JPS6275480U - - Google Patents

Info

Publication number
JPS6275480U
JPS6275480U JP16861885U JP16861885U JPS6275480U JP S6275480 U JPS6275480 U JP S6275480U JP 16861885 U JP16861885 U JP 16861885U JP 16861885 U JP16861885 U JP 16861885U JP S6275480 U JPS6275480 U JP S6275480U
Authority
JP
Japan
Prior art keywords
heater
preheating section
temperature control
control circuit
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16861885U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16861885U priority Critical patent/JPS6275480U/ja
Publication of JPS6275480U publication Critical patent/JPS6275480U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例であるＩＣ検査装
置における予備加熱部の温度制御回路を示す回路
構成図、第２図は従来のＩＣ検査装置における予
備加熱部の温度制御回路を示す回路構成図である
。 図において、１…ヒータ、２…商用電源、３…
電子スイツチ、４…温度制御信号発生器、５…温
度センサ、６…インピーダンス制御信号発生器、
７…可変インピーダンス素子である。なお、各図
中、同一符号は同一、又は相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ＩＣを検査する装置の予備加熱部において、ヒ
    ータに供給する電流を、このヒータの周囲温度の
    状態に応じて制御可能としたことを特徴とするＩ
    Ｃ検査装置における予備加熱部の温度制御回路。
JP16861885U 1985-10-30 1985-10-30 Pending JPS6275480U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16861885U JPS6275480U (ja) 1985-10-30 1985-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16861885U JPS6275480U (ja) 1985-10-30 1985-10-30

Publications (1)

Publication Number Publication Date
JPS6275480U true JPS6275480U (ja) 1987-05-14

Family

ID=31101661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16861885U Pending JPS6275480U (ja) 1985-10-30 1985-10-30

Country Status (1)

Country Link
JP (1) JPS6275480U (ja)

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