JPH0313521B2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a three-dimensional measuring machine, and more particularly to a three-dimensional measuring machine capable of measuring not only the length and hole diameter of an object to be measured, but also roundness, etc. .

[Background technology and its problems]

A moving mechanism moves the object to be measured placed on the stage and the probe supported by the Z spindle of the measuring machine relative to each other in three dimensions, thereby measuring the measurement surface of the object and the probe. There are known three-dimensional measuring machines that measure the shape or dimensions of the object to be measured by detecting the amount of movement relative to the child and processing the detected amount of movement in a predetermined manner using a data processing device. It is becoming popular because it can measure the length and diameter of holes with high precision and high speed. There are two types of three-dimensional measuring machines: manual types, in which the moving mechanism is manually driven by the measuring worker in order to bring the measuring point of the probe into contact with each measuring point of the object to be measured, and two types. There is an automatic drive type in which a drive source such as a motor is provided and the drive is controlled and driven according to a program.

However, regardless of whether it is a manual type or an automatically driven type, a three-dimensional measuring machine is capable of moving the measuring point of the probe and the object to be measured along the three orthogonal axes of the X-axis, Y-axis, and Z-axis determined by the structure of the three-dimensional measuring machine.
Since it is a relative movement in the composite direction of the axes,
Find the coordinate values for each measurement point. For example, when measuring the inner diameter of a hole, contact the measuring tip with three points on the inner circumferential surface of the hole to find the coordinate values of each point, and calculate these coordinates. The value data is processed in a predetermined manner.

For this reason, with conventional coordinate measuring machines, measurements of roundness, cylindricity, etc., which require continuous measurement data in the circumferential direction of holes and shafts, are performed in series with measurements of length and hole diameter. The object to be measured must be removed from the stage and then placed in a dedicated measuring machine to measure roundness, etc. Therefore, work efficiency was extremely low, and there were problems with measurement accuracy because the measurement conditions could not be kept the same throughout the measurement work. In particular, when the 3D measuring machine is an automatic drive type, the measurement worker must remove the object to be measured from the stage and attach it to the stage. The effectiveness of the original measuring device will be lost.

[Purpose of the invention]

With the present invention, the probe is attached to the main body of the measuring machine so that its relative position cannot be changed, which makes it impossible to measure roundness, etc. The fixed state was made with the focus on the necessity for measurement work.

An object of the present invention is to provide a three-dimensional measuring machine that can also measure the roundness, cylindricity, etc. of an object to be measured, and has a wide variety of measurement items, thereby increasing its usefulness.

[Means and actions for solving problems]

For this reason, the three-dimensional measuring machine according to the present invention moves the measuring target placed on the stage and the probe supported by the Z spindle of the measuring machine body relative to each other in three dimensions by a moving mechanism. In a three-dimensional measuring machine that measures the shape of the object, etc. by detecting the amount of relative movement between the measurement surface of the object and the measuring point of the probe, this detected amount of movement is processed by a data processing device. An angle for positioning the rotational direction angle of the rotational drive means that rotates around the Z-axis, the Z-axis structure supported by the measuring instrument body so as to be movable in the Z-axis direction but not rotatable, and the Z-spindle. a positioning means, a posture changing means for changing the posture of the probe for roundness etc. by linearly moving it in the radial direction of the probe; a displacement detector that converts the amount of displacement of the measuring head that changes depending on the shape of the measurement surface of the shaft-shaped portion into an analog signal and outputs it; and a probe for roundness, etc. that is attached to the Z spindle rotated by the rotational drive means. and an angle detector for detecting the rotational direction positional relationship between the measuring element and the measuring surface of the round shaft-shaped portion.

By rotating the probe for roundness, etc. while bringing the measuring head into contact with the round shaft-shaped part from the radial direction, roundness is measured based on the output signals of the displacement detector and angle detector, and the Z Cylindricity can be measured by moving the probe in the Z-axis direction by moving the shaft structure. Since the measuring element is movable in the radial direction of the probe for roundness etc. by the attitude changing means, it is possible to deal with round shaft-like portions having different diameter dimensions.

For example, when performing normal measurement work on the shape of an object to be measured using a touch signal type probe, the angle positioning means allows the Z-axis structure provided on the measuring machine body and the Z-axis structure attached to the Z spindle to be The rotation direction angle with the probe is determined and the probe is fixed. When measuring roundness, etc. with a roundness probe, this angle positioning means is released, and the Z
Rotate the roundness probe together with the spindle.

