JPS6273122A - 精密測定用光学装置 - Google Patents
精密測定用光学装置Info
- Publication number
- JPS6273122A JPS6273122A JP21263185A JP21263185A JPS6273122A JP S6273122 A JPS6273122 A JP S6273122A JP 21263185 A JP21263185 A JP 21263185A JP 21263185 A JP21263185 A JP 21263185A JP S6273122 A JPS6273122 A JP S6273122A
- Authority
- JP
- Japan
- Prior art keywords
- laser light
- output
- measured
- diffraction grating
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 35
- 238000005259 measurement Methods 0.000 title claims description 27
- 238000001228 spectrum Methods 0.000 claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 abstract description 41
- 238000009826 distribution Methods 0.000 abstract description 26
- 239000013307 optical fiber Substances 0.000 abstract description 14
- 230000010287 polarization Effects 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- 238000009530 blood pressure measurement Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000008602 contraction Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21263185A JPS6273122A (ja) | 1985-09-27 | 1985-09-27 | 精密測定用光学装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21263185A JPS6273122A (ja) | 1985-09-27 | 1985-09-27 | 精密測定用光学装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6273122A true JPS6273122A (ja) | 1987-04-03 |
| JPH0346054B2 JPH0346054B2 (cg-RX-API-DMAC10.html) | 1991-07-15 |
Family
ID=16625861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21263185A Granted JPS6273122A (ja) | 1985-09-27 | 1985-09-27 | 精密測定用光学装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273122A (cg-RX-API-DMAC10.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008075877A (ja) * | 2007-10-12 | 2008-04-03 | Nhk Spring Co Ltd | 皿ばね |
| WO2009119418A1 (ja) * | 2008-03-26 | 2009-10-01 | 東京エレクトロン株式会社 | 温度測定装置、これを有する載置台構造及び熱処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5654599A (en) * | 1979-10-12 | 1981-05-14 | Furukawa Electric Co Ltd | Method of detecting measured amount |
-
1985
- 1985-09-27 JP JP21263185A patent/JPS6273122A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5654599A (en) * | 1979-10-12 | 1981-05-14 | Furukawa Electric Co Ltd | Method of detecting measured amount |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008075877A (ja) * | 2007-10-12 | 2008-04-03 | Nhk Spring Co Ltd | 皿ばね |
| WO2009119418A1 (ja) * | 2008-03-26 | 2009-10-01 | 東京エレクトロン株式会社 | 温度測定装置、これを有する載置台構造及び熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0346054B2 (cg-RX-API-DMAC10.html) | 1991-07-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4172663A (en) | Optical wavelength meter | |
| Hünerhoff et al. | New robot-based gonioreflectometer for measuring spectral diffuse reflection | |
| US4845647A (en) | Method and apparatus for determining temperature in a blackbody radiation sensing system | |
| CN104568765B (zh) | 一种微型化光谱椭偏仪装置和测量方法 | |
| US20020012122A1 (en) | Coherent gradient sensing ellipsometer | |
| CN108195555A (zh) | 光纤天平气动力测量系统及测量方法 | |
| CN106500911B (zh) | 一种基于气体吸收谱线压力展宽效应的压力计校准方法 | |
| US4989980A (en) | Method and apparatus for measuring coefficient of thermal expansion | |
| CN116294983A (zh) | 基于平面光路设计的非闭合光路波阵面分割干涉仪 | |
| Pugh et al. | Automatic gauge block measurement using multiple wavelength interferometry | |
| US3067617A (en) | Pressure gage | |
| CN113494890B (zh) | 基于fpi干涉仪的光纤光栅应变传感器精度测量装置及方法 | |
| CN214541271U (zh) | 一种光纤法布里-珀罗传感教学实验装置 | |
| US5121987A (en) | Method and apparatus for measuring coefficient of thermal expansion | |
| Hutley et al. | Wavelength encoded optical fibre sensors | |
| JPS6273122A (ja) | 精密測定用光学装置 | |
| Fan et al. | High-precision measurement on the extinction ratio of linear polarizers | |
| Koski et al. | High pressure angle-dispersive Brillouin spectroscopy: A technique for determining acoustic velocities and attenuations in liquids and solids | |
| US3286529A (en) | Precision pressure gauge | |
| CN114910421A (zh) | 一种测量系统用的光谱仪 | |
| Wild | Optimising the design of a pressure transducer for aircraft altitude measurement using optical fibre Bragg grating sensors | |
| CN111561910B (zh) | 可调节压差范围的光纤干涉型沉降仪、系统及测量方法 | |
| CN211954113U (zh) | 一种光纤干涉型沉降测量系统 | |
| Shaw et al. | Infrared spectrometer for ground-based profiling of atmospheric temperature and humidity | |
| JP2932829B2 (ja) | 波長変動量測定装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |