JPS6150761U - - Google Patents
Info
- Publication number
- JPS6150761U JPS6150761U JP13414884U JP13414884U JPS6150761U JP S6150761 U JPS6150761 U JP S6150761U JP 13414884 U JP13414884 U JP 13414884U JP 13414884 U JP13414884 U JP 13414884U JP S6150761 U JPS6150761 U JP S6150761U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- support
- processed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13414884U JPS6150761U (cs) | 1984-09-04 | 1984-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13414884U JPS6150761U (cs) | 1984-09-04 | 1984-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6150761U true JPS6150761U (cs) | 1986-04-05 |
Family
ID=30692668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13414884U Pending JPS6150761U (cs) | 1984-09-04 | 1984-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6150761U (cs) |
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1984
- 1984-09-04 JP JP13414884U patent/JPS6150761U/ja active Pending