JPS6263931U - - Google Patents
Info
- Publication number
- JPS6263931U JPS6263931U JP15621385U JP15621385U JPS6263931U JP S6263931 U JPS6263931 U JP S6263931U JP 15621385 U JP15621385 U JP 15621385U JP 15621385 U JP15621385 U JP 15621385U JP S6263931 U JPS6263931 U JP S6263931U
- Authority
- JP
- Japan
- Prior art keywords
- discharge hole
- view
- semiconductor wafer
- gas
- sectional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 description 4
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15621385U JPS6263931U (enExample) | 1985-10-11 | 1985-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15621385U JPS6263931U (enExample) | 1985-10-11 | 1985-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6263931U true JPS6263931U (enExample) | 1987-04-21 |
Family
ID=31077624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15621385U Pending JPS6263931U (enExample) | 1985-10-11 | 1985-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6263931U (enExample) |
-
1985
- 1985-10-11 JP JP15621385U patent/JPS6263931U/ja active Pending