JPS6282310A - Three-dimensional measuring machine - Google Patents

Abstract

PURPOSE:To enrich a measuring item of an object to be measurddand to enlarge its availability by providing a rotation driving means of a Z spindle, an angle positioning means and a position changing means and the like. CONSTITUTION:The object 29 to be measured mounted on a stage 3 and a probe 10 supported on the Z spindle 9 of a measuring machine main body are relatively moved three-dimensionally and the relative movement quantity between the measuring surface of the object 29 and a probe 34 of the probe 10 is detected and this is processed with a data processor to measure the dimensions of the object 29 or the like. Then, a hollow Z axis structure 8 is supported movably in the axial direction and moreover, nonrotatably on the measuring machine main body and the rotation driving means rotates the Z spindle 9 in the inside. Afterward, the angle positioning means fixes the relative position in the rotational direction between the Z spindle 9 and the structure 8 on a prescribed angle. Then, the position changing means moves the probe 34 forcibly linearly in the diametrical direction of the probe 10 to change the position. Then, the probe 34 is abutted on the round-axis-shaped part 36 of the object 29 from the diametrical direction and the rotation driving means is actuated to measure the out-of-roundness of the part 36 or the like.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a three-dimensional measuring machine, and more particularly to a three-dimensional measuring machine capable of measuring not only the length and hole diameter of an object to be measured, but also roundness, etc. .

[Background technology and its problems]

The object to be measured placed on the stage and the probe supported by the Z spindle of the measuring machine are moved relative to each other in three dimensions by a moving mechanism. A three-dimensional measuring machine is known that measures the shape or dimensions of an object by detecting the amount of relative movement of the object and processing the detected amount of movement in a predetermined manner with a data processing device. It is becoming popular because it allows for high-accuracy and high-speed measurement of hole dimensions, hole diameters, etc. There are two types of three-dimensional measuring machines: manual types, in which the moving mechanism is manually driven by the measuring worker in order to bring the measuring point of the probe into contact with each measuring point of the object to be measured, and two types. There is an automatic drive type in which a drive source such as a morph is provided and the drive source is controlled and driven according to a program.

However, regardless of whether it is a manual type or an automatically driven type, three-dimensional measuring machines,
Since the measuring point of the probe and the object to be measured are moved relative to each other in the composite direction of the three orthogonal axes X, Y, and Z axes determined by the structure of the coordinate measuring machine, the coordinates of each measurement point are For example, when measuring the inner diameter of a hole, the coordinate value of each point is determined by touching the probe to three points on the inner circumferential surface of the hole, and the data of these coordinate values is processed in a specified manner. I have to.

For this reason, with conventional coordinate measuring machines, measurements of roundness, cylindricity, etc., which require continuous measurement data in the circumferential direction of holes and shafts, are performed in series with measurements of length and hole diameter. The object to be measured must be removed from the stage and placed in a dedicated measuring machine to measure roundness, etc.

Therefore, the work efficiency is extremely low, and the measurement conditions cannot be kept the same throughout the measurement work, resulting in problems in measurement accuracy. In particular, when the coordinate measuring machine is an automatic drive type, it is necessary for the measurement worker to remove the object to be measured from the stage and attach it to the stage. The effectiveness of the type coordinate measuring machine will be lost.

[Purpose of the invention]

In conventional coordinate measuring machines, the probe is attached to the measuring machine body so that its relative position cannot be changed, which makes it impossible to measure roundness, etc. The fixed state was made with the focus on the necessity for measurement work.

An object of the present invention is to provide a three-dimensional measuring machine that can also measure the roundness, cylindricity, etc. of an object to be measured, and therefore has a wide variety of measurement items and is highly useful.

