JPS6275070U - - Google Patents
Info
- Publication number
- JPS6275070U JPS6275070U JP16860985U JP16860985U JPS6275070U JP S6275070 U JPS6275070 U JP S6275070U JP 16860985 U JP16860985 U JP 16860985U JP 16860985 U JP16860985 U JP 16860985U JP S6275070 U JPS6275070 U JP S6275070U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- shroud
- molecular beam
- beam epitaxy
- epitaxy apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16860985U JPH057250Y2 (enExample) | 1985-10-30 | 1985-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16860985U JPH057250Y2 (enExample) | 1985-10-30 | 1985-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6275070U true JPS6275070U (enExample) | 1987-05-14 |
| JPH057250Y2 JPH057250Y2 (enExample) | 1993-02-24 |
Family
ID=31101643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16860985U Expired - Lifetime JPH057250Y2 (enExample) | 1985-10-30 | 1985-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057250Y2 (enExample) |
-
1985
- 1985-10-30 JP JP16860985U patent/JPH057250Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057250Y2 (enExample) | 1993-02-24 |