JPS6259616U - - Google Patents
Info
- Publication number
- JPS6259616U JPS6259616U JP15034085U JP15034085U JPS6259616U JP S6259616 U JPS6259616 U JP S6259616U JP 15034085 U JP15034085 U JP 15034085U JP 15034085 U JP15034085 U JP 15034085U JP S6259616 U JPS6259616 U JP S6259616U
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- workpiece
- turntable
- bodies
- feed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Retarders (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15034085U JPS6259616U (zh) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15034085U JPS6259616U (zh) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6259616U true JPS6259616U (zh) | 1987-04-13 |
Family
ID=31066394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15034085U Pending JPS6259616U (zh) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6259616U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011148633A1 (ja) * | 2010-05-27 | 2011-12-01 | 株式会社アルバック | トラバース装置及び基板処理装置 |
-
1985
- 1985-09-30 JP JP15034085U patent/JPS6259616U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011148633A1 (ja) * | 2010-05-27 | 2011-12-01 | 株式会社アルバック | トラバース装置及び基板処理装置 |
| JPWO2011148633A1 (ja) * | 2010-05-27 | 2013-07-25 | 株式会社アルバック | トラバース装置及び基板処理装置 |
| JP5463417B2 (ja) * | 2010-05-27 | 2014-04-09 | 株式会社アルバック | トラバース装置及び基板処理装置 |