[Means and effects for solving the problem] For this reason, the three-dimensional measuring machine according to the present invention moves the object to be measured placed on the stage and the probe supported by the Z spindle of the main body of the measuring machine. By moving the object three-dimensionally relative to each other using a mechanism and detecting the amount of relative movement between the measurement surface of the object and the measuring tip of the probe, this detected amount of movement is processed by a data processing device to determine the shape of the object. A three-dimensional measuring machine that measures the Z axis includes: a rotation drive means for rotating the Z spindle around the Z axis; a Z axis structure supported by the measuring machine body so as to be movable in the Z axis direction but not rotatable; An angle positioning means for positioning the rotation direction angle with the spindle, an attitude changing means for moving the measuring head of the probe for roundness etc. linearly in the probe radial direction to change its attitude, and a round axis of the object to be measured. a displacement detector that converts the displacement amount of the measuring head that changes depending on the shape of the measuring surface of the round shaft-like part into an analog signal when the measuring head comes into contact with the round shaft-like part; and an angle detector that detects the rotational direction positional relationship between the measurement head of the roundness probe attached to the Z spindle and the measurement surface of the round shaft-shaped portion.

By rotating the roundness probe while bringing the measuring head into contact with the round shaft-shaped portion from the radial direction, roundness is measured based on the output signals of the displacement detector and angle detector.
Cylindricity can be measured by moving the probe in the Z-axis direction by moving the Z-axis structure. Since the measuring element is movable in the radial direction of the roundness probe by the attitude changing means, it is possible to deal with round shaft-like portions having different diameter dimensions.

For example, when performing normal measurement work on the shape of an object to be measured using a touch signal type probe, the angle positioning means allows the Z-axis structure provided on the measuring machine body and the Z-axis structure attached to the Z spindle to be The rotation direction angle with the probe is determined and the probe is fixed. When measuring roundness etc. with the roundness probe, this angular positioning means is released and the rotary drive means rotates the roundness probe together with the Z spindle.

〔Example〕

FIG. 1 is an overall view of the coordinate measuring machine according to this embodiment.

A stage 3 is provided on the upper part of the base 1 between the left and right side covers 2 so as to be movable in the Y-axis direction, and a crossbeam member 5 is mounted on the upper part of the column 4 fixed to the left and right sides of the base 1. is attached to the crossbeam member 5, and a slider 6 is provided on the crossbeam member 5 so as to be movable in the X-axis direction. A Z-axis structure 8 is disposed inside a cover 7 that is integrated with the slider 6 so as to be movable up and down in the vertical direction, that is, in the X-axis direction, and a Z-spindle 9 is installed inside the Z-axis structure 8. A probe 10 is attached to the tip of a Z spindle 9 protruding from the lower end of the Z-axis structure 8. Above base 1, stage 3, support 4
, the crossbeam member 5, the slider 6, the cover 7, etc. constitute a measuring machine main body, and a probe 10 is attached to this measuring machine main body via a Z spindle 9 and a Z-axis structure 8.

FIG. 2 is a sectional view of the cover 7 showing the drive device for the Z-axis structure 8. FIG. A slider 6 formed in the shape of a square frame to surround the crossbeam member 5 is slidable in the X-axis direction with respect to the crossbeam member 5 by an air bearing 11, and a square column-shaped Z-axis structure 8 Bracket 1 coupled to slider 6
The Z-axis structure 8 is movable in the axial direction of the Z-axis structure 8, which is the X-axis direction, by the air bearing 13 of No. 2, and cannot rotate about the Z-axis. slider 6
A motor 14 is installed on the drive shaft of the motor 14, and a pulley 15, a timing belt 16, and a pulley 17 are attached to the drive shaft of the motor 14.
A screw shaft 18 whose axial direction is in the vertical direction is connected through the screw shaft 18, and a nut member 19 screwed onto the screw shaft 18 has rotatable rollers 21 that sandwich a guide rail 20 attached to the cover 7 from both sides. When the screw shaft 18 is rotated by the motor 14, the nut member 19 is rotated by the roller 21.
is prevented from rotating and moves up and down by the feeding action of the screw shaft 18. The nut member 19 is integrally provided with a protruding member 22 extending toward the biaxial structure 8, and this protruding member 22 is sandwiched from above and below by a connecting member 23 coupled to the upper end of the Z-axis structure 8, so that the nut When the member 19 and the Z-axis structure 8 are connected and the nut member 19 moves up and down, the Z-axis structure 8
moves in the X-axis direction.

