JPS626303B2 - - Google Patents
Info
- Publication number
- JPS626303B2 JPS626303B2 JP55168122A JP16812280A JPS626303B2 JP S626303 B2 JPS626303 B2 JP S626303B2 JP 55168122 A JP55168122 A JP 55168122A JP 16812280 A JP16812280 A JP 16812280A JP S626303 B2 JPS626303 B2 JP S626303B2
- Authority
- JP
- Japan
- Prior art keywords
- electrons
- sample
- area
- lens
- potential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000012935 Averaging Methods 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims description 3
- 230000003534 oscillatory effect Effects 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 3
- 230000004048 modification Effects 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 230000004075 alteration Effects 0.000 description 13
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 7
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000005211 surface analysis Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000979 retarding effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB7941332 | 1979-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56107463A JPS56107463A (en) | 1981-08-26 |
| JPS626303B2 true JPS626303B2 (enrdf_load_stackoverflow) | 1987-02-10 |
Family
ID=10509510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16812280A Granted JPS56107463A (en) | 1979-11-30 | 1980-12-01 | Electron spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56107463A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015045653A (ja) * | 2014-10-07 | 2015-03-12 | ヴィゲー・シエンタ・アーベー | 粒子分光計のための分析装置 |
| US9437408B2 (en) | 2012-03-06 | 2016-09-06 | Scienta Omicron Ab | Analyser arrangement for particle spectrometer |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7655923B2 (en) | 2004-07-15 | 2010-02-02 | National University Corporation NARA Institute of Science and Technology | Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system |
| JP6104756B2 (ja) * | 2013-08-16 | 2017-03-29 | 日本電子株式会社 | 電子分光装置 |
| JP2018119974A (ja) * | 2018-02-28 | 2018-08-02 | シエンタ・オミクロン・アーベー | 粒子分光計のための分析装置 |
-
1980
- 1980-12-01 JP JP16812280A patent/JPS56107463A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9437408B2 (en) | 2012-03-06 | 2016-09-06 | Scienta Omicron Ab | Analyser arrangement for particle spectrometer |
| US9978579B2 (en) | 2012-03-06 | 2018-05-22 | Scienta Omicron Ab | Analyser arrangement for particle spectrometer |
| JP2015045653A (ja) * | 2014-10-07 | 2015-03-12 | ヴィゲー・シエンタ・アーベー | 粒子分光計のための分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56107463A (en) | 1981-08-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100382026B1 (ko) | 주사형전자현미경 | |
| US6548810B2 (en) | Scanning confocal electron microscope | |
| US6259094B1 (en) | Electron beam inspection method and apparatus | |
| JP3752252B2 (ja) | 電気的に絶縁された標本表面の分析装置 | |
| JP6301269B2 (ja) | 粒子分光計のための分析装置 | |
| US4358680A (en) | Charged particle spectrometers | |
| JP6929730B2 (ja) | 飛行時間型荷電粒子分光学 | |
| US8183526B1 (en) | Mirror monochromator for charged particle beam apparatus | |
| KR20150035741A (ko) | 샘플의 표면을 검사하는 장치 및 방법 | |
| US4292519A (en) | Device for contact-free potential measurements | |
| NL2028949B1 (en) | Method for operating a multiple particle beam system with a mirror mode of operation and associated computer program product | |
| JPH0727556Y2 (ja) | 荷電粒子エネルギ分析装置 | |
| US8334508B1 (en) | Mirror energy filter for electron beam apparatus | |
| JP2020174037A (ja) | サンプルからエネルギー分析器および電子分光計装置への電子伝達のための装置および方法 | |
| US6730907B1 (en) | Charged particle device | |
| WO1984000443A1 (en) | Electron beam apparatus and electron collectors therefor | |
| EP0458498A2 (en) | Charged particle energy analysers | |
| JP2632808B2 (ja) | 定量的電位測定用スペクトロメーター対物レンズ装置 | |
| JPS626303B2 (enrdf_load_stackoverflow) | ||
| GB2044985A (en) | X-ray tube | |
| US4789780A (en) | Apparatus for energy-selective visualization | |
| GB2064213A (en) | Electron Spectrometer | |
| US4264815A (en) | Apparatus for X-ray analysis of a specimen with local resolution | |
| Lefevre et al. | Scanning MeV-ion microprobe for light and heavy ions | |
| US4464573A (en) | Charged particle beam focussing device |