〔Example〕

FIG. 1 is an overall view of the coordinate measuring machine according to this embodiment. On the top of the base 1 are the left and right side covers 2.
A stage 3 is provided between the two to be movable in the Y-axis direction, and a crossbeam member 5 is attached to the upper part of a support 4 fixed to the left and right side surfaces of the base 1. 6 is provided movably in the X-axis direction. A Z-axis structure 8 is disposed inside a cover 7 that is integrated with the slider 6 so as to be movable vertically, that is, in the Z-axis direction, and a Z-spindle 9 is installed inside the Z-axis structure 8. A probe 10 is attached to the tip of a Z spindle 9 protruding from the lower end of the Z-axis structure 8. The base 1, the stage 3, the support 4, the crossbeam member 5, the slider 6, the cover 7, etc. constitute a measuring machine main body, and the probe 10 is connected to the Z spindle 9 and the Z axis structure in the measuring machine main body. It is attached via the object 8.

FIG. 2 is a sectional view of the cover 7 showing the drive device for the Z-axis structure 8. FIG. A slider 6 formed in the shape of a square frame to surround the crossbeam member 5 is slidable in the X-axis direction with respect to the crossbeam member 5 by an air bearing 11, and forms a square prism-shaped Z-axis structure. 8 is a Z-axis structure 8 in the Z-axis direction by an air bearing 13 of a bracket 12 coupled to the slider 6.
It is made to be movable in the axial direction, and cannot be rotated about the Z axis. A motor 14 is installed on the slider 6, and a screw shaft 18 whose axial direction is in the vertical direction is connected to the drive shaft of the motor 14 via a pulley 15, a timing belt 16, and a pulley 17, and is screwed into the screw shaft 18. The screwed nut member 19 is provided with rotatable rollers 21 that sandwich the guide rail 20 attached to the cover 7 from both sides, and when the screw shaft 18 is rotated by the motor 14, the nut member 19 is prevented from rotating by the rollers 21. and is moved up and down by the feeding action of the screw shaft 18. The nut member 19 is integrally provided with a protruding member 22 extending toward the Z-axis structure 8, and this protruding member 22 is sandwiched from above and below by a connecting member 23 coupled to the upper end of the Z-axis structure 8. The member 19 and the Z-axis structure 8 are connected,
When the nut member 19 moves up and down, the Z-axis structure 8
Move in the axial direction.

The above motor 14, screw shaft 18, and nut member 1
9 and the like constitute a drive device 24 for moving the Z-axis structure 8 in the Z-axis direction. Z-axis structure 8
An air balance cylinder 25 is assembled into the cylinder 25, and a piston rod 27 of a piston 26 slidably disposed inside the cylinder 25 is connected to the upper end of a bracket 28 fixed to the slider 6. Since air is supplied to the upper part of the piston 26, the pressure of this air causes the Z-axis structure 8 to move up and down while its weight is balanced and supported.

The movement of the stage 3 in the Y-axis direction with respect to the base 1 and the movement of the slider 6 in the X-axis direction with respect to the crossbeam member 5 are carried out by a motor, screw shaft, etc., similar to the drive device 24 of the Z-axis structure 8. These X-axis, Y-axis
The driving devices for the axis and Z-axis are controlled by a computer according to a preset program, and the probe 10 is moved three-dimensionally to the object 29 fixedly set on the stage 3 according to the measurement procedure. Move relative to.

When the stage 3 moves relative to the base 1, a relative movement occurs between the probe 10 and the object to be measured 29 in the Y-axis direction, and when the slider 6 moves relative to the crossbeam member 5, the probe 10 moves toward the object to be measured. When the object 29 moves in the X-axis direction and the Z-axis structure 8 further moves relative to the slider 6, the probe 10 and the measurement target 29 move in the Z-axis direction. Said X
The probe 10 is operated by the respective drive devices for the axis, Y axis, and Z axis, the stage 3, the crossbeam member 5, etc.
A moving mechanism is configured to relatively move the object 29 and the measurement object 29 in three dimensions, and each drive device is controlled by a computer based on a program, so the three-dimensional measuring machine according to this embodiment is an automatic drive type. ing. The amount of relative movement in the Y-axis direction of the probe 10 with respect to the object to be measured 29 is determined by a Y-axis movement amount detector 30 provided between the base 1 and the workpiece 3 (see FIG. 5).
The amount of relative movement of the probe 10 with respect to the object to be measured 29 in the X-axis direction and the Z-axis direction is detected by the
Axis movement amount detector 31, slider 6 and Z-axis structure 8
It is detected by a Z-axis movement amount detector 32 provided between the

