JPS626124B2 - - Google Patents

Info

Publication number
JPS626124B2
JPS626124B2 JP58085471A JP8547183A JPS626124B2 JP S626124 B2 JPS626124 B2 JP S626124B2 JP 58085471 A JP58085471 A JP 58085471A JP 8547183 A JP8547183 A JP 8547183A JP S626124 B2 JPS626124 B2 JP S626124B2
Authority
JP
Japan
Prior art keywords
rotating shaft
circuit
frequency
phase
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58085471A
Other languages
Japanese (ja)
Other versions
JPS59212519A (en
Inventor
Saburo Ooshima
Tsuguto Nakaseki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Original Assignee
NTN Toyo Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NTN Toyo Bearing Co Ltd filed Critical NTN Toyo Bearing Co Ltd
Priority to JP8547183A priority Critical patent/JPS59212519A/en
Publication of JPS59212519A publication Critical patent/JPS59212519A/en
Publication of JPS626124B2 publication Critical patent/JPS626124B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/04Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406Magnetic bearings
    • F16C32/044Active magnetic bearings
    • F16C32/0444Details of devices to control the actuation of the electromagnets
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00Apparatus used in shaping articles
    • F16C2322/39General buildup of machine tools, e.g. spindles, slides, actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

【発明の詳細な説明】 この発明は、磁気軸受の制御装置に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic bearing control device.

磁気軸受には、第1図に示すように、回転軸1
と関係して回転軸1の半径方向の位置を検出する
センサ2を設けると共に、センサ2と磁気軸受の
巻線3間にサーボ回路を設け、回転軸1が予め設
定した位置からずれたことをセンサ2が検出する
と、サーボ回路が回転軸を設定位置に戻すような
誤差信号をバイアス磁束用コイル4に発生し、回
転軸2を予め設定した半径方向位置に保持させて
いる。
As shown in Fig. 1, the magnetic bearing has a rotating shaft 1.
A sensor 2 is provided to detect the radial position of the rotating shaft 1 in relation to the rotation axis 1, and a servo circuit is provided between the sensor 2 and the winding 3 of the magnetic bearing to detect when the rotating shaft 1 deviates from a preset position. When detected by the sensor 2, the servo circuit generates an error signal in the bias magnetic flux coil 4 to return the rotary shaft to the set position, thereby holding the rotary shaft 2 at a preset radial position.

この磁気軸受は、回転軸が完全に非接触式であ
ることにより、高速回転に使用されている。
This magnetic bearing is used for high-speed rotation because the rotating shaft is completely non-contact type.

しかし、この回転軸を固有振動数と等しい周波
数即ち、軸の危険速度で回転させると、軸受は制
御不能に陥いる。また、回転軸を切削主軸等とし
て用いると、機械系固有振動数における剛性が極
度に低下し、切削時の外乱により刃物か機械系固
有振動数で振動し、磁気軸受が制御不能となる。
However, if this rotating shaft is rotated at a frequency equal to the natural frequency, that is, at a critical speed of the shaft, the bearing will become uncontrollable. Furthermore, when a rotating shaft is used as a cutting main shaft or the like, the rigidity at the mechanical system's natural frequency is extremely reduced, and disturbances during cutting cause the cutter to vibrate at the mechanical system's natural frequency, making the magnetic bearing uncontrollable.

この対策として、固有振動数に対応した帯域を
フイルタによつて除去することが考えられる。こ
れによると、回転軸の自励発振を防止できるが、
機械系固有振動数帯域における剛性の増加はわず
かで切削等に用いる場合切削力の向上は、わずか
しか望めない。
As a countermeasure to this problem, it is conceivable to remove the band corresponding to the natural frequency using a filter. According to this, self-excited oscillation of the rotating shaft can be prevented, but
The increase in rigidity in the natural frequency band of the mechanical system is small, and when used for cutting, etc., only a small improvement in cutting force can be expected.

この発明は、以上の問題を解消するもので、回
転軸の固有振動数に関係なく、適当な軸受の剛性
を得ることができる磁気軸受の制御装置を提供す
ることを目的とするものである。
The present invention solves the above problems, and aims to provide a control device for a magnetic bearing that can obtain appropriate rigidity of the bearing regardless of the natural frequency of the rotating shaft.

