JPS6262248U - - Google Patents
Info
- Publication number
- JPS6262248U JPS6262248U JP15296985U JP15296985U JPS6262248U JP S6262248 U JPS6262248 U JP S6262248U JP 15296985 U JP15296985 U JP 15296985U JP 15296985 U JP15296985 U JP 15296985U JP S6262248 U JPS6262248 U JP S6262248U
- Authority
- JP
- Japan
- Prior art keywords
- bottle
- carry
- inspection
- foil
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims description 9
- 239000011888 foil Substances 0.000 claims description 7
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15296985U JPH0526993Y2 (cg-RX-API-DMAC7.html) | 1985-10-05 | 1985-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15296985U JPH0526993Y2 (cg-RX-API-DMAC7.html) | 1985-10-05 | 1985-10-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6262248U true JPS6262248U (cg-RX-API-DMAC7.html) | 1987-04-17 |
| JPH0526993Y2 JPH0526993Y2 (cg-RX-API-DMAC7.html) | 1993-07-08 |
Family
ID=31071430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15296985U Expired - Lifetime JPH0526993Y2 (cg-RX-API-DMAC7.html) | 1985-10-05 | 1985-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526993Y2 (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02198152A (ja) * | 1989-01-27 | 1990-08-06 | Hitachi Electron Eng Co Ltd | カセット内ウェハのハンドリング方法および装置 |
-
1985
- 1985-10-05 JP JP15296985U patent/JPH0526993Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02198152A (ja) * | 1989-01-27 | 1990-08-06 | Hitachi Electron Eng Co Ltd | カセット内ウェハのハンドリング方法および装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0526993Y2 (cg-RX-API-DMAC7.html) | 1993-07-08 |
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