As shown in FIG. 1, a probe stocker 33 is installed at the rear end of the workpiece table 3, and this probe stocker 33 has a probe stocker 33 that is attached to the Z spindle 9 according to the shape of the measurement surface of the object 29. A plurality of probes 10 are stored which are replaced and installed in sequence. The probe 10 includes a touch signal type probe 35 that outputs a touch signal when the measuring tip 34 comes into contact with the measurement surface of the measurement object 29, and a round shaft-shaped portion such as a hole 36A and a cylindrical portion 36B formed in the measurement object 29. There is a roundness probe 37 for measuring roundness, cylindricity, etc. of 36. The touch signal type probe 35 includes probes with different lengths of the probe 34,
There are probes that can be bent and rotated with respect to the axis of the probe body, and the probe 34 can be held in that bent position. A signal probe 35 is attached.

As shown in Fig. 4, the probe stocker 33 is
The bottom part 33A attached to the top surface of the bottom part 33
It is made up of a leg 33B that stands up from A and a top 33C that is horizontally fixed to the upper end of the leg 33B, and has a U-shape on the side. A planar U-shaped groove 34 that opens forward is formed in the top portion 33C.
There are a plurality of probes 4, and each probe 10 is inserted and engaged in a predetermined groove 34 and stored in a corresponding position of the probe stocker 33. The roundness probe 37 includes a probe body 39, an attitude changing mechanism 41 constituting an attitude changing means 40, and a detection unit 42.

The probe body 39 has a pull stud 43 at its upper end, and a tapered protrusion 44 and a flange 45 are integrally provided at the lower part of the pull stud 43. The structure of the probe body 39 is the same as that of the touch signal type probe 35. A screw shaft 48 is provided at the bottom of the probe body 39 and is rotatably supported by bearings 47 at both ends of a support member 46. This screw shaft 48, which is a ball screw and whose axial direction is horizontal, is fitted with a nut member. 49 are screwed together, and the nut member 49 is held inside a holding member 50 that slidably contacts the lower surface of the support member 46 and is prevented from rotating. When the screw shaft 48 rotates, the nut member 50 is moved horizontally by the feeding action of the screw shaft 48. These screw shafts 48, nut members 49, etc. constitute the attitude changing mechanism 41.

The detection unit 42 is attached to the lower surface of the holding member 50, and the detection unit 42 includes a displacement detector 51 and a probe 52 extending downward from the displacement detector 51. When the holding member 50 is horizontally moved by the rotation of the screw shaft 48, the measuring stylus 52 is forcibly moved linearly in the radial direction of the probe 37, and as a result, the attitude of the measuring stylus 52 is changed. Measuring head 5
The upper end of the probe 2 is swingably connected to a displacement detector 51, and the probe 52 is tiltable in the Z-axis direction, so that it can be displaced in a direction perpendicular to the Z-axis, that is, in a horizontal direction. The displacement detector 51 is constituted by a differential transformer or the like that detects the amount of displacement of the measuring stylus 52 in the horizontal direction, and outputs an electrical analog signal corresponding to the amount of displacement of the measuring stylus 52.

One end of the screw shaft 48 projects from the bearing 47, and a first clutch member 53 is attached to this projecting end. When the roundness probe 37 is placed and housed in the probe stocker 33, the first clutch member 53 passes through the hole 54 formed in the leg 33B of the probe stocker 33, and protrudes to the rear. A motor 56 is connected to the probe stocker 33 via a bracket 55.
A second clutch member 57 is provided on the output shaft of a motor 56 which is attached to the probe stocker 33 and is disposed on the rear side of the probe stocker 33. The first and second clutch members 53 and 57 constitute an electromagnetic clutch 58, and when the electromagnetic clutch 58 is connected and the motor 56 rotates, the feed screw shaft 48 rotates.

In this way, the motor 56 constitutes a driving device that rotates the screw shaft 48 to drive the attitude changing mechanism 41, and the attitude changing mechanism 41 and the motor 56 adjust the position of the measuring head 52 linearly in the radial direction of the probe 37. An attitude changing means 40 is configured to move the object.

