JPS6280325U - - Google Patents
Info
- Publication number
- JPS6280325U JPS6280325U JP17316385U JP17316385U JPS6280325U JP S6280325 U JPS6280325 U JP S6280325U JP 17316385 U JP17316385 U JP 17316385U JP 17316385 U JP17316385 U JP 17316385U JP S6280325 U JPS6280325 U JP S6280325U
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- substrate
- heat shield
- body made
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17316385U JPS6280325U (cs) | 1985-11-11 | 1985-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17316385U JPS6280325U (cs) | 1985-11-11 | 1985-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6280325U true JPS6280325U (cs) | 1987-05-22 |
Family
ID=31110366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17316385U Pending JPS6280325U (cs) | 1985-11-11 | 1985-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6280325U (cs) |
-
1985
- 1985-11-11 JP JP17316385U patent/JPS6280325U/ja active Pending