JPS63110024U - - Google Patents
Info
- Publication number
- JPS63110024U JPS63110024U JP153487U JP153487U JPS63110024U JP S63110024 U JPS63110024 U JP S63110024U JP 153487 U JP153487 U JP 153487U JP 153487 U JP153487 U JP 153487U JP S63110024 U JPS63110024 U JP S63110024U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- support portion
- substrate holder
- annular protrusion
- protrudes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP153487U JPS63110024U (cs) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP153487U JPS63110024U (cs) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110024U true JPS63110024U (cs) | 1988-07-15 |
Family
ID=30779532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP153487U Pending JPS63110024U (cs) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110024U (cs) |
-
1987
- 1987-01-09 JP JP153487U patent/JPS63110024U/ja active Pending