FIG. 3 shows the internal structure of the Z-axis structure 8.
A motor 59 is disposed facing downward inside the hollow Z-axis structure 8, and a small-diameter gear 60 attached to the output shaft of this motor 59 is connected to a large-diameter gear 62 for deceleration attached to the upper end of an intermediate shaft 61. The Z spindle 9 is integrally connected to the lower end of the intermediate shaft 61, and the Z spindle 9 is rotatable about the Z axis by a bearing 63. A pin 64 is provided at the tip of the Z spindle 9 exposed from the lower end of the Z-axis structure 8, and when this pin 64 engages with a hole formed in the flange portion 45 of the probe 10, the probe 10 is attached to the Z spindle 9. is circumferentially positioned and supported. The motor 59, the small diameter gear 60, the large diameter gear 62, the connecting shaft 61, etc. constitute a rotation driving means 65 for rotating the Z spindle 9 and the probe 10.

A first gear 67, which is one of the meshing members of the carbik coupling 66, is attached to the connection shaft 61, and a second gear 68, which is the other meshing member, vertically faces the first gear 67. The second gear 68 is integrated with a piston rod 71 of a piston 70 that is movable up and down in a cylinder 69, and the piston 70 is supported by a spring 72.
The first and second
Gears 67 and 68 mesh. 2nd gear 68 has Z
A diaphragm 73 coupled to the shaft structure 8 is attached, and since the diaphragm 73 is movable up and down, the second gear 68 can move up and down, but the rotation of the second gear 68 is prevented by the diaphragm 73. It's summery. first and second gears 67,
68 has a large number of teeth formed in the circumferential direction, so when the first and second gears 67 and 68 are engaged, rotation of the Z spindle 9 and probe 10 becomes impossible, and these Z spindle 9 and probe 10 rotational direction angular positioning is performed, and this angular positioning can be performed at any position in the rotational direction. These first and second gears 6
7, 68, cylinder 69, etc., constitute an angular positioning means 74 for fixing the rotational direction relative positions of the Z spindle 9 and probe 10 with respect to the Z axis structure 8 around the Z axis at a predetermined angular position.

A rotary disk 75 is attached to the connecting shaft 61 , and a detector 76 that constitutes a rotary encoder 77 together with the rotary disk 75 is attached to the inner surface of the Z-axis structure 8 . The angle detector 78 is connected to the rotation drive means 65 and detects the rotation angle of the Z spindle 9 and the probe 10 driven by the rotation drive means 65. In addition to the rotary encoder 77, the angle detector 78 may be a pulse generator, for example.

A cylinder 79 is installed inside the Z-axis structure 8, and a piston rod 81 of a piston 80 of this cylinder 79 extends downward and is inserted into the inside of the hollow connecting shaft 61. The lower end of the piston rod 81 is connected to the upper end of a drive rod 82 inserted into the hollow Z spindle 9 via a ball 83.
The drive rod 82 is constantly urged upward by a spring 84. Therefore, the piston rod 81 and the drive rod 82 move together in the axial direction, but the drive rod 82 can freely rotate relative to the piston rod 81. A ball holder 86 is provided at the lower end of the drive rod 82 and is vertically slidably disposed in a small diameter hole 85 formed in the center of the Z spindle 9. A plurality of balls 88 are arranged to be movable in the radial direction. A large diameter hole 89 is formed inside the Z spindle 9 and is continuous with the small diameter hole 85.
A tapered hole 90 is formed continuously in the lower surface of the Z spindle 9.

An error is supplied to the cylinder 79 to push down the piston rod 81 and the drive rod 82 against the spring 84, and the ball holder 86 is moved between the ball 88 and the large diameter hole 89.
When the pull stud 43 of the probe 10 is inserted into the inside of the ball holder 86 in this state, the balls 88 are pushed outward in the radial direction and the pull stud 43 is inserted into the inside of the ball holder 86. When insertion becomes possible and the air is then discharged from the cylinder 79 and the drive rod 82 and piston rod 81 are raised by the biasing force of the spring 84, the ball 88 moves from the large diameter hole 89 to the small diameter hole 85.
As a result, the ball 88 engages with the small diameter shaft of the pull stud 43 and the probe 10 is moved together with the ball holder 86.
is pulled up, and the probe 10 is mounted on the Z spindle 9 while being positioned by fitting the tapered protrusion 44 into the tapered hole 90. When air is again supplied to the cylinder 79 and the ball holder 86 is pushed down to align the ball 88 with the large diameter hole 89, the ball 88 is moved radially outward due to the taper action of the pull stud 43 and the weight of the probe 10. The probe 10 is detached from the Z spindle 9.