即ち、この発明は、回転軸の半径方向の位置を
検出する位置センサと、回転軸の位置を決定する
電磁石を設けた磁気軸受において、回転軸を剛体
として取り扱う場合に、磁気軸受としてこれを支
持するために必要な位置補償回路で、且つセンサ
出力からの回転軸の固有振動数を含む所定範囲の
周波数を除いて伝達する第1の演算部と、回転軸
の固有振動数での振動に減衰を与えるためにセン
サ出力から上記所定範囲の周波数を取り出し、そ
の位相を進相させると共に、ゲインをも増加させ
て伝達する第2の演算部と、上記第1の演算部と
第2演算部からの出力を加算して上記電磁石を電
流を供給する加算回路をパワー増幅部とからなる
ことを特徴とするものである。
That is, the present invention provides a magnetic bearing equipped with a position sensor that detects the radial position of the rotating shaft and an electromagnet that determines the position of the rotating shaft. This is a position compensation circuit required for a second calculation section that extracts the frequency in the predetermined range from the sensor output and advances its phase and also increases the gain and transmits the frequency, and from the first calculation section and the second calculation section. The present invention is characterized in that it comprises a power amplification section and an addition circuit that adds up the outputs of and supplies current to the electromagnet.

以下、この発明を添付図面に示す実施例に基づ
いて説明する。
The present invention will be described below based on embodiments shown in the accompanying drawings.

第2図に示すように、筒状のケーシング11の
内周壁には回転子12を回動させる駆動モータ1
3が固定され、回転子12の回転軸14は両端が
ラジアル軸受15,16により支持されている。
As shown in FIG. 2, a drive motor 1 for rotating a rotor 12 is mounted on the inner peripheral wall of the cylindrical casing 11.
3 is fixed, and the rotating shaft 14 of the rotor 12 is supported at both ends by radial bearings 15 and 16.

ラジアル軸受15,16は、回転軸14に固定
されるロータ15a,16aと、これに対向して
ケーシング11の内周壁に固定され電磁石となる
ステータ15b,16bとから構成されている。
また、回転軸14の中央部付近にはスラスト軸受
17のロータ17aが取り付けられ、このロータ
17aを挾んで電磁石となるステータ17b,1
7bがケーシング11に固定されている。
The radial bearings 15, 16 are composed of rotors 15a, 16a fixed to the rotating shaft 14, and stators 15b, 16b, which are fixed to the inner peripheral wall of the casing 11 and serve as electromagnets.
Further, a rotor 17a of a thrust bearing 17 is attached near the center of the rotating shaft 14, and stators 17b and 1 that serve as electromagnets sandwich this rotor 17a.
7b is fixed to the casing 11.

また、ケーシング11には回転軸14の軸方向
の位置を検出するスラストセンサ18と、ラジア
ル軸受15,16側のそれぞれ半径方向の位置を
検出する第1、第2のラジアルセンサ19,1
9′,20,20′が任意位置に設けられている。
なお、センサ19,20とセンサ19′,20′と
は対称位置に設けられている。
The casing 11 also includes a thrust sensor 18 that detects the axial position of the rotating shaft 14, and first and second radial sensors 19 and 1 that detect the radial position of the radial bearings 15 and 16, respectively.
9', 20, 20' are provided at arbitrary positions.
Note that the sensors 19, 20 and the sensors 19', 20' are provided at symmetrical positions.

以上のように構成される磁気軸受における制御
装置を次に説明すると、第3図に示すように、ラ
ジアルセンサ19からの出力信号は、位相補償回
路21によつて位相補償された後、帯域消去フイ
ルタ22によつて回転軸14の固有振動数fを含
む所定範囲の周波数を除去して伝達される。この
帯域消去フイルタ22の伝達関数は、第4図に示
すような特性となり、回転軸14の固有振動数を
含む所定範囲の周波数を帯域のゲインがほとんど
零または小さい値となつている。
Next, the control device for the magnetic bearing configured as described above will be explained. As shown in FIG. The filter 22 removes frequencies in a predetermined range including the natural frequency f of the rotating shaft 14 before transmission. The transfer function of the band elimination filter 22 has a characteristic as shown in FIG. 4, and the band gain is almost zero or a small value in a predetermined range of frequencies including the natural frequency of the rotating shaft 14.

また、上記センサ19の出力信号を入力とする
バンドパスフイルタ23は上記帯域消去フイルタ
22と逆に、上記所定範囲の周波数を通過させる
もので、その伝達関数は第5図に示される。この
バンドパスフイルタ23の伝達関数とゲイン調整
器24を経たセンサ出力とは第1の加算回路25
によつて加算される。従つてバンドパスフイルタ
23、ゲイン調整器24、加算回路25によつて
構成される伝達関数を、ゲイン・位相図で表わす
と第6図のようになる。
Further, a band pass filter 23 which receives the output signal of the sensor 19 as an input is configured to pass frequencies in the predetermined range, contrary to the band elimination filter 22, and its transfer function is shown in FIG. The transfer function of the bandpass filter 23 and the sensor output that has passed through the gain adjuster 24 are connected to the first adder circuit 25.
is added by. Therefore, the transfer function constituted by the bandpass filter 23, gain adjuster 24, and adder circuit 25 is expressed as a gain/phase diagram as shown in FIG. 6.

