JPS6280199U - - Google Patents

Info

Publication number
JPS6280199U
JPS6280199U JP17195785U JP17195785U JPS6280199U JP S6280199 U JPS6280199 U JP S6280199U JP 17195785 U JP17195785 U JP 17195785U JP 17195785 U JP17195785 U JP 17195785U JP S6280199 U JPS6280199 U JP S6280199U
Authority
JP
Japan
Prior art keywords
furnace
chamber
outside
tight box
introduction pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17195785U
Other languages
English (en)
Japanese (ja)
Other versions
JPS634957Y2 (US20030199744A1-20031023-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17195785U priority Critical patent/JPS634957Y2/ja
Publication of JPS6280199U publication Critical patent/JPS6280199U/ja
Application granted granted Critical
Publication of JPS634957Y2 publication Critical patent/JPS634957Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Powder Metallurgy (AREA)
  • Furnace Details (AREA)
JP17195785U 1985-11-07 1985-11-07 Expired JPS634957Y2 (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17195785U JPS634957Y2 (US20030199744A1-20031023-C00003.png) 1985-11-07 1985-11-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17195785U JPS634957Y2 (US20030199744A1-20031023-C00003.png) 1985-11-07 1985-11-07

Publications (2)

Publication Number Publication Date
JPS6280199U true JPS6280199U (US20030199744A1-20031023-C00003.png) 1987-05-22
JPS634957Y2 JPS634957Y2 (US20030199744A1-20031023-C00003.png) 1988-02-09

Family

ID=31108062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17195785U Expired JPS634957Y2 (US20030199744A1-20031023-C00003.png) 1985-11-07 1985-11-07

Country Status (1)

Country Link
JP (1) JPS634957Y2 (US20030199744A1-20031023-C00003.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01114635U (US20030199744A1-20031023-C00003.png) * 1987-09-29 1989-08-02
JP2005325371A (ja) * 2004-05-12 2005-11-24 Ishikawajima Harima Heavy Ind Co Ltd 真空浸炭炉
WO2019117250A1 (ja) * 2017-12-15 2019-06-20 芝浦メカトロニクス株式会社 有機膜形成装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01114635U (US20030199744A1-20031023-C00003.png) * 1987-09-29 1989-08-02
JP2005325371A (ja) * 2004-05-12 2005-11-24 Ishikawajima Harima Heavy Ind Co Ltd 真空浸炭炉
WO2019117250A1 (ja) * 2017-12-15 2019-06-20 芝浦メカトロニクス株式会社 有機膜形成装置
JPWO2019117250A1 (ja) * 2017-12-15 2020-12-24 芝浦メカトロニクス株式会社 有機膜形成装置
US11906246B2 (en) 2017-12-15 2024-02-20 Shibaura Mechatronics Corporation Organic film forming apparatus

Also Published As

Publication number Publication date
JPS634957Y2 (US20030199744A1-20031023-C00003.png) 1988-02-09

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