The motor 14, screw shaft 18, nut member 19, etc. described above constitute a drive device 24 for moving the Z-axis structure 8 in the X-axis direction. An air balance cylinder 25 is assembled to the Z-axis structure 8, and a piston loft 27 of a piston 26 slidably disposed inside this cylinder 25 is connected to a bracket 28 fixed to the slider 6.
Since the cylinder 25 is connected to the upper end of the piston 26 and air is supplied to the cylinder 25 at the upper part of the piston 26, the pressure of this air causes the Z-axis structure 8 to move up and down while its weight is balanced and supported.

Movement of the stage 3 in the Y-axis direction with respect to the base I and movement of the slider 6 in the X-axis direction with respect to the crossbeam member 5 are performed by a motor, screw shaft, etc., similar to the drive device 24 of the Z-axis structure 8. carried out by each configured drive device,
The drive devices for these X, Y, and Z axes are controlled by a computer according to a preset program, and the drive devices for the measurement target 2 fixed on the stage 3 are controlled by a computer according to a preset program.
The probe 10 is moved three-dimensionally relative to the probe 9 according to the measurement procedure.

When the stage 3 moves relative to the base 1, a relative movement occurs between the probe 1O and the object to be measured 29 in the Y-axis direction, and when the slider 6 moves relative to the crossbeam member 5, the probe 10
moves in the X-axis direction with respect to the measurement target 29, and further moves in the Z-axis direction.
When the shaft structure 8 moves relative to the slider 6, the probe 1
o and the object to be measured 29 are moved in two axial directions. A moving mechanism for moving the probe 1o and the object to be measured 29 relative to each other in three dimensions is constituted by the drive devices for the X, Y, and Z axes, the stage 3, the cross member 5, etc. Since the driving device is controlled by a computer based on a program, the three-dimensional measuring machine according to this embodiment is of an automatic drive type. The amount of relative movement in the Y-axis direction of the probe 10 with respect to the object to be measured 29 is determined by a Y-axis movement amount detector 30 provided between the base 1 and the workpiece 3 (see FIG. 5).
The amount of relative movement of the probe 10 to the object to be measured 29 in the X-axis direction and the Z-axis direction is detected by the crossbeam member 5.
X-axis movement amount detector 31 provided between and the slider 6
, is detected by a Z-axis movement amount detector 32 provided between the slider 6 and the Z-axis structure 8.

As shown in FIG. 1, a probe stocker 33 is installed at the rear end of the stage 3, and the two spindles 9 are sequentially replaced in accordance with the shape of the measurement surface of the object 29. A plurality of probes 10 that are mounted
is stored. The probe 10 includes a touch signal type probe 35 that outputs a touch signal when the measuring tip 34 comes into contact with the measurement surface of the measurement object 29, and a round shaft-shaped portion such as a hole 36A and a cylindrical portion 36B formed in the measurement object 29. 36 roundness,
There is a roundness probe 37 for measuring cylindricity and the like. Some of the touch signal type probes 35 have different lengths of the measuring tip 34, and others that can bend and rotate the measuring tip 34 with respect to the axis of the probe body and hold the measuring tip 34 in the bent position. In FIG. 1, a touch signal type probe 35 is attached to the Z spindle 9, and the measuring point 34 is of a bending and rotating type.

As shown in FIG. 4, the probe stocker 33 consists of a bottom 33A attached to the top surface of the stage 3, legs 33B erected from the bottom 33A, and a top 33C horizontally fixed to the top of the legs 33B. The sides are U-shaped. A planar U-shaped groove 34 that opens forward is formed in the top portion 33C, and there are a plurality of grooves 34, and each probe I (l
If the probe stocker 33 is inserted into and engaged with a predetermined groove 34,
It is stored in a correspondingly positioned location. The probe 37 for roundness etc. includes a probe body 39 and an attitude changing means 4.
0 and a detection unit 42.

