JPS6267432A - X rays ct apparatus - Google Patents
X rays ct apparatusInfo
- Publication number
- JPS6267432A JPS6267432A JP60208086A JP20808685A JPS6267432A JP S6267432 A JPS6267432 A JP S6267432A JP 60208086 A JP60208086 A JP 60208086A JP 20808685 A JP20808685 A JP 20808685A JP S6267432 A JPS6267432 A JP S6267432A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- detector
- rays
- fan beam
- turntable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/419—Imaging computed tomograph
Landscapes
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pulmonology (AREA)
- Radiology & Medical Imaging (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、ｘｇｃ’ｒ装置に係り、特に多数個の小さな
被検体を同時に測定するのに好適なＸ線Ｃ装置に関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an X-ray C'r apparatus, and particularly to an X-ray C apparatus suitable for simultaneously measuring a large number of small objects.
たとえば、ＩＣ等の製造ラインの自動検査システムとし
てＸ線Ｃ′Ｆ装置がある。For example, there is an X-ray C'F apparatus as an automatic inspection system for manufacturing lines for ICs and the like.
一般に、この種のＸＡＩＣＴ装置の代表的なシステムと
して、第１図（ａ）、（ｂ）に示す様に２方式が知られ
ており、実際に各々の目的に対応して製造されている。In general, two systems are known as typical systems of this type of XAICT device, as shown in FIGS. 1(a) and 1(b), and they are actually manufactured for each purpose.
すなわち、第１図（ａ）はターンテーブル４の円周部に
被検体４が等間隔に配置され、前記ターンテーブル３を
挾んで、Ｘ線源１と検出器５とがそれぞれ対向して直線
往復運動を行なっている。That is, in FIG. 1(a), the subjects 4 are arranged at equal intervals around the circumference of the turntable 4, and the X-ray source 1 and the detector 5 are arranged in a straight line, facing each other with the turntable 3 in between. Performing reciprocating movements.
また、第１図（ｂ）は前記Ｘ線源１を固定させ。Further, in FIG. 1(b), the X-ray source 1 is fixed.
前記検出器５を前記ｘｗＡ源１の有効視野内に円弧形状
に固定配置させたものである。被検体が、多数個でかつ
小さい場合でも、各図に示した様な配置により測定する
ことは可能であるが、下記の技術的問題がある。The detector 5 is fixedly arranged in an arc shape within the effective field of view of the xwA source 1. Even when the number of objects to be examined is large and small, it is possible to measure them using the arrangement shown in each figure, but there are the following technical problems.
（１）被検体３に比べて、有効視野２が大きいため。(1) The effective field of view 2 is larger than that of the subject 3.
画素寸法を小さくとることが出来ず、高い分解能を得る
ことは、困難になり、小さな被検体の精度検査には、適
していない。Since the pixel size cannot be made small, it is difficult to obtain high resolution, and it is not suitable for precision inspection of small objects.
（２）Ｘ線源１と検出器５間の距離は、必然的に大きく
なり、高いＸ線強度が必要になる。検出器も大きく、装
置全体が大型になる。(2) The distance between the X-ray source 1 and the detector 5 is necessarily large, and high X-ray intensity is required. The detector is also large, making the entire device large.
上記の理由により、例えば、小さな部品等の製造ライン
にＣＴ表装置自動検査システムを信頼性よく設置するこ
とを難しくしている。For the above reasons, it is difficult to reliably install an automatic CT scanner inspection system on a production line for small parts, for example.
本発明の目的は、同時に多数個の小さな被検体を高い精
度でかつ早いスピードで検査することが可能で、かつ装
置を小型化して、工場等の製造ラインにおける自動検査
装置として適用することが可能なＸ線ＣＴ装置を提供す
ることにある。The purpose of the present invention is to be able to simultaneously test a large number of small objects with high precision and at high speed, and to miniaturize the device so that it can be applied as an automatic testing device on production lines in factories, etc. The object of the present invention is to provide an X-ray CT apparatus.
第２図は、本発明によるＸ線ＣＴ装置の一実施例を示す
平面図である。FIG. 2 is a plan view showing an embodiment of the X-ray CT apparatus according to the present invention.
同図において、Ｘ線ＣＴ装置は、Ｘ線源１、Ｘ線ファン
ビーム２、被検体３、テーンテーブル４および検出器５
から構成され、本実施例の場合、小さな被検体に対応し
た小型のターンテーブル４とし、それらを多数台、Ｘ線
源１の移動方向に並列に配置している。このＣＴ表装置
測定方法は、Ｘ線源１と検出器５を同期させて、Ｘ線を
被検体３に照射させつつ平行に等速度で移動される。そ
の際、Ｘｆｉ＠１の１回の並進動作ごとに、ターンテー
ブル４は、ｘｍファンビームの拡り角度で回転させる。In the figure, the X-ray CT apparatus includes an X-ray source 1, an X-ray fan beam 2, a subject 3, a tilt table 4, and a detector 5.
In this embodiment, a large number of small turntables 4 suitable for small subjects are arranged in parallel in the moving direction of the X-ray source 1. In this CT table device measurement method, the X-ray source 1 and the detector 5 are synchronized and moved in parallel at a constant speed while irradiating the subject 3 with X-rays. At this time, the turntable 4 is rotated at the spread angle of the xm fan beam for each translational movement of Xfi@1.
１つのスライス面の測定が完了するとターンテーブル４
が紙面に垂直方向に移動して次のスライス面を測定する
。When the measurement of one slice surface is completed, the turntable 4
moves perpendicular to the plane of the paper to measure the next slice plane.
このシステムは、１つの被検体３に注目すれば、従来の
ＣＴ表装置全く同様であるが、ｘＢＢ１０検出器５の間
隔を小さくすることができ、その結果、有効視野６が小
さくなり１画素寸法を小さくとれ、高精度の画像が得ら
れる。また、被検体３を設置するターンテーブル４を多
数台、直線上に配置することが可能になる。その結果、
このＣＴ表装置コンパクトになる故、例えば、製造ライ
ンの自動検査システムとして組合せることができる。This system is exactly the same as the conventional CT scanner when focusing on one object 3, but the distance between the xBB10 detectors 5 can be reduced, and as a result, the effective field of view 6 becomes smaller and the size of 1 pixel is reduced. can be made small and high-precision images can be obtained. Furthermore, it becomes possible to arrange a large number of turntables 4 on which the subject 3 is placed in a straight line. the result,
Since this CT scanner is compact, it can be combined as an automatic inspection system on a production line, for example.
第３図は、本発明によるＸ線ＣＴ装置の他の実施例を示
す構成図である。重連した第２図と対応する４１が成と
なっており、１つのＸ線源１のＸａミツアンビームを数
分割し、各ファンビームごとにターンテーブル４と検出
器５が設けられている。FIG. 3 is a configuration diagram showing another embodiment of the X-ray CT apparatus according to the present invention. 41 corresponding to the multiplexed fan beam shown in FIG. 2 is formed, and the Xa Mitsuan beam of one X-ray source 1 is divided into several parts, and a turntable 4 and a detector 5 are provided for each fan beam.
従って、Ｘ線ファンビーム角度α、に対応して、１つの
ＣＴ表装置構成することになり、１つのＸ線源１に関し
て分割数だけのＣＴ装置数が可能になる。Therefore, one CT table device is configured corresponding to the X-ray fan beam angle α, and it becomes possible to have as many CT devices as the number of divisions for one X-ray source 1.
このようにした場合であっても、第２図に示したＸ腺Ｃ
Ｔ装置と同様な効果が得られ、Ｘ線源１における走査速
度の高速化は当然のことながら実現されるものである。Even in this case, the X gland C shown in FIG.
