JPS6260027U - - Google Patents

Info

Publication number
JPS6260027U
JPS6260027U JP1985135571U JP13557185U JPS6260027U JP S6260027 U JPS6260027 U JP S6260027U JP 1985135571 U JP1985135571 U JP 1985135571U JP 13557185 U JP13557185 U JP 13557185U JP S6260027 U JPS6260027 U JP S6260027U
Authority
JP
Japan
Prior art keywords
chuck
semiconductor material
pin
attached
edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985135571U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985135571U priority Critical patent/JPS6260027U/ja
Publication of JPS6260027U publication Critical patent/JPS6260027U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1985135571U 1985-09-04 1985-09-04 Pending JPS6260027U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985135571U JPS6260027U (OSRAM) 1985-09-04 1985-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985135571U JPS6260027U (OSRAM) 1985-09-04 1985-09-04

Publications (1)

Publication Number Publication Date
JPS6260027U true JPS6260027U (OSRAM) 1987-04-14

Family

ID=31037879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985135571U Pending JPS6260027U (OSRAM) 1985-09-04 1985-09-04

Country Status (1)

Country Link
JP (1) JPS6260027U (OSRAM)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258458A (en) * 1975-11-10 1977-05-13 Hitachi Ltd Spinner cleaning and drying mechanism
JPS5737837A (en) * 1980-08-20 1982-03-02 Toshiba Corp Drying device for semiconductor wafer
JPS60163436A (ja) * 1984-02-06 1985-08-26 Seiichiro Sogo 半導体材料の洗浄乾燥方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258458A (en) * 1975-11-10 1977-05-13 Hitachi Ltd Spinner cleaning and drying mechanism
JPS5737837A (en) * 1980-08-20 1982-03-02 Toshiba Corp Drying device for semiconductor wafer
JPS60163436A (ja) * 1984-02-06 1985-08-26 Seiichiro Sogo 半導体材料の洗浄乾燥方法

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