JPS626685Y2 - - Google Patents

Info

Publication number
JPS626685Y2
JPS626685Y2 JP1981178705U JP17870581U JPS626685Y2 JP S626685 Y2 JPS626685 Y2 JP S626685Y2 JP 1981178705 U JP1981178705 U JP 1981178705U JP 17870581 U JP17870581 U JP 17870581U JP S626685 Y2 JPS626685 Y2 JP S626685Y2
Authority
JP
Japan
Prior art keywords
diffusion
semiconductor
core tube
gaseous
diffusion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981178705U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5883141U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17870581U priority Critical patent/JPS5883141U/ja
Publication of JPS5883141U publication Critical patent/JPS5883141U/ja
Application granted granted Critical
Publication of JPS626685Y2 publication Critical patent/JPS626685Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP17870581U 1981-12-02 1981-12-02 半導体拡散装置 Granted JPS5883141U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17870581U JPS5883141U (ja) 1981-12-02 1981-12-02 半導体拡散装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17870581U JPS5883141U (ja) 1981-12-02 1981-12-02 半導体拡散装置

Publications (2)

Publication Number Publication Date
JPS5883141U JPS5883141U (ja) 1983-06-06
JPS626685Y2 true JPS626685Y2 (cg-RX-API-DMAC10.html) 1987-02-16

Family

ID=29973743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17870581U Granted JPS5883141U (ja) 1981-12-02 1981-12-02 半導体拡散装置

Country Status (1)

Country Link
JP (1) JPS5883141U (cg-RX-API-DMAC10.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4944517U (cg-RX-API-DMAC10.html) * 1972-07-21 1974-04-19
JPS626682Y2 (cg-RX-API-DMAC10.html) * 1980-07-09 1987-02-16

Also Published As

Publication number Publication date
JPS5883141U (ja) 1983-06-06

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