The same effects as the T device can be obtained, and the scanning speed of the X-ray source 1 can be increased as a matter of course.
以上説明したことから明らかなように、本発明によるＸ
線Ｃ′ｒ装置によれば、同時に多数個の小さな被検体を
高い精度でかつ速いスピードで検査することができ、か
つ装置自体の小型化を達成させることが可能となる６As is clear from the above explanation, X according to the present invention
According to the line C'r device, it is possible to simultaneously inspect a large number of small objects with high precision and at high speed, and it is also possible to achieve miniaturization of the device itself6.
第１図（ａ）、（ｂ）はそれぞれ従来のＸ線ＣＴ装置の
例を示す平面図、第２図は本発明によるＸ線ＣＴ装置の
一実施例を示す平面図、第３図は本発明によるＸ線ＣＴ
装置の他の実施例を示す平面図である。
１・・・Ｘ線源、２・・・Ｘ線ファンビーム、３・・・
被検体、４・・・ターンテーブル、５・・・検出器、６
・・・有効視野。FIGS. 1(a) and (b) are plan views showing examples of conventional X-ray CT devices, FIG. 2 is a plan view showing an embodiment of the X-ray CT device according to the present invention, and FIG. X-ray CT according to invention
FIG. 7 is a plan view showing another embodiment of the device. 1... X-ray source, 2... X-ray fan beam, 3...
Subject, 4... Turntable, 5... Detector, 6
...Effective field of view.
Claims (1)
と、前記Ｘ線の有効視野内に配置される１個の被検体と
、この被検体を載置する１個のターンテーブルとから構
成されていることを特徴とするＸ線ＣＴ装置。 ２、前記Ｘ線源と検出器はともに直線往復動し、前記タ
ーンテーブルは前記往復動方向に並設されている特許請
求の範囲第１項記載のＸ線ＣＴ装置。 ３、前記Ｘ線源はＸ線ファンビーム角度が複数個に分割
され、各分割されたファンビームに対応して検出器が配
置され、前記ターンビームは各ファンビーム毎に並設さ
れている特許請求の範囲第１項記載のＸ線ＣＴ装置。[Claims] 1. An X-ray source, a detector for detecting X-rays from the X-ray source, a subject placed within the effective field of view of the X-rays, and a detector for detecting the subject. An X-ray CT apparatus characterized by comprising one turntable on which it is placed. 2. The X-ray CT apparatus according to claim 1, wherein both the X-ray source and the detector reciprocate linearly, and the turntable is arranged in parallel in the direction of the reciprocating movement. 3. The X-ray source is divided into a plurality of X-ray fan beam angles, a detector is arranged corresponding to each divided fan beam, and the turn beams are arranged in parallel for each fan beam. An X-ray CT apparatus according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60208086A JPH0680420B2 (en) | 1985-09-20 | 1985-09-20 | X-ray CT system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60208086A JPH0680420B2 (en) | 1985-09-20 | 1985-09-20 | X-ray CT system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6267432A true JPS6267432A (en) | 1987-03-27 |
| JPH0680420B2 JPH0680420B2 (en) | 1994-10-12 |
Family
ID=16550406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60208086A Expired - Lifetime JPH0680420B2 (en) | 1985-09-20 | 1985-09-20 | X-ray CT system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0680420B2 (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03500580A (en) * | 1988-05-13 | 1991-02-07 | アドヴアンスト・リサーチ・アンド・アプリケーシヨンズ・コーポーレーシヨン | Computerized tomography inspection of electronic equipment |
| JPH06100451B2 (en) * | 1987-10-30 | 1994-12-12 | フォー・ピー・アイ・システムズ・コーポレーション | Automatic laminograph system for electronics inspection. |
| US5561696A (en) * | 1987-10-30 | 1996-10-01 | Hewlett-Packard Company | Method and apparatus for inspecting electrical connections |
