (ja) * 1983-01-28 1984-08-07 Nippon Telegr & Teleph Corp <Ntt> 低転位密度単結晶の育成方法及びその装置
JPS6027685A (ja) * 1983-07-19 1985-02-12 Sumitomo Electric Ind Ltd 複数段ヒ−タ−の制御方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59137399A (ja) * 1983-01-28 1984-08-07 Nippon Telegr & Teleph Corp <Ntt> 低転位密度単結晶の育成方法及びその装置
JPS6027685A (ja) * 1983-07-19 1985-02-12 Sumitomo Electric Ind Ltd 複数段ヒ−タ−の制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0380181A (ja) * 1989-08-24 1991-04-04 Mitsubishi Monsanto Chem Co 単結晶製造装置

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