The probe body 39 has a pull stud 43 at its upper end, and a tapered projection 44 and a flange 45 are integrally provided at the lower part of the pull stud 43. The structure of this probe body 39 is the same even if it is in the touch signal type probe 35). A support member 46 is provided at the bottom of the probe body 39.
A screw shaft 48 rotatably supported by bearings 47 at both ends of the
A NAND member 49 is screwed onto this screw shaft 48 which is ball-screwed and whose axial direction is horizontal, and the nut member 49 comes into slidable contact with the lower surface of the support member 46 and rotates. It is held inside the holding member 50 which is blocked, and when the screw shaft 48 rotates, the holding member 5o moves horizontally by the feeding action of the screw shaft 48. These screw shafts 4
8. The attitude changing mechanism 41 is constituted by the NAND member 49 and the like.

The detection unit 42 is attached to the lower surface of the holding member 50, and the detection unit 42 includes a displacement detector 5I and a probe 52 extending downward from the displacement detector 51. When the holding member 5o is horizontally moved by the rotation of the screw shaft 48, the measuring stylus 52 is forcibly moved linearly in the same radial direction as the probe 37, and as a result, the attitude of the measuring stylus 52 is changed. The upper end of the measuring stylus 52 is swingably connected to the displacement detector 51, and the measuring stylus 52 is therefore tiltable in the Z-axis direction, so that it can be displaced in a direction perpendicular to the Z-axis, that is, in the horizontal direction. . The displacement detector 51 is constituted by a differential transformer or the like that detects the amount of displacement of the measuring stylus 52 in the horizontal direction, and outputs an electrical analog signal corresponding to the amount of displacement of the measuring stylus 52.

One end of the screw shaft 48 projects from the bearing 47, and a first clutch member 53 is attached to this projecting end. When the roundness probe 37 is placed and stored in the probe stocker 33, the first clutch member 53 passes through the hole 54 formed in the leg portion 33B of the probe stocker 33, and is inserted into the rear side of the probe stocker 33. stand out. A motor 56 is connected to the probe stiffener 33 via a bracket 55.
is attached to the output shaft of a motor 56 arranged on the rear side of the probe stiffener 33, and a second tara nochi member 57 is provided. First and second clutch members 53.57
An electromagnetic clutch 58 is configured, and when the electromagnetic clutch 58 is connected and the motor 56 rotates, the feed screw shaft 4
8 rotates.

In this way, the motor 56 constitutes a driving device that rotates the spring shaft 48 to drive the attitude changing mechanism 41, and the attitude changing mechanism 41 and the motor 56 move the position of the measuring head 52 in a straight line in the radial direction of the probe 37. Posture changing means 40 is configured to move the object.

FIG. 3 shows the internal structure of the Z-axis structure 8.

A motor 59 is disposed facing downward inside the hollow Z-axis structure 8, and a small-diameter gear 60 attached to the output shaft of this motor 59 is connected to a large-diameter gear 62 for deceleration attached to the upper end of an intermediate shaft 61. The Z spindle 9 is coupled and integrated with the lower end of the intermediate shaft 61, and the Z spindle 9 is connected to the bearing 6.
3, it is rotatable around the Z axis. A pin 64 is provided at the tip of the Z spindle 9 exposed from the lower end of the Z-axis structure 8, and when this pin 64 engages with a hole formed in the flange portion 45 of the probe 10, the probe 1o is attached to the Z spindle 9. It is positioned and supported in the direction of circle J71. The motor 59, the small diameter gear 60, the large diameter gear 62, the connecting shaft 61, etc. constitute a rotation driving means 65 for rotating the Z spindle 9 and the probe 1o.