この加算回路25からの出力は、位相進み回路
26によつて少なくとも上記所定の帯域におい
て、完全に進相するようにその位相を進相させる
が、位相を進相させると、そのゲインも少なから
ず影響を受け、バンドパスフイルタ23、ゲイン
調整器24、加算回路25、位相進み回路26で
構成される要素は、第7図に示すような伝達関数
となる。より適したゲイン・位相特性を得るため
に、ノツチフイルタ27を位相進み回路26に加
えることにより、第8図に示す伝達特性を得る。
この位相進み回路26及びノツチフイルタ27で
構成される回路は位相のみを進相できる回路であ
ればその位相のみを進相させるものであつてもよ
い。そのような回路は簡単な位相進相回路では得
にくいので上記回路を用いたが、ゲインに少なか
らず影響を与えても実際上は問題はない。
The phase of the output from the adder circuit 25 is advanced by the phase advance circuit 26 so that the phase is completely advanced at least in the above-mentioned predetermined band, but when the phase is advanced, the gain is also not small. Under the influence, the elements constituted by the bandpass filter 23, gain adjuster 24, addition circuit 25, and phase advance circuit 26 have a transfer function as shown in FIG. In order to obtain more suitable gain/phase characteristics, a notch filter 27 is added to the phase advance circuit 26, thereby obtaining the transfer characteristics shown in FIG.
The circuit constituted by the phase advance circuit 26 and the notch filter 27 may be a circuit that can advance only the phase. Since such a circuit is difficult to obtain with a simple phase advancing circuit, the above circuit is used, but there is no problem in practice even if the gain is affected to some extent.

上記位相補償回路21、帯域消去フイルタ22
とで構成される磁気軸受制御のための第1の演算
部と、回転軸の固有振動数での振動に減衰を与え
るための第2演算部とを加算する第2加算回路2
8が設けられている。この加算回路28の出力が
パワー増幅回路29により増幅されてラジアル軸
受15が制御されるから、回転軸14は予め設定
された位置になるよう制御される。
The above phase compensation circuit 21 and band elimination filter 22
A second addition circuit 2 that adds together a first calculation section for controlling the magnetic bearing, and a second calculation section for damping vibrations at the natural frequency of the rotating shaft.
8 is provided. Since the output of the adder circuit 28 is amplified by the power amplification circuit 29 and the radial bearing 15 is controlled, the rotating shaft 14 is controlled to be at a preset position.

以上は、この発明の制御回路を実際に電子回路
によつて構成されたものにおいて、実測した結果
を説明してあるが、この発明はこれに限定される
ものではなく、第2の演算部は回転軸の固有振動
数に対応する周波数の位相の進相又は進相ゲイン
の選択的な増加を行なうためのものであればよ
い。
The above describes the results obtained by actually measuring the control circuit of the present invention which is actually constituted by an electronic circuit. However, the present invention is not limited to this, and the second calculation section is Any device may be used as long as it is for advancing the phase of the frequency corresponding to the natural frequency of the rotating shaft or selectively increasing the phase advance gain.

以上の実施例において、一方のラジアル軸受1
5のみの制御を説明したが、他方のラジアル軸受
16についても同様に制御する。また、スラスト
軸受は、スラストセンサによつてのみ制御される
もので、その制御は通常のサーボ回路又はフイー
ドバツク制御によつて制御すればよい。この場
合、スラスト軸受においては、センサからの信号
とそのフイードバツク信号によつて発振等を行な
わないように伝達関数が決定されるものとする。
なお、第2図に示すように、回転軸14の先端に
は、ケーシング11から突出する切削具28等の
工具が固定されている。
In the above embodiment, one radial bearing 1
5 has been described, the other radial bearing 16 is also controlled in the same manner. Further, the thrust bearing is controlled only by a thrust sensor, and the control may be performed by a normal servo circuit or feedback control. In this case, in the thrust bearing, the transfer function is determined based on the signal from the sensor and its feedback signal so as not to cause oscillation or the like.
Note that, as shown in FIG. 2, a tool such as a cutting tool 28 protruding from the casing 11 is fixed to the tip of the rotating shaft 14.

