JPS627402A - Apparatus for making pure water - Google Patents

Abstract

PURPOSE:To miniaturize the titled apparatus and to obtain high purity water by substituting the elemental machinery of a primary pure water system with an evaporation apparatus, by arranging a raw water cooler in the condensing part of an evaporation apparatus partitioned by a gas permeable membrane and sending raw water from the cooler to the evaporation part of the evaporation apparatus while heating the same. CONSTITUTION:An evaporation apparatus 10 is partitioned into an evaporation part 10a and a condensing part 10b by a gas permeable membrane 11 and a raw water cooler 12 is arranged in the condensing part 10b. Raw water passing through the cooler 12 passes through piping 13 and a part thereof is drained to a drain tank 14 while the remainder is guided to the suction side of a water feed pump 15 and passed through the evaporation part 10a of the evaporation apparatus 10 through a heater 16 to be drained to a drain tank 17. The raw water is evaporated in the evaporation part 10a while generated steam is flowed in the condensing part 10b through the gas permeable membrane 11 and condensed under cooling by the cooler 12 to form pure water which is, in turn, led out from a pure water feed-out pipe 18. The pure water from this primary pure water system is treated with a secondary pure water system consisting of an ultraviolet sterilizing lamp 20, a polisher 21 and an ultrafiltration apparatus 22 to be sent to a use point 23. Unused pure water B and the waste water B' of the ultrafiltration apparatus 22 are returned to the water feed pump 15.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a pure water production device, and particularly to a device suitable for obtaining pure water using a vapor permeable membrane.

[Background of the invention]

The electronic industry, which manufactures semiconductors, and the mounting industry, which manufactures pharmaceuticals, require highly purified water from which various ions, colloidal substances, and general bacteria have been removed. especially,
When manufacturing precision semiconductor devices such as integrated circuits (1, C) and large-scale integrated circuits (L, S, I), the purity of the pure water directly affects the quality of the product. Water production has become an important issue.

The system of a conventional pure water production apparatus will be explained with reference to FIG.

In the figure, the pure water production apparatus includes a primary pure water system consisting of a collection sedimentation 1, a filtration 2, a reverse osmosis membrane 3, and an ion exchange resin column 4,
It consists of a secondary pure water system consisting of a prefilter 5, a polisher 6, an ultraviolet germicidal lamp 7, and an ultrafiltration membrane 8. Raw water A'
becomes pure water A after passing through the primary pure water system and the secondary pure water system. This type of pure water production equipment consists of many elemental devices.
There is a problem that the device becomes large and requires a large installation area. Furthermore, since there are many component devices, maintenance costs are high, and since tanks are provided after the component devices to store water, there is a problem in that re-contamination such as the generation of bacteria occurs in the tank and the water quality deteriorates.

In addition, related to this type of device, for example, Japanese Patent Application Laid-open No. 57
There is No.-174189.

[Purpose of the invention]

An object of the present invention is to provide a pure water production apparatus that uses fewer component devices and produces highly purified water.

[Summary of the Invention] The present invention comprises an evaporator that is divided into a vapor section and a condensing section by a vaporization permeable membrane, a raw water cooler disposed in the condensing section, and a heater that heats and evaporates the raw water from the cooler. Consisting of a water pump that sends water to the evaporation section of the evaporator and a pure water delivery pipe that brings out pure water from the condensing section, it reduces the number of elemental devices that produce pure water, making the device more compact and achieving high purity. This allows pure water to be obtained.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIG.

FIG. 1 is a system diagram of a pure water production apparatus. In the figure, 1
0 is an evaporator, and the inside of this evaporator 10 is divided by a vaporization permeable membrane 11 into an evaporator section 10a and a condensation section 10b. A raw water cooler 12 is disposed in the condensing section 10b, and the raw water, which is cooling water, that has passed through the cooler 12 passes through a pipe 13, and a part of it is drained into a drainage tank 14. The raw water flowing through the plumber 3 is led to the suction side of the water pump 15, passes through the heater 16, passes through the evaporator section 10a of the evaporator 10, and is drained into the drain tank 17. The raw water is evaporated in the evaporator 10a, passes through the vaporization permeable membrane 11, flows into the condenser 10b, is cooled by the raw water cooler 12, and condenses to become pure water, which is led out from the pure water delivery pipe 18.

A primary pure water system is constituted by such a process.

This pure water is brought out under pressure through an inert gas introduction pipe 19 that is attached to the condensing section 10b of the evaporator 10 and discharges an inert gas such as nitrogen gas. The pure water led out from the pure water delivery pipe 18 is sterilized by passing through an ultraviolet germicidal lamp 20, trace amounts of metal ions are removed by a polisher 21, and residual suspended solids are removed by passing through an ultrafiltration desorber [22]. . This process constitutes a secondary pure water system.

The purified water obtained through the ultrafilter membrane device 22 is sent to the use point 23 and is provided for the demand for pure water.

Unused pure water at the use point 23 and wastewater B and B' from the ultrafiltration membrane device 22 are supplied to the water pump 15.
is returned to the suction port and reused. Moreover, it is also possible to replace the ultrafiltration membrane device 22 with another final filter.

The vapor that has passed through the vaporization permeable membrane 11 in the evaporator 10 is cooled by the raw water cooler 12 and condensed to become pure water, but the raw water that has not passed through the vaporization membrane 11 becomes wastewater and is led to the drainage tank 17. I'm scared. It is necessary that the solubility of the dissolved substance in this wastewater does not exceed the saturated solubility. This is to prevent the melt from crystallizing and adhering to the precipitated film 11.

As mentioned above, the primary pure water system, which conventionally consisted of a large number of elemental devices such as coagulation sedimentation, filtration, reverse osmosis membranes, and ion exchange resin towers, can be replaced with an evaporator, making the pure water production equipment more compact. can be achieved.

〔Effect of the invention〕

As explained above, according to the present invention, many elemental devices in a sub-pure water system can be replaced with evaporators, which not only makes it possible to achieve downsizing, but also allows raw water to be used as cooling water. This has the effect of improving thermal efficiency.

[Brief explanation of the drawing]

FIG. 1 is a system diagram of a pure water production apparatus according to the present invention, and FIG. 2 is a system diagram of a conventional pure water production apparatus. 10... Evaporation device, 10ε-... Evaporation section, 10b.
... Condensation section, 11 ... Permeable membrane, 12 ... Raw water cooler, 15 ... Water pump, 1G ... Heater, 18
...Pure water delivery pipe, 19...Inert gas introduction pipe, 20...
・Ultraviolet germicidal lamp.

Claims (1)

[Claims] 1. An evaporator divided into a vapor section and a condensing section by a vaporization permeable membrane, a raw water cooler disposed in the condensing section, and a heating device for heating and evaporating the raw water from the cooler. It consists of a water pump that sends water to the evaporation section of the evaporation device through a container, and a pure water delivery pipe that brings out pure water from the condensation section, and the vapor led to the evaporation section is passed through the vaporization permeable membrane. A pure water production apparatus characterized in that pure water is obtained by introducing the steam into the condensing section and condensing the steam in the condensing section by the raw water cooler. 2. The pure water production apparatus according to claim 1, characterized in that an inert gas introduction pipe is attached to the condensing part of the evaporator, and the pure water is pumped by the inert gas. . 3. In claim 1, the pure water drawn out from the condensing section of the evaporator is purified by an ultraviolet germicidal lamp, a polisher, and an ultrafiltration membrane, and then guided to the point of use. A pure water production device featuring: 4. The pure water production apparatus according to claim 3, characterized in that unused pure water at the point of use is returned to the suction port of the water pump.