A first gear 67, which is one meshing member of the curvic coupling 66, is attached to the connection shaft 61, and a second gear 68, which is the other meshing member, vertically faces the first gear 67. The second gear 68 is integrated with a piston loft 71 of a vertically movable piston 7o of a cylinder 69.
Since gear o is always urged downward by the spring 72, the first and second gears 67 and 68 mesh with each other. 2nd gear 68 has Z
A diaphragm 73 coupled to the shaft structure 8 is attached, and since the diaphragm 73 is movable up and down, the second gear 68 can move up and down, but the rotation of the second gear 68 is prevented by the diaphragm 73. It has become. 1st
Since the second gears 67 and 68 are formed with a large number of teeth in the circumferential direction, when the first and second gears 67 and 68 are engaged, rotation of the Z spindle 9 and probe 10 becomes impossible. The Z spindle 9 and the probe 1o are angularly positioned in the rotational direction, and this angular positioning can be performed at any position in the rotational direction.

These first and second gears 67, 68, cylinder 69
An angular positioning means 74 for fixing the relative positions of the Z spindle 9 and the probe 10 (7) in the rotational direction centering on the Z axis m with respect to the Z axis structure 8 at a predetermined angular position is configured.

A rotary disk 75 is attached to the connecting shaft 61,
A detector 76 that constitutes a rotary encoder 77 together with the rotary disk 75 is attached to the inner surface of the Z@ structure 8, and the rotary encoder 77 is connected to the rotation drive means 65 at the connecting shaft 61 to drive this rotation. An angle detector 78 detects the rotation angle of the Z spindle 9 and the probe 1o due to the drive of the means 65. The angle detector 78 may be, for example, a pulse generator in addition to the low-resolution encoder 77.

A cylinder 79 is installed inside the Z-axis structure 8 , and a piston rod 81 of a piston 8 o of this cylinder 79 extends downward and is inserted into the inside of the hollow connecting shaft 61 . The lower end of the piston rod 81 is connected to the upper end of a drive rod 82 inserted into the hollow Z spindle 9 via a ball 83, and the drive rod 82 is always urged upward by a spring 84. Therefore, the piston rod 81 and the drive rod 82
move together in the axial direction, but the drive rod 82 can freely rotate relative to the piston rod 81. A ball holder 86 is provided at the lower end of the drive rod 82 and is vertically slidably disposed in a small diameter hole 85 formed in the center of the Z spindle 9.
7 and a plurality of balls 88 are disposed so as to be movable in the radial direction. There is a small diameter hole 85 inside the Z spindle 9.
A large diameter hole 89 is formed which is continuous with the large diameter hole 89, and a tapered hole 90 which is continuous with the large diameter hole 89 and opens on the lower surface of the Z spindle 9.
is formed.

Supply air to cylinder J7 cylinder 79 and piston rod 81
, the drive rod 82 is pushed down against the spring 84 to lower the pole holder 86 to the position where the pole 88 and the large diameter hole 89 coincide, and in this state, the pull stud 43 of the probe 10 is inserted into the inside of the ball holder 86. When inserted, the ball 88 is pushed outward in the radial direction, allowing the pull stud 43 to be inserted into the ball holder 86. Air is then discharged from the cylinder 79, and the driving rod 82 is moved by the biasing force of the spring 84. When the piston rod 81 is raised, the ball 88 is moved inward from the large diameter hole 89 to the small diameter hole 85, and as a result, the pawl 88 engages with the small diameter shaft portion of the full stand 43, and the ball holder 86 At the same time, the probe 1o is pulled up, and the probe 10 is positioned on the second spindle 9 by fitting the tapered projection 44 into the tapered hole 9o. When air is supplied to the cylinder 79 again and the ball holder 86 is pushed down to align the pole 88 with the large diameter hole 89, the ball 88 moves in the outer diameter direction due to the taper action of the pull stud 43 and the weight of the probe 10. As a result, the probe 1o separates from the Z spindle 9.

The above cylinder 79, piston rod 81, drive pJ8
2. Probe attachment/detachment mechanism 91 for attaching and detaching probe I to Z spindle 9 using ball holder 86 etc.
is configured.

Next, we will discuss the effect.