The probe 1 is assembled by the cylinder 79, piston rod 81, drive rod 82, ball holder 86, etc.
A probe attachment/detachment mechanism 91 is configured to attach and detach the probe to the Z spindle 9.

Next, we will discuss the effect.

As shown in FIG. 1, the measurement work is performed on a measurement object 29, such as a hole 36A, a cylindrical portion 36B, etc., whose inner diameter or outer diameter needs to be measured for roundness, cylindricity, etc. When the first measurement operation is performed using a touch signal type probe 35 in which the position of the measuring point 34 is bent with respect to the probe body as shown in FIG. It should match the inclination direction of the measurement surface of the measurement object 9. That is, air is supplied to the cylinder 69 of the angle positioning means 74 shown in FIG.
2, the second gear 68 is disengaged from the first gear 67, and the Z spindle 9 is made freely rotatable.
By rotating the motor 59 of No. 5, the Z spindle 9 and the touch signal type probe 35 are rotated about the Z axis via the small diameter gear 60, the large diameter gear 62, and the connecting shaft 61. Touch signal probe 3
When the direction of the probe 34 of No. 5 reaches a predetermined direction, the rotation of the motor 59 is stopped, and then the rotation of the cylinder 6 is stopped.
Air is discharged from 9 and the second
The gear 68 is meshed with the first gear 67, thereby positioning the Z spindle 9 and the touch signal type probe 35 at their rotational angular positions by the action of the angle positioning means 74, keeping them in a fixed state, and keeping the direction of the probe 34 constant. . The amount of rotation of the motor 59 is controlled by a computer that drives and controls the moving mechanism.

Next, the drive devices for each of the X, Y, and Z axes are driven while being controlled by a computer based on a program, and the touch signal type probe 35 and the object to be measured 29 move relative to each other in three dimensions. This relative movement is performed for each measurement step according to the programmed measurement procedure, and if necessary, the orientation of the probe 34 is changed for each measurement step in the same manner as described above.

The amount of relative movement between the touch signal type probe 35 and the object to be measured 29 on the X-axis, Y-axis, and Z-axis is the fifth
It is detected by the detectors 30, 31, 32 shown in the figure, and the outputs from these detectors 30, 31, 32 are waveform-shaped, divided, etc. by the detection circuits 92, 93, 94, and are converted into a number of pulses according to the amount of relative movement. is generated, the number of pulses is counted by counters 95, 96, and 97, and the count value signal is input to data processing device 98. The touch signal type probe 35 outputs a touch signal when the probe 34 comes into contact with the measurement surface of the object 29 at each measurement step, and when this touch signal is input to the data processing device 98, the counter 95 at the time of the touch signal generation , 96 and 97, a data processing device 98 having an arithmetic function calculates the shape, length, pore diameter, etc. of the object to be measured 29 for each measurement step, and the measured results are displayed. It is digitally displayed on the device 99 and recorded on the recording device 100. When the touch signal type probe 35 is connected to the counters 95, 96, 97, when the touch signal is output, the counters 95, 96, 97 hold the number of pulses at that time, and this held signal value Based on this, the data processing device 98 calculates the shape etc. of the measurement target object 29.

When the next measurement operation is to measure the roundness of the round shaft-shaped portion 36, the circularity etc. stored in the probe stocker 33 are prepared while the above measurement operation is being carried out. Preparation work for the probe 37 is performed in advance. To explain specifically, the fourth
The electromagnetic clutch 58 shown in the figure is connected, the motor 56 constituting the attitude changing means 40 is rotated, the screw shaft 48 is rotated, and the position of the probe 52 is forcibly moved linearly in the radial direction of the probe 37. Therefore, when the probe 37 is attached to the Z spindle 9, the distance between the center axis of the Z spindle 9 and the measuring tip 52 can be determined as the distance corresponding to the radius of the round shaft portion 36 whose roundness etc. are to be measured. do. After this,
Disconnect the electromagnetic clutch 58. The amount of rotation of the motor 56 is controlled by the computer.

