JPS626303B2 - - Google Patents
Info
- Publication number
- JPS626303B2 JPS626303B2 JP55168122A JP16812280A JPS626303B2 JP S626303 B2 JPS626303 B2 JP S626303B2 JP 55168122 A JP55168122 A JP 55168122A JP 16812280 A JP16812280 A JP 16812280A JP S626303 B2 JPS626303 B2 JP S626303B2
- Authority
- JP
- Japan
- Prior art keywords
- electrons
- sample
- area
- lens
- potential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000012935 Averaging Methods 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims description 3
- 230000003534 oscillatory effect Effects 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 3
- 230000004048 modification Effects 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 230000004075 alteration Effects 0.000 description 13
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 7
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000005211 surface analysis Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000979 retarding effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB7941332 | 1979-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56107463A JPS56107463A (en) | 1981-08-26 |
| JPS626303B2 true JPS626303B2 (enrdf_load_stackoverflow) | 1987-02-10 |
Family
ID=10509510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16812280A Granted JPS56107463A (en) | 1979-11-30 | 1980-12-01 | Electron spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56107463A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015045653A (ja) * | 2014-10-07 | 2015-03-12 | ヴィゲー・シエンタ・アーベー | 粒子分光計のための分析装置 |
| US9437408B2 (en) | 2012-03-06 | 2016-09-06 | Scienta Omicron Ab | Analyser arrangement for particle spectrometer |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7655923B2 (en) | 2004-07-15 | 2010-02-02 | National University Corporation NARA Institute of Science and Technology | Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system |
| JP6104756B2 (ja) * | 2013-08-16 | 2017-03-29 | 日本電子株式会社 | 電子分光装置 |
| JP2018119974A (ja) * | 2018-02-28 | 2018-08-02 | シエンタ・オミクロン・アーベー | 粒子分光計のための分析装置 |
-
1980
- 1980-12-01 JP JP16812280A patent/JPS56107463A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9437408B2 (en) | 2012-03-06 | 2016-09-06 | Scienta Omicron Ab | Analyser arrangement for particle spectrometer |
| US9978579B2 (en) | 2012-03-06 | 2018-05-22 | Scienta Omicron Ab | Analyser arrangement for particle spectrometer |
| JP2015045653A (ja) * | 2014-10-07 | 2015-03-12 | ヴィゲー・シエンタ・アーベー | 粒子分光計のための分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56107463A (en) | 1981-08-26 |
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