The measurement work is carried out using the hole 36A and the cylindrical part 36B as shown in Figure 1.
The measurement is performed on the object 29 that requires measurement of the roundness, cylindricity, etc. of the inner diameter or outer diameter. The first measurement operation is as shown in Figure 1.
When the position 4 is performed using a bent touch signal type probe 35, the orientation of the probe 34 is made to match the inclination direction of the measurement surface of the object 9 to be measured. That is, the angular positioning means 74 shown in FIG.
After supplying air to the cylinder 69 and raising the second gear 68 against the spring 72 to disengage it from the first gear 67 and making the Z spindle 9 freely rotatable, the rotation drive means By rotating the motor 59 of 65, the Z spindle 9 and the touch signal type probe 35 are
Rotate around the axis. When the direction of the hook 34 of the touch signal type probe 35 becomes a predetermined direction, the motor 59
Then, the air is discharged from the cylinder 69 and the second gear 6 is changed to the first gear 67 by the spring force of the spring 72.
As a result, the Z spindle 9 and the touch signal type probe 35 are positioned at their rotational angle positions by the action of the angular positioning means 74, and fixed.
The direction of 4 is fixed. The amount of rotation of the motor 59 is controlled by a computer that drives and controls the moving mechanism.

Next, the drive devices for each of the X-axis, Y-axis, and Z-axis are driven while being controlled by a computer based on a program, and the touch signal type probe 35 and the measurement object 2 are driven.
It moves relative to 9 in three dimensions. This relative movement is performed at each measurement step according to a programmed measurement procedure, and if necessary, the orientation of the probe 34 is changed at each measurement step in the same manner as described above.

an X-axis between the touch signal type probe 35 and the measurement object 29;
The amount of relative movement about the Y-axis and Z-axis is determined by the detector 30 in FIG.
, 31.32, and these detectors 30, 31.
The output from 32 is waveform-shaped and divided in detection circuits 92, 93, and 94 to generate a number of pulses corresponding to the amount of relative movement, and this number of pulses is counted by counters 95, 96, and 97, and a count value signal is generated. is input to the data processing device 98.

The touch signal type probe 35 outputs a touch signal when the measuring tip 34 comes into contact with the measurement surface of the measurement object 29 for each knob of each measuring station 5, and when this touch signal is input to the data processing device 98, the touch signal at the time of generation of the touch signal is output. counter 95.9
Based on the count signal from 6.97, a data processing device 98 having a calculation function calculates the shape, length, or hole diameter of the object to be measured 29 for each measurement step, and the measured results are displayed on a display device. 99 and recorded in the recording device 100. Touch signal probe 3
5 is connected to counters 95, 96.97, when a touch signal is output, counters 95, 96, 9
7 holds the number of pulses at that time, and based on this held signal value, the data processing device 98 selects the measurement target 2.
9's shape etc. are calculated.

When the next measurement operation is to measure the roundness, etc. of the round shaft-shaped portion 36, while the above measurement operation is being carried out, the circularity etc. Preparatory work for the probe 37 is performed in advance. Specifically, the electromagnetic clutch 58 shown in FIG. By forcing linear movement in the direction,
When this probe 37 is attached to the Z spindle 9, the distance between the central axis of the Z spindle 9 and the measuring stylus 52 corresponds to the radius of the round shaft portion 36 whose roundness and the like are to be measured. After this, the electromagnetic clutch 58 is disconnected.

The amount of rotation of the motor 56 is controlled by the combinator.

In this way, in this embodiment, the preparation work for the roundness probe 37 for measuring work such as roundness is carried out while the previous measurement work is being carried out, so that the measurement work time can be shortened. can be achieved.

Furthermore, since the position of the measuring head 52 of the probe 37 is movable in the radial direction with respect to the probe body 39 by the posture changing means 40, it is common to the round shaft-shaped portion 36 having an arbitrary diameter. The number of probes required for measuring roundness etc. can be reduced. In particular, the attitude changing means 40 includes an attitude changing mechanism 41 and a motor 56 as a drive device that drives this mechanism 41.
6 is attached to the probe stocker 33 and the probe 3
7 is not provided, the weight of the probe 37 can be reduced accordingly, and the attitude change mechanism 41 can be made larger to increase the amount of movement of the probe 52.

