JPS6265546U - - Google Patents

Info

Publication number
JPS6265546U
JPS6265546U JP15669985U JP15669985U JPS6265546U JP S6265546 U JPS6265546 U JP S6265546U JP 15669985 U JP15669985 U JP 15669985U JP 15669985 U JP15669985 U JP 15669985U JP S6265546 U JPS6265546 U JP S6265546U
Authority
JP
Japan
Prior art keywords
optical axis
mounting member
substrate
light
irradiated light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15669985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15669985U priority Critical patent/JPS6265546U/ja
Publication of JPS6265546U publication Critical patent/JPS6265546U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP15669985U 1985-10-14 1985-10-14 Pending JPS6265546U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15669985U JPS6265546U (enrdf_load_stackoverflow) 1985-10-14 1985-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15669985U JPS6265546U (enrdf_load_stackoverflow) 1985-10-14 1985-10-14

Publications (1)

Publication Number Publication Date
JPS6265546U true JPS6265546U (enrdf_load_stackoverflow) 1987-04-23

Family

ID=31078562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15669985U Pending JPS6265546U (enrdf_load_stackoverflow) 1985-10-14 1985-10-14

Country Status (1)

Country Link
JP (1) JPS6265546U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184116A (ja) * 1982-04-21 1983-10-27 Matsushita Electric Ind Co Ltd 透光性物体表面の欠陥検査方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184116A (ja) * 1982-04-21 1983-10-27 Matsushita Electric Ind Co Ltd 透光性物体表面の欠陥検査方法

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