JPS6259600A - Production of fibrous aggregate of silicon nitride oxide - Google Patents

Production of fibrous aggregate of silicon nitride oxide

Info

Publication number
JPS6259600A
JPS6259600A JP20087185A JP20087185A JPS6259600A JP S6259600 A JPS6259600 A JP S6259600A JP 20087185 A JP20087185 A JP 20087185A JP 20087185 A JP20087185 A JP 20087185A JP S6259600 A JPS6259600 A JP S6259600A
Authority
JP
Japan
Prior art keywords
silicon
alloy
silicon nitride
nitride oxide
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20087185A
Other languages
Japanese (ja)
Other versions
JPH0352440B2 (en
Inventor
Nobuyuki Azuma
伸行 東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP20087185A priority Critical patent/JPS6259600A/en
Publication of JPS6259600A publication Critical patent/JPS6259600A/en
Publication of JPH0352440B2 publication Critical patent/JPH0352440B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To readily produce a fibrous aggregate of a silicon nitride oxide having improved shape holding property, by mixing powder forming an alloy, e.g. Mg, Cu, etc., on an Si surface layer with SiO2 and silicon nitride oxide, molding the resultant mixture and heating the molded material in a specific gas stream. CONSTITUTION:One or more of Mg, Cu, Fe, Mn, Ni, Co, Cr or a salt thereof and, as necessary, Al are added to Si powder and the resultant mixture is heated to <=1,450 deg.C in an inert or a reducing resultant mixture is heated to <=1,450 deg.C in an inert or a reducing atmosphere to form an alloy on the Si surface. SiO2 and silicon nitride oxide are added to the powder, mixed therewith and, as necessary, granulated and molded into a given shape. The resultant molded material is heated to >=1,380 deg.C in nitrogen gas stream to grow fibrous crystals. The resultant fibrous aggregate crystals of the silicon nitride oxide obtained by this method has improved performance as heat-resistant and heat insulating materials, composite reinforcing materials, etc.

Description

【発明の詳細な説明】 (a)  発明の技術分野 本発明は酸窒化ケイ素繊維状結晶(ウィスカーを含む)
集合体の製造法、さらに詳しくいえばケイ素にマグネシ
ウム、銅など特定の金属を組合わせ必要に応じて、アル
ミニウムを加えケイ素の表層に合金をあらかじめ作り、
これと酸窒化ケイ素種結晶に二酸化ケイ素を加えて混合
、あるいは造粒し反応せしめることによシ結晶性及び蝋
度に優本発明者らの先願の方法によれば、ケイ素と二酸
化ケイ素にマグネシウム、アルミニウム及び銅など特定
の金属あるいはその塩を加え酸窒化ケイ素種結晶を添加
して作った成形体を加熱窒化するものであるが先願にお
ける出発原料粒子の相互反応について述べるとケイ素、
二酸化ケイ素、マグネシウム、アルミニウム及び銅ある
いは鉄等の金属のうチ、マグネシウムとアルミニウムH
600℃付近から拡散し、ひきつづき溶解してケイ素、
銅あるいは鉄など金属と容易に合金を形成するが、一方
においては二酸化ケイ素にも溶けて会合するためシリカ
の溶融体を形成し易くなシ、二酸化ケイ素の反応の減少
がもたらされる。そのため、成(C)解決しようとする
問題点 本発明者らは上記の問題の解決のため鋭意研究とによっ
て成形体の表層部よシ内部まで結晶性と繊度に優れた酸
窒化ケイ素繊維状組織を増加生成せしめた(第1の方法
)。また上記第1の方法においてケイ素合金と二酸化ケ
イ素を造粒することによシ形状保持性がよく、細い繊維
状組織を有する集合体を形成せしめた(第2の方法)。
Detailed Description of the Invention (a) Technical Field of the Invention The present invention relates to silicon oxynitride fibrous crystals (including whiskers)
More specifically, the method for manufacturing the aggregate is to combine silicon with specific metals such as magnesium and copper, and if necessary, add aluminum to create an alloy on the surface of the silicon.
By adding silicon dioxide to silicon oxynitride seed crystals and reacting them by mixing or granulating them, it is possible to improve crystallinity and waxiness.According to the method of the inventors' earlier application, silicon and silicon dioxide can be combined. A molded body made by adding specific metals such as magnesium, aluminum, and copper or their salts and silicon oxynitride seed crystals is heated and nitrided.
Silicon dioxide, magnesium, aluminum and metal cavities such as copper or iron, magnesium and aluminum H
It diffuses from around 600℃ and continues to melt to form silicon,
Although it easily forms alloys with metals such as copper or iron, it also dissolves and associates with silicon dioxide, making it difficult to form a silica melt, resulting in a reduction in the reaction of silicon dioxide. Therefore, (C) Problems to be Solved The present inventors have conducted intensive research to solve the above problems, and have found that a silicon oxynitride fibrous structure with excellent crystallinity and fineness extends from the surface layer to the inside of the molded product. (first method). Furthermore, by granulating the silicon alloy and silicon dioxide in the first method, an aggregate with good shape retention and a fine fibrous structure was formed (second method).