After the measurement work using the touch signal type probe 35 is completed, the first
The IA anastomosis shown in the figure is moved in the Y-axis direction to position the probe stocker 33 directly under the Z-axis structure 8, and then the slider 6 is moved in the X-axis direction, and the Y-axis drive device shown in FIG. 24, the Z-axis structure 8 is lowered, and air is supplied to the cylinder 79 shown in FIG. 3 to lower the ball holder 8.
6 is lowered, the touch signal type probe 35 is transferred from the Z spindle 9 to a corresponding position in the probe stocker 33 by the probe attachment/detachment mechanism 91 and stored therein. After that, the Z-axis structure 8 is raised, and the slider 6 is further moved in the X-axis direction to position the Z-axis structure 8 directly above the roundness etc. probe 37.
is lowered again and the probe 37 is attached to the Z-axis spindle 9 by the probe attachment/detachment mechanism 91.

Next, the probe 37 for roundness, etc. is brought close to the round shaft-shaped portion 36 of the object to be measured 29 by driving the respective drive devices for the X-axis, Y-axis, and Y-axis, and the probe 52 is moved closer to the round shaft-shaped portion 36 of the object to be measured 29. 36 from the radial direction. Cylinder 69 of angular positioning means 74 shown in FIG.
The meshing between the first gear 67 and the second gear 68 is released by supplying air to Rotate. As a result, the measuring stylus 52 is displaced in the radial direction of the round shaft-like portion 36 according to the shape of the measuring surface while going around the measuring surface of the round shaft-like portion 36, so that the measuring stylus 52 is displaced from the displacement detector 51 of the probe 37. A continuous analog signal corresponding to the amount of displacement of 52 is output, and this signal is input to the data processing device 98 shown in FIG.

During the above work, since the connecting shaft 61 that rotates together with the Z spindle 9 is provided with an angle detector 78 using a row encoder 77, the angle detector 78 detects the measurement surface of the round shaft portion 36. The rotational positional relationship with the probe 52 is constantly detected, and this detection signal is input to the data processing device 98.

The output signal from the displacement detector 51 and the output signal from the angle detector 78 are processed by a data processing device 98 to determine the roundness of the round shaft-shaped portion 36, and the measurement results are digitally displayed on a display device 99. and recorded in the storage device 100. In addition, when measuring the trueness, it is preferable that the axis of the Z spindle 9, which is the center of rotation of the probe 37, and the center of the round shaft portion 36 are accurately aligned; however, even if they do not match, the data processing device 98 It can be corrected by calculating

When measuring the roundness and cylindricity of multiple locations on the round shaft-shaped portion 36, the Z spindle 9 is operated by the above-mentioned rotational drive means 65.
, the rotation of the probe 37 and the vertical movement of the Z-axis structure 8 by the Z-axis driving device 24, and the rotation of the Z-axis structure 8 to be input to the data processing device 90 for calculating the cylindricity. The vertical movement amount is obtained by the Z-axis movement amount detector 32. Note that the probe 3 is rotated by the rotational drive means 65.
It is also possible to measure the surface roughness in the circumferential direction of the round shaft-shaped portion 36 by rotating the shaft.

After completing the above measurement work such as roundness etc., probe stocker 3
When performing measurement work using another probe 1O stored in No. 3, the probe is replaced using the same procedure as described above.

The probe replacement work and the measurement work of roundness and the like using the rotary drive means 65 and the like are automatically performed under computer control.

As is clear from the above, rotating the roundness probe 37 around the Z-axis in order to measure roundness, cylindricity, etc. means that the probe 34 of the touch signal type probe 35 is rotated in a predetermined direction. This can be done by using the rotary drive means 65 built into the Z-axis structure 8, and by using the same means, it is possible to measure roundness and the like. An angular positioning means 74 for positioning the Z spindle 9 and the probe 35 in the rotational direction is provided inside the Z-axis structure 8. Since this angular positioning means 74 can be released, roundness and cylindricity can be adjusted. It is only necessary to release it in the case of measurement work such as the above, and it is used only in the case of measurement work using the touch signal type probe 35.

