JPH057250Y2 - - Google Patents

Info

Publication number
JPH057250Y2
JPH057250Y2 JP1985168609U JP16860985U JPH057250Y2 JP H057250 Y2 JPH057250 Y2 JP H057250Y2 JP 1985168609 U JP1985168609 U JP 1985168609U JP 16860985 U JP16860985 U JP 16860985U JP H057250 Y2 JPH057250 Y2 JP H057250Y2
Authority
JP
Japan
Prior art keywords
shroud
stopper
opening
crucible
molecular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985168609U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6275070U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985168609U priority Critical patent/JPH057250Y2/ja
Publication of JPS6275070U publication Critical patent/JPS6275070U/ja
Application granted granted Critical
Publication of JPH057250Y2 publication Critical patent/JPH057250Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985168609U 1985-10-30 1985-10-30 Expired - Lifetime JPH057250Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985168609U JPH057250Y2 (enExample) 1985-10-30 1985-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985168609U JPH057250Y2 (enExample) 1985-10-30 1985-10-30

Publications (2)

Publication Number Publication Date
JPS6275070U JPS6275070U (enExample) 1987-05-14
JPH057250Y2 true JPH057250Y2 (enExample) 1993-02-24

Family

ID=31101643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985168609U Expired - Lifetime JPH057250Y2 (enExample) 1985-10-30 1985-10-30

Country Status (1)

Country Link
JP (1) JPH057250Y2 (enExample)

Also Published As

Publication number Publication date
JPS6275070U (enExample) 1987-05-14

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