JPS6260255U - - Google Patents
Info
- Publication number
- JPS6260255U JPS6260255U JP15023985U JP15023985U JPS6260255U JP S6260255 U JPS6260255 U JP S6260255U JP 15023985 U JP15023985 U JP 15023985U JP 15023985 U JP15023985 U JP 15023985U JP S6260255 U JPS6260255 U JP S6260255U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- outer peripheral
- electrode plate
- quartz glass
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000007142 ring opening reaction Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- 239000012528 membrane Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023985U JPS641957Y2 (es) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023985U JPS641957Y2 (es) | 1985-09-30 | 1985-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6260255U true JPS6260255U (es) | 1987-04-14 |
| JPS641957Y2 JPS641957Y2 (es) | 1989-01-18 |
Family
ID=31066200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15023985U Expired JPS641957Y2 (es) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS641957Y2 (es) |
-
1985
- 1985-09-30 JP JP15023985U patent/JPS641957Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS641957Y2 (es) | 1989-01-18 |
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