この発明は、以上のとおり、磁気軸受において
工作機械等への適用に大きな問題であつた回転軸
の固有振動数に等しい周波数帯域における剛性増
加のため伝達関数の位相の進相又は進相ゲインの
選択的な増加により、回転軸の固有振動数に等し
い周波数での剛性の増加をはかるものであり、工
作機械にも適用できるという利点がある。
As described above, this invention aims at increasing the phase advance or phase advance gain of the transfer function in order to increase the rigidity in the frequency band equal to the natural frequency of the rotating shaft, which is a major problem in magnetic bearings when applied to machine tools, etc. By selectively increasing the stiffness, the stiffness is increased at a frequency equal to the natural frequency of the rotating shaft, and has the advantage that it can also be applied to machine tools.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は磁気軸受の原理を示す略図、第2図は
磁気軸受の縦断面図、第3図はこの発明の一例を
示すブロツク図、第4図は帯域消去フイルタの出
力の伝達関数の一例を示すグラフ、第5図はセン
サからバンドパスフイルタ出力までの伝達関数を
示すグラフ、第6図はセンサから第1の加算回路
出力までの伝達関数を示すグラフ、第7図は位相
進み回路の伝達関数を示すグラフ、第8図はセン
サから第2の加算回路入力までの第2演算部の伝
達関数を示すグラフである。 11…ケーシング、12…回転子、13…駆動
モータ、14…回転軸、15,16…ラジアル軸
受、17…スラスト軸受、15a,16a,17
a…ロータ、15b,16b,17b…ステー
タ、18…スラストセンサ、19,19′,2
0,20′…ラジアルセンサ、21…位相補償回
路、22…帯域消去フイルタ、23…バンドパス
フイルタ、24…ゲイン調整器、25,28…加
算回路、26…位相進み回路、27ノツチフイル
タ、29…パワー増幅回路。
Fig. 1 is a schematic diagram showing the principle of a magnetic bearing, Fig. 2 is a vertical cross-sectional view of a magnetic bearing, Fig. 3 is a block diagram showing an example of the present invention, and Fig. 4 is an example of a transfer function of the output of a band elimination filter. 5 is a graph showing the transfer function from the sensor to the output of the bandpass filter, FIG. 6 is a graph showing the transfer function from the sensor to the output of the first addition circuit, and FIG. 7 is a graph showing the transfer function from the sensor to the output of the first adder circuit. Graph showing the transfer function. FIG. 8 is a graph showing the transfer function of the second calculation unit from the sensor to the input of the second addition circuit. DESCRIPTION OF SYMBOLS 11... Casing, 12... Rotor, 13... Drive motor, 14... Rotating shaft, 15, 16... Radial bearing, 17... Thrust bearing, 15a, 16a, 17
a... Rotor, 15b, 16b, 17b... Stator, 18... Thrust sensor, 19, 19', 2
0, 20'...Radial sensor, 21...Phase compensation circuit, 22...Band elimination filter, 23...Band pass filter, 24...Gain adjuster, 25, 28...Addition circuit, 26...Phase lead circuit, 27 Notch filter, 29... power amplification circuit.

Claims (1)

【特許請求の範囲】 1 回転軸の半径方向の位置を検出する位置セン
サと、回転軸の位置を決定する電磁石を設けた磁
気軸受において、センサ出力から回転軸の固有振
動数を含む所定範囲の周波数を除いて伝達する位
相補償回路からなる第1の演算部と、センサ出力
から上記所定範囲の周波数を取り出し、その位相
を進相させて伝達する第2の演算部と、上記第1
の演算部と第2演算部からの出力を加算して上記
電磁石を制御するパワー部とからなる磁気軸受の
制御装置。 2 上記第2演算部は、センサの出力から上記所
定範囲の周波数を取り出すフイルタ回路と、セン
サ出力とフイルタ回路の出力を加算して上記所定
範囲の周波数における伝達関数の位相を進相させ
る進相回路とからなることを特徴とする特許請求
の範囲第1項記載の磁気軸受の制御装置。 3 上記第1の演算部は上記所定範囲の周波数を
消去する帯域フイルタを含む位相補償回路である
ことを特徴とする特許請求の範囲第1項記載の磁
気軸受の制御装置。
[Claims] 1. In a magnetic bearing equipped with a position sensor that detects the radial position of the rotating shaft and an electromagnet that determines the position of the rotating shaft, a predetermined range including the natural frequency of the rotating shaft is detected from the sensor output. a first calculation unit consisting of a phase compensation circuit that transmits the frequency excluding the frequency; a second calculation unit that extracts the frequency in the predetermined range from the sensor output and advances its phase and transmits it;
A control device for a magnetic bearing, comprising a calculation section and a power section that adds outputs from the second calculation section and controls the electromagnet. 2 The second calculation unit includes a filter circuit that extracts a frequency in the predetermined range from the output of the sensor, and a phase advancer that adds the sensor output and the output of the filter circuit to advance the phase of the transfer function at the frequency in the predetermined range. 2. A control device for a magnetic bearing according to claim 1, comprising a circuit. 3. The control device for a magnetic bearing according to claim 1, wherein the first calculation section is a phase compensation circuit including a bandpass filter that eliminates frequencies in the predetermined range.
JP8547183A 1983-05-14 1983-05-14 Control device of magnetic bearing Granted JPS59212519A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8547183A JPS59212519A (en) 1983-05-14 1983-05-14 Control device of magnetic bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8547183A JPS59212519A (en) 1983-05-14 1983-05-14 Control device of magnetic bearing