In this way, in this embodiment, the preparation work for the roundness probe 37 for measuring work such as roundness is carried out while the previous measurement work is being carried out, so that the measurement work time can be shortened. can be achieved.
In addition, since the position of the measuring tip 52 of the probe 37 can be freely moved in the radial direction with respect to the probe body 39 by the attitude changing means 40, commonality can be maintained for the round shaft-shaped portion 36 having an arbitrary diameter dimension. The number of probes required for measuring roundness etc. can be reduced. In particular, the attitude changing means 40 consists of an attitude changing mechanism 41 and a motor 56 as a driving device for driving this mechanism 41, and the motor 56 is attached to the probe stocker 33 and is not provided on the probe 37. , the weight of the probe 37 can be reduced accordingly, and the attitude change mechanism 41 can be enlarged to increase the amount of movement of the probe 52.

After the measurement work using the touch signal type probe 35 is completed, move the stage 3 shown in Fig. 1 in the Y-axis direction and
The probe stocker 33 is positioned directly below the shaft structure 8, then the slider 6 is moved in the X-axis direction, the Z-axis drive device 24 shown in FIG. By supplying air to the cylinder 79 shown in FIG. 3 and lowering the ball holder 86, the touch signal type probe 35 is transferred from the Z spindle 9 to the corresponding position of the probe stocker 33 by the probe attachment/detachment mechanism 91. , to store. After this, Z-axis structure 8
The slider 6 is further moved in the X-axis direction to position the Z-axis structure 8 directly above the roundness probe 37, and the Z-axis structure 8 is lowered again and the probe attachment/detachment mechanism 91 This probe 37
Attach it to the Z-axis spindle 9.

Next, the probe 3 for roundness etc. is driven by the respective drive devices for the X-axis, Y-axis, and Z-axis.
7 close to the round shaft-shaped portion 36 of the object to be measured 29,
Furthermore, the measuring element 52 is brought into contact with the measuring surface of this round shaft-shaped portion 36 from the radial direction. By supplying air to the cylinder 69 of the angle positioning means 74 shown in FIG. 3, the meshing between the first gear 67 and the second gear 68 is released, and then by rotating the motor 59 of the rotation drive means 65, the Z The spindle 9 and probe 37 are rotated around the Z axis.
As a result, the measuring stylus 52 moves around the measuring surface of the round shaft-like portion 36 and moves around the round shaft-like portion 36 according to the shape of the measuring surface.
6, the displacement detector 51 of the probe 37 outputs a continuous analog signal corresponding to the amount of displacement of the probe 52, and this signal is input to the data processing device 98 shown in FIG. Ru. During the above work, since the connecting shaft 61, which rotates together with the Z spindle 9, is provided with an angle detector 78 using a rotary encoder 77, this angle detector 78 detects the measurement surface of the round shaft portion 36. The positional relationship in the rotational direction between the probe 52 and the probe 52 is constantly detected, and this detection signal is input to the data processing device 98.

Output signal from displacement detector 51 and angle detector 7
The output signal from 8 is processed by a data processing device 98 to determine the roundness of the round shaft-shaped portion 36, and this measurement result is digitally displayed on a display device 99.
It is also recorded in the storage device 100. Note that during this roundness measurement, Z is the rotation center of the probe 37.
Although it is preferable that the axial center of the spindle 9 and the center of the round shaft-like portion 36 are made to correspond accurately, even if they do not match, it can be corrected by calculation of the data processing device 98.

When measuring the roundness and cylindricity of multiple locations on the round shaft-shaped portion 36, the Z spindle 9 and the probe 37 are rotated by the rotation driving means 65 as described above, and the Z
The vertical movement of the Z-axis structure 8 by the shaft drive device 24 may be carried out, and the vertical movement amount of the Z-axis structure 8 inputted to the data processing device 90 for calculating the cylindricity is the aforementioned Z-axis movement amount. obtained by the detector 32. Note that the probe 3 is rotated by the rotational drive means 65.
It is also possible to measure the surface roughness in the circumferential direction of the round shaft-shaped portion 36 by rotating the shaft.

After the above-mentioned roundness measurement work is completed, if another probe 10 stored in the probe stocker 33 is to be used for measurement, the probe is replaced using the same procedure as described above.

The probe replacement work and the measurement work of roundness and the like using the rotary drive means 65 and the like are automatically performed under computer control.