(d)  発明の問題点解決の手段 本発明では、先願の欠点を改善するためあらかじめ各種
金属によシケイ素の表層部に合金を形成させ、これに二
酸化ケイ素を加えあるいは造粒すラム、アルミニウムあ
るいは銅など触媒の金属の溶は込みを抑制することによ
シ結晶性がよく繊度に優れた酸窒化ケイ素集合体を1)
、2)で示した反応式によって再現性よく得ることを可
能にした製造法である。
(d) Means for Solving the Problems of the Invention In the present invention, in order to improve the drawbacks of the previous application, a lam which forms an alloy in advance on the surface layer of silicon with various metals and adds or granulates silicon dioxide to the alloy, By suppressing the incorporation of catalytic metals such as aluminum or copper, silicon oxynitride aggregates with good crystallinity and fineness can be produced (1).
, 2) is a manufacturing method that enables the production with good reproducibility using the reaction formula shown in 2).

5i(S)+ 8 i 02 (S)  −−−一→ 
2SiO@) l)2SiO(g)+2Si(S)+2
N2−2Si2ON2(S) 2)なお、上記の反応に
関連してケイ素合金粒子及び二酸化ケイ素との造粒の効
果について更に詳しく説明する。
5i (S) + 8 i 02 (S) ---1 →
2SiO@) l) 2SiO(g)+2Si(S)+2
N2-2Si2ON2(S) 2) In connection with the above reaction, the effect of granulation with silicon alloy particles and silicon dioxide will be explained in more detail.

(e)発明の作用 (1)  ケイ素にマグネシウムとアルミニウム、触媒
として銅あるいはマンガン、鉄、ニッケル、コ合金相を
形成させる。これら調製法によれば比較的低温度領域に
てケイ素合金は形成されるがケイ素の融点1420℃ま
で達するように行なうのが有利である。
(e) Effect of the invention (1) Forms magnesium and aluminum, copper or manganese as a catalyst, iron, nickel, and co-alloy phase in silicon. According to these preparation methods, a silicon alloy is formed in a relatively low temperature range, but it is advantageous to carry out the process so as to reach the melting point of silicon, 1420°C.

(2)マグネシウムは空気中の酸素や湿分と容易に化合
して酸化膜が形成され、ときにMg (OH)2の繊維
を生成する。このようにマグネシウム表面に酸化膜がで
きるとケイ素や銅など触媒と合金を形成しにくくなる一
方では二酸化ケイ素と反応しマグネシウム−シリケート
溶融体を形成し易い。
(2) Magnesium easily combines with oxygen and moisture in the air to form an oxide film, sometimes producing Mg(OH)2 fibers. When an oxide film is formed on the surface of magnesium, it becomes difficult to form an alloy with a catalyst such as silicon or copper, but it tends to react with silicon dioxide and form a magnesium-silicate melt.

このため活性を有するマグネシウム成分を得るため、本
発明ではあらかじめマグネシウムをケイ素及び各種の金
属と加熱し合金粒子を形成させた。
Therefore, in order to obtain an active magnesium component, in the present invention, magnesium is heated with silicon and various metals in advance to form alloy particles.

これはマグネシウムあるいはアルミニウム成分の酸化に
よる経時変化が少なく主たるケイ素金属表面への汚染の
タカい合金粒子を提供するものである。
This provides alloy particles that are less likely to change over time due to oxidation of magnesium or aluminum components and are less likely to cause contamination on the main silicon metal surface.

(3)更に合金粒子を形成させる過程でその大部分を占
めるケイ素粒子の角は丸味を帯び揃った形状となるので
次の段階で二酸化ケイ素との反応は一散を防止できる。
(3) Furthermore, in the process of forming alloy particles, the corners of the silicon particles, which make up the majority of the particles, become rounded and uniform, so that the reaction with silicon dioxide in the next step can be prevented from scattering.