In the three-dimensional measuring machine of the above embodiment, the X-axis and Y-axis are horizontal and the Z-axis is vertical, but one of the X-axis and Y-axis is vertical and the other and the Z-axis are horizontal. It may be. Furthermore, although the above embodiments were for automatically driven three-dimensional measurement, the present invention is also applicable to manual three-dimensional measuring machines in which the measurement operator performs three-dimensional relative movement between the probe and the object to be measured. can. However, if the present invention is applied to an automatic drive type measuring machine, it will be possible to measure the shape, dimensions, etc. of the object to be measured, as well as the roundness, cylindricity, etc. of the round shaft-like part automatically without manual intervention. In addition, in a coordinate measuring machine of the type that prepares multiple probes according to the measurement surface of the object to be measured and replaces them as in the above embodiment, the work including probe replacement work is now possible. All operations can be performed continuously and automatically. Furthermore, in the automatic drive type three-dimensional measuring machine, the equipment necessary for measuring roundness, cylindricity, etc. Drive control can now be performed using a computer pre-installed in the measuring machine.

〔Effect of the invention〕

According to the present invention, it is now possible to measure not only the shape and dimensions of the object to be measured, but also the roundness, etc., which increases the number of measurement items, expands the scope of use of the coordinate measuring machine, and improves its usefulness. increases.

[Brief explanation of drawings]

Figure 1 is an overall perspective view of the three-dimensional measuring machine, Figure 2 is a cross-sectional view of the surrounding area of the Z-axis structure, Figure 3 is a cross-sectional view showing the internal structure of the Z-axis structure, and Figure 4 is a diagram showing the blowing force. FIG. 5 is a partially sectional side view showing the structure of a probe for roundness etc. housed in the 3D measuring machine, and FIG. 5 is a block diagram showing the electrical configuration of the three-dimensional measuring machine. 3... Stage, 8... Z-axis structure, 9... Z spindle, 10... Probe, 29... Measurement object,
34° 52... Measuring point, 35... Touch signal type probe, 36... Round shaft-like portion, 37... Probe for roundness, etc., 40... Position changing means, 51... Displacement detector, 65... Rotation drive means, 74... Angle positioning means, 78... Angle detector, 91... Probe attachment/detachment mechanism, 98... Data processing device.

Claims (1)

[Claims] (1) Z of the measurement target placed on the stage and the measuring machine body
A probe supported on a spindle is moved three-dimensionally relative to each other by a moving mechanism, the amount of relative movement between the measurement surface of the object to be measured and the probe of the probe is detected, and this detected amount of movement is processed by a data processing device. In a three-dimensional measuring machine that measures the dimensions, etc. of the object to be measured through predetermined processing, the Z spindle is rotated within a hollow Z-axis structure that is movably axially movable and non-rotatably supported by the main body of the measuring machine. and a rotational drive means for rotating the Z spindle and the Z after the rotational drive means is operated.
An angular positioning means for fixing the rotational direction relative position with the shaft structure at a predetermined angle, and a posture for forcibly moving the probe of the probe linearly in the radial direction of the probe to change its posture. a changing means; and a measuring surface shape of the round shaft-like portion of the measuring object when the rotary drive means is operated while the measuring head is brought into contact with the round shaft-like portion of the object to be measured from the radial direction thereof. a displacement detector that converts the amount of radial displacement that changes accordingly into an analog signal and outputs it; a measurement surface of the round shaft-shaped portion that is connected to the rotational drive means and is displaced by the operation of the rotational drive means; an angle detector for detecting a positional relationship in a rotational direction with respect to a child; the round shaft-shaped portion of the measurement target is fixedly set in a constant posture on the object table by activating the rotation drive means; A three-dimensional measuring machine characterized by being configured to measure roundness, etc. of.