JPS6273122A - 精密測定用光学装置 - Google Patents

精密測定用光学装置

Info

Publication number
JPS6273122A
JPS6273122A JP21263185A JP21263185A JPS6273122A JP S6273122 A JPS6273122 A JP S6273122A JP 21263185 A JP21263185 A JP 21263185A JP 21263185 A JP21263185 A JP 21263185A JP S6273122 A JPS6273122 A JP S6273122A
Authority
JP
Japan
Prior art keywords
laser light
output
measured
diffraction grating
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21263185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0346054B2 (cg-RX-API-DMAC10.html
Inventor
Yasuaki Kido
貴堂 靖昭
Minoru Asada
浅田 実
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOYAMA KOGYO KOUTOU SENMON GATSUKOUCHIYOU
Original Assignee
TOYAMA KOGYO KOUTOU SENMON GATSUKOUCHIYOU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOYAMA KOGYO KOUTOU SENMON GATSUKOUCHIYOU filed Critical TOYAMA KOGYO KOUTOU SENMON GATSUKOUCHIYOU
Priority to JP21263185A priority Critical patent/JPS6273122A/ja
Publication of JPS6273122A publication Critical patent/JPS6273122A/ja
Publication of JPH0346054B2 publication Critical patent/JPH0346054B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Optical Transform (AREA)
JP21263185A 1985-09-27 1985-09-27 精密測定用光学装置 Granted JPS6273122A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21263185A JPS6273122A (ja) 1985-09-27 1985-09-27 精密測定用光学装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21263185A JPS6273122A (ja) 1985-09-27 1985-09-27 精密測定用光学装置

Publications (2)

Publication Number Publication Date
JPS6273122A true JPS6273122A (ja) 1987-04-03
JPH0346054B2 JPH0346054B2 (cg-RX-API-DMAC10.html) 1991-07-15

Family

ID=16625861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21263185A Granted JPS6273122A (ja) 1985-09-27 1985-09-27 精密測定用光学装置

Country Status (1)

Country Link
JP (1) JPS6273122A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008075877A (ja) * 2007-10-12 2008-04-03 Nhk Spring Co Ltd 皿ばね
WO2009119418A1 (ja) * 2008-03-26 2009-10-01 東京エレクトロン株式会社 温度測定装置、これを有する載置台構造及び熱処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654599A (en) * 1979-10-12 1981-05-14 Furukawa Electric Co Ltd Method of detecting measured amount

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654599A (en) * 1979-10-12 1981-05-14 Furukawa Electric Co Ltd Method of detecting measured amount

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008075877A (ja) * 2007-10-12 2008-04-03 Nhk Spring Co Ltd 皿ばね
WO2009119418A1 (ja) * 2008-03-26 2009-10-01 東京エレクトロン株式会社 温度測定装置、これを有する載置台構造及び熱処理装置

Also Published As

Publication number Publication date
JPH0346054B2 (cg-RX-API-DMAC10.html) 1991-07-15

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Legal Events

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