Publications (2)

Publication Number Publication Date
JPS59212519A JPS59212519A (en) 1984-12-01
JPS626124B2 true JPS626124B2 (en) 1987-02-09

Family

ID=13859809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8547183A Granted JPS59212519A (en) 1983-05-14 1983-05-14 Control device of magnetic bearing

Country Status (1)

Country Link
JP (1) JPS59212519A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297713A (en) * 1988-10-03 1990-04-10 Ebara Corp Rotating machine using five-axis control magnetic bearing

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164014A (en) * 1984-02-03 1985-08-27 Toshiba Corp Magnetic bearing
JPS61244937A (en) * 1985-04-24 1986-10-31 Yaskawa Electric Mfg Co Ltd System for restricting natural vibration caused by mechanical system in electric machine
JPS61286609A (en) * 1985-06-11 1986-12-17 Ntn Toyo Bearing Co Ltd Control device of control type radial magnetic bearing
JPH0680328B2 (en) * 1986-06-16 1994-10-12 三菱重工業株式会社 Magnetic bearing control device
JPS62258219A (en) * 1986-05-02 1987-11-10 Mitsubishi Heavy Ind Ltd Magnetic bearing control system
JPS62258222A (en) * 1986-05-02 1987-11-10 Mitsubishi Heavy Ind Ltd Magnet bearing control system
US4795927A (en) * 1986-05-02 1989-01-03 Mitsubishi Jukogyo Kabushiki Kaisha Control system for a magnetic type bearing
JPH0730790B2 (en) * 1987-01-31 1995-04-10 三菱重工業株式会社 Magnetic bearing control device
JP3131619B2 (en) * 1988-07-29 2001-02-05 株式会社フェローテック Magnetic bearing device
JPH0254920U (en) * 1988-10-14 1990-04-20
JPH0730791B2 (en) * 1989-02-13 1995-04-10 株式会社荏原製作所 Magnetic bearing control device
JP3463218B2 (en) * 1993-12-24 2003-11-05 光洋精工株式会社 Magnetic bearing device
JP3591111B2 (en) * 1996-02-29 2004-11-17 松下電器産業株式会社 Magnetic bearing control device
JP3701115B2 (en) 1998-02-12 2005-09-28 株式会社荏原製作所 Magnetic bearing control device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3787100A (en) * 1972-12-11 1974-01-22 Armement Direction Tech Engins Devices including rotating members supported by magnetic bearings
US4121143A (en) * 1975-12-24 1978-10-17 Societe Anonyme Dite: Societe Europeene De Propulsion Device for compensating synchronous disturbances in the magnetic suspension of a rotor
US4128795A (en) * 1975-12-24 1978-12-05 Societe Europeene De Propulsion Device for damping the critical frequencies of a rotor suspended by a radial electromagnetic bearing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3787100A (en) * 1972-12-11 1974-01-22 Armement Direction Tech Engins Devices including rotating members supported by magnetic bearings
US4121143A (en) * 1975-12-24 1978-10-17 Societe Anonyme Dite: Societe Europeene De Propulsion Device for compensating synchronous disturbances in the magnetic suspension of a rotor
US4128795A (en) * 1975-12-24 1978-12-05 Societe Europeene De Propulsion Device for damping the critical frequencies of a rotor suspended by a radial electromagnetic bearing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297713A (en) * 1988-10-03 1990-04-10 Ebara Corp Rotating machine using five-axis control magnetic bearing

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