JPS627343U - - Google Patents
Info
- Publication number
- JPS627343U JPS627343U JP9627785U JP9627785U JPS627343U JP S627343 U JPS627343 U JP S627343U JP 9627785 U JP9627785 U JP 9627785U JP 9627785 U JP9627785 U JP 9627785U JP S627343 U JPS627343 U JP S627343U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- chuck base
- base
- switching valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000037431 insertion Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 1
Description
第１図はこの考案のバキユームチヤツクの一実
施例を示す要部縦断面図、第２図は第１図のＡ―
Ａ線に於ける断面図、第３図は一部側面図、第４
図は従来のバキユームチヤツクを示す要部縦断面
図である。
１０……テーブル、１１……吸気孔、２０……
チヤツクベース、２１……吸気孔、２２、２３，
２４……ポケツト、２５……バルブ嵌挿孔、２６
，２７，２８……流通孔、２９……抜け止め嵌挿
孔、３０……切替えバルブ、３１，３２ａ，３２
ｂ，３３……通気孔、４０……抜け止め、５０…
…チヤツクテーブル、５１……吸着孔。
Fig. 1 is a vertical cross-sectional view of the main part showing an embodiment of the vacuum chuck of this invention, and Fig. 2 is the
A cross-sectional view taken along line A, Figure 3 is a partial side view, Figure 4 is a partial side view, and Figure 4 is a partial side view.
The figure is a longitudinal cross-sectional view of the main part of a conventional vacuum chuck. 10...Table, 11...Intake hole, 20...
Chuck base, 21...Intake hole, 22, 23,
24...Pocket, 25...Valve insertion hole, 26
, 27, 28... circulation hole, 29... retaining insertion hole, 30... switching valve, 31, 32a, 32
b, 33... Ventilation hole, 40... Retainer, 50...
...Chuck table, 51...Suction hole.
Claims (1)
を取着し、該チヤツクベース上に多数の吸着孔を
設けたチヤツクテーブルを取着してなり、前記チ
ヤツクベースの上面に外部の吸引装置と連通する
第１ポケツトを設けると共に該第１ポケツトの外
周に複数重に環状のポケツトを設け、かつ、チヤ
ツクベースに第１ポケツトと各ポケツトを適宜に
連通・遮断する切替えバルブを設けたことを特徴
とするバキユームチヤツク。 A chuck base is mounted on a table held horizontally, a chuck table having a large number of suction holes is mounted on the chuck base, and a first pocket communicating with an external suction device is provided on the upper surface of the chuck base. A vacuum chuck characterized in that a plurality of annular pockets are provided on the outer periphery of the first pocket, and a switching valve is provided on the chuck base to appropriately communicate and cut off communication between the first pocket and each pocket. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9627785U JPS627343U (en) | 1985-06-24 | 1985-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9627785U JPS627343U (en) | 1985-06-24 | 1985-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS627343U true JPS627343U (en) | 1987-01-17 |
Family
ID=30961835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9627785U Pending JPS627343U (en) | 1985-06-24 | 1985-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS627343U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6362347A (en) * | 1986-09-03 | 1988-03-18 | Rohm Co Ltd | Chuck table |
| JP2017074628A (en) * | 2015-10-13 | 2017-04-20 | 株式会社ディスコ | Machining device |
-
1985
- 1985-06-24 JP JP9627785U patent/JPS627343U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6362347A (en) * | 1986-09-03 | 1988-03-18 | Rohm Co Ltd | Chuck table |
| JP2017074628A (en) * | 2015-10-13 | 2017-04-20 | 株式会社ディスコ | Machining device |