JPS6262248U - - Google Patents

Info

Publication number
JPS6262248U
JPS6262248U JP15296985U JP15296985U JPS6262248U JP S6262248 U JPS6262248 U JP S6262248U JP 15296985 U JP15296985 U JP 15296985U JP 15296985 U JP15296985 U JP 15296985U JP S6262248 U JPS6262248 U JP S6262248U
Authority
JP
Japan
Prior art keywords
bottle
carry
inspection
foil
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15296985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526993Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15296985U priority Critical patent/JPH0526993Y2/ja
Publication of JPS6262248U publication Critical patent/JPS6262248U/ja
Application granted granted Critical
Publication of JPH0526993Y2 publication Critical patent/JPH0526993Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP15296985U 1985-10-05 1985-10-05 Expired - Lifetime JPH0526993Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15296985U JPH0526993Y2 (enExample) 1985-10-05 1985-10-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15296985U JPH0526993Y2 (enExample) 1985-10-05 1985-10-05

Publications (2)

Publication Number Publication Date
JPS6262248U true JPS6262248U (enExample) 1987-04-17
JPH0526993Y2 JPH0526993Y2 (enExample) 1993-07-08

Family

ID=31071430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15296985U Expired - Lifetime JPH0526993Y2 (enExample) 1985-10-05 1985-10-05

Country Status (1)

Country Link
JP (1) JPH0526993Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02198152A (ja) * 1989-01-27 1990-08-06 Hitachi Electron Eng Co Ltd カセット内ウェハのハンドリング方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02198152A (ja) * 1989-01-27 1990-08-06 Hitachi Electron Eng Co Ltd カセット内ウェハのハンドリング方法および装置

Also Published As

Publication number Publication date
JPH0526993Y2 (enExample) 1993-07-08

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