| US5583904A (en) * | 1995-04-11 | 1996-12-10 | Hewlett-Packard Co. | Continuous linear scan laminography system and method |
| US5621811A (en) * | 1987-10-30 | 1997-04-15 | Hewlett-Packard Co. | Learning method and apparatus for detecting and controlling solder defects |
| US5687209A (en) * | 1995-04-11 | 1997-11-11 | Hewlett-Packard Co. | Automatic warp compensation for laminographic circuit board inspection |
| JP2006084467A (en) * | 2004-09-14 | 2006-03-30 | Hitachi Ltd | Method and apparatus for implementing computed tomography |
| JP2006170876A (en) * | 2004-12-17 | 2006-06-29 | Hitachi Ltd | Ct apparatus |
| CN101839871A (en) * | 2010-05-18 | 2010-09-22 | 华南理工大学 | X-ray layered photography detection method and system |
| DE102012019851B4 (en) | 2012-10-10 | 2018-03-22 | Seidenader Maschinenbau Gmbh | Inspection system for creating at least two images of a property |
| JP2019124491A (en) * | 2018-01-12 | 2019-07-25 | 株式会社ミツトヨ | X-ray ct measurement apparatus and calibration method of the same |
-
1985
- 1985-09-20 JP JP60208086A patent/JPH0680420B2/en not_active Expired - Lifetime
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06100451B2 (en) * | 1987-10-30 | 1994-12-12 | フォー・ピー・アイ・システムズ・コーポレーション | Automatic laminograph system for electronics inspection. |
| US5561696A (en) * | 1987-10-30 | 1996-10-01 | Hewlett-Packard Company | Method and apparatus for inspecting electrical connections |
| US5621811A (en) * | 1987-10-30 | 1997-04-15 | Hewlett-Packard Co. | Learning method and apparatus for detecting and controlling solder defects |
| JPH03500580A (en) * | 1988-05-13 | 1991-02-07 | アドヴアンスト・リサーチ・アンド・アプリケーシヨンズ・コーポーレーシヨン | Computerized tomography inspection of electronic equipment |
| US5583904A (en) * | 1995-04-11 | 1996-12-10 | Hewlett-Packard Co. | Continuous linear scan laminography system and method |
| US5687209A (en) * | 1995-04-11 | 1997-11-11 | Hewlett-Packard Co. | Automatic warp compensation for laminographic circuit board inspection |
| US7254211B2 (en) * | 2004-09-14 | 2007-08-07 | Hitachi, Ltd. | Method and apparatus for performing computed tomography |
| JP2006084467A (en) * | 2004-09-14 | 2006-03-30 | Hitachi Ltd | Method and apparatus for implementing computed tomography |
| JP4732843B2 (en) * | 2004-09-14 | 2011-07-27 | 株式会社日立製作所 | Method and apparatus for performing computed tomography |
| US7177388B2 (en) * | 2004-12-17 | 2007-02-13 | Hitachi, Ltd. | Computed tomography system |
| EP1672357A3 (en) * | 2004-12-17 | 2010-02-17 | Hitachi, Ltd. | Computed tomography system |
| JP4488885B2 (en) * | 2004-12-17 | 2010-06-23 | 株式会社日立製作所 | CT equipment |
| JP2006170876A (en) * | 2004-12-17 | 2006-06-29 | Hitachi Ltd | Ct apparatus |
| CN101839871A (en) * | 2010-05-18 | 2010-09-22 | 华南理工大学 | X-ray layered photography detection method and system |
| DE102012019851B4 (en) | 2012-10-10 | 2018-03-22 | Seidenader Maschinenbau Gmbh | Inspection system for creating at least two images of a property |
| JP2019124491A (en) * | 2018-01-12 | 2019-07-25 | 株式会社ミツトヨ | X-ray ct measurement apparatus and calibration method of the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0680420B2 (en) | 1994-10-12 |
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