JPS6272481U - - Google Patents

Info

Publication number
JPS6272481U
JPS6272481U JP16482285U JP16482285U JPS6272481U JP S6272481 U JPS6272481 U JP S6272481U JP 16482285 U JP16482285 U JP 16482285U JP 16482285 U JP16482285 U JP 16482285U JP S6272481 U JPS6272481 U JP S6272481U
Authority
JP
Japan
Prior art keywords
diaphragms
frame
piezoelectric ceramic
pump chamber
electrode layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16482285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16482285U priority Critical patent/JPS6272481U/ja
Publication of JPS6272481U publication Critical patent/JPS6272481U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP16482285U 1985-10-26 1985-10-26 Pending JPS6272481U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16482285U JPS6272481U (enrdf_load_stackoverflow) 1985-10-26 1985-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16482285U JPS6272481U (enrdf_load_stackoverflow) 1985-10-26 1985-10-26

Publications (1)

Publication Number Publication Date
JPS6272481U true JPS6272481U (enrdf_load_stackoverflow) 1987-05-09

Family

ID=31094296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16482285U Pending JPS6272481U (enrdf_load_stackoverflow) 1985-10-26 1985-10-26

Country Status (1)

Country Link
JP (1) JPS6272481U (enrdf_load_stackoverflow)

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