JPS6268227U - - Google Patents
Info
- Publication number
- JPS6268227U JPS6268227U JP15922985U JP15922985U JPS6268227U JP S6268227 U JPS6268227 U JP S6268227U JP 15922985 U JP15922985 U JP 15922985U JP 15922985 U JP15922985 U JP 15922985U JP S6268227 U JPS6268227 U JP S6268227U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- susceptor
- substrate
- vapor deposition
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15922985U JPS6268227U (en, 2012) | 1985-10-17 | 1985-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15922985U JPS6268227U (en, 2012) | 1985-10-17 | 1985-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6268227U true JPS6268227U (en, 2012) | 1987-04-28 |
Family
ID=31083464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15922985U Pending JPS6268227U (en, 2012) | 1985-10-17 | 1985-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6268227U (en, 2012) |
-
1985
- 1985-10-17 JP JP15922985U patent/JPS6268227U/ja active Pending