As is clear from the above, rotating the roundness probe 37 around the Z-axis to measure roundness, cylindricity, etc.
This can be done by using the rotary drive means 65 built into the Z-axis structure 8 to orient the measuring element 34 in a predetermined direction, and by using the same means, it is possible to measure roundness, etc. . An angular positioning means 74 for positioning the Z spindle 9 and the probe 35 in the rotational direction is provided inside the Z-axis structure 8. Since this angular positioning means 74 can be released, roundness and cylindricity can be adjusted. For measurement operations such as the above, it is sufficient to release the switch, and it is used only for measurement operations using the touch signal type probe 35.

In the three-dimensional measuring machine of the above embodiment, the X-axis and Y-axis were horizontal and the Z-axis was vertical.
One of the axes may be vertical, and the other and the Z axis may be horizontal. Further, although the above embodiment is a case of automatically driven three-dimensional measurement, the present invention is also applicable to a manual three-dimensional measuring machine in which the measurement operator performs three-dimensional relative movement between the probe and the object to be measured. can. However, if the present invention is applied to an automatic drive type measuring machine, it can automatically measure the shape, dimensions, etc. of the object to be measured, as well as the roundness, cylindricity, etc. of the round shaft-like part without manual intervention. In addition, in a coordinate measuring machine of the type that prepares multiple probes according to the measurement surface of the object to be measured and replaces them as in the above embodiment, the work including probe replacement work is now possible. All operations can be performed continuously and automatically. Furthermore, in the automatic drive type three-dimensional measuring machine, the equipment necessary for measuring roundness, cylindricity, etc. Drive control can now be performed using a computer pre-installed in the measuring machine.

〔Effect of the invention〕

According to the present invention, it is now possible to measure not only the shape and dimensions of the object to be measured, but also the roundness, etc., which increases the number of measurement items, expands the scope of use of the coordinate measuring machine, and improves its usefulness. increases.

[Brief explanation of the drawing]

Figure 1 is an overall perspective view of the three-dimensional measuring machine, Figure 2 is a sectional view of the vicinity of the Z-axis structure, Figure 3 is a sectional view showing the internal structure of the Z-axis structure, and Figure 4 is the probe stocker. FIG. 5 is a partially sectional side view showing the structure of a probe for roundness etc. housed in the 3D measuring machine, and FIG. 5 is a block diagram showing the electrical configuration of the three-dimensional measuring machine. 3... Stage, 8... Z-axis structure, 9... Z spindle, 10... Probe, 29... Measurement object, 34, 52... Measuring head, 35... Touch signal type probe, 36 ... Round shaft-shaped portion, 37 ... Probe for roundness, etc., 40 ... Attitude changing means, 51 ...
...Displacement detector, 65... Rotation drive means, 74...
Angle positioning means, 78... Angle detector, 91...
...Probe attaching/detaching mechanism, 98...Data processing device.

Claims (1)

[Scope of Claims] 1. The object to be measured placed on the stage and the probe supported by the Z spindle of the main body of the measuring machine are moved relative to each other in three dimensions by a moving mechanism, and the object to be measured is In a three-dimensional measuring machine that detects the amount of relative movement between the measurement surface and the measuring tip of the probe, and processes the detected movement amount in a predetermined manner in a data processing device to measure the dimensions of the object to be measured, the Z spindle is a rotation drive means for rotating inside a hollow Z-axis structure which is axially movable and non-rotatably supported by the measuring instrument body; and after the rotation drive means is operated, the Z-spindle and the Z-axis structure are rotated. An angular positioning means for fixing the relative position in the rotational direction at a predetermined angle; An attitude changing means for forcibly moving the probe of the probe linearly in the radial direction of the probe to change its attitude; a diameter that changes depending on the shape of the measurement surface of the round shaft-like portion of the measuring point when the rotary drive means is operated while the measuring head is brought into contact with the round shaft-like portion of the object to be measured from the radial direction; a displacement detector that converts the amount of directional displacement into an analog signal and outputs it; and a displacement detector that is connected to the rotational drive means and detects the rotational direction of the measuring surface of the round shaft-shaped portion and the measuring head that is displaced by the operation of the rotational drive means. an angle detector for detecting a positional relationship, and the roundness, etc. of the round shaft-shaped portion of the measurement target fixedly set in a constant posture on the document stand by actuating the rotation drive means. A three-dimensional measuring machine characterized by being configured to measure.