(4)合金粒子と二酸化ケイ素の粒状化にはバインダー
と水を加えて混ぜ合せ乾燥した後粉砕しふるいによって
0.07〜2ffのちらさに造粒する。
(4) To granulate alloy particles and silicon dioxide, binder and water are added, mixed, dried, crushed, and granulated into particles of 0.07 to 2 ff using a sieve.

バインダーとしてはカルボキシメチルセルローズ、メチ
ルセルローズ、ポリビニールアルコ−ルナトを3〜10
重量%の溶液として使用する。これらバインダーは粉末
混合物の全量の2〜101量%   1の割合で加える
。本発明では混合粉体を粒状化することにより反応体相
互の接触がよくなるために更に均等な反応が進行すると
考えられる。
As a binder, carboxymethyl cellulose, methyl cellulose, and polyvinyl alcohol are used in the range of 3 to 10%.
Use as a wt% solution. These binders are added in a proportion of 2 to 101% by weight of the total amount of the powder mixture. In the present invention, it is believed that by granulating the mixed powder, contact between the reactants becomes better, so that the reaction proceeds more evenly.

(5)上記粒状体を成形し窒素雰囲気中にて加熱すると
多成分合金粒子と二酸化ケイ素粒子は徐々に反応して成
形体内部で二酸化ケイ素よりなる液リーケート溶融体が
少なく結晶性のよい酸窒化ケイ素が生成する。
(5) When the above granular material is molded and heated in a nitrogen atmosphere, the multi-component alloy particles and silicon dioxide particles gradually react with each other, resulting in less liquid leakage melt consisting of silicon dioxide inside the molded material and oxynitriding with good crystallinity. Silicon is produced.

上記の作用は確実かつ完全であり、効果は非常に大きく
ケイ素表層部における合金相の形成、反応体の粒状化の
有効性を証明するものである。
The above action is reliable and complete, and the effect is very large, proving the effectiveness of forming an alloy phase in the silicon surface layer and granulating the reactant.

次の実施例によって本発明をさらに詳細に説明する。The invention will be explained in further detail by the following examples.

(n  発明の実施例 実施例1 ケイ素2.556.y(モル比5)に銅0.007 g
(モル比0.006)、アルミニウム0.007 g(
モル比0.02)、マグネシウム0.138g(モル比
0.3)の各微粉末を混合する。この混合物を十分混合
したのちiomφの円柱状に成形する。
(n Examples of the invention Example 1 0.007 g of copper to 2.556.y of silicon (molar ratio 5)
(molar ratio 0.006), aluminum 0.007 g (
(molar ratio 0.02) and magnesium 0.138g (molar ratio 0.3) are mixed. After thoroughly mixing this mixture, it is formed into a cylindrical shape of iomφ.

成形体を窒化ケイ素質゛容器に入れた後、蓋をかぶせて
アルゴンと水素を各毎分80 ’/   5 ’4分・ 導入しながら抵抗加熱炉で20 ’4の昇温速度で急速
に上げ、650℃において30分間保持した後、昇温速
度7℃/分で1420℃まで昇温させ80分間保持する
。この工程によってケイ素の表のちLOflφX7fl
の円柱状に成形し窒化ケイ素ボートに入れ窒素ガスを3
0吟分の割合で導入し、7′c/分の速度で1470℃
まで昇温し、この温度で5時間保持した。
After placing the compact into a silicon nitride container, it was covered with a lid and rapidly raised in a resistance heating furnace at a heating rate of 20'4 while introducing argon and hydrogen at 80'/5'4/min. After holding at 650°C for 30 minutes, the temperature was raised to 1420°C at a temperature increase rate of 7°C/min and held for 80 minutes. By this process, after silicon surface LOflφX7fl
Formed into a cylindrical shape and placed in a silicon nitride boat and heated with nitrogen gas for 30 minutes.
1470°C at a rate of 7'c/min.
and held at this temperature for 5 hours.

この工程によって成形体は10数倍のかさとなり、ふわ
ふわとして崩れにくい酸窒化ケイ素集合体が得られる。
Through this step, the molded body becomes more than ten times as bulky, and a fluffy silicon oxynitride aggregate that is difficult to crumble is obtained.

このかさの多い集合体の一部を顕微鏡で測定した結果は
図に示すように太さ0.5〜3μ、長さ50〜300μ
毒、平均長さ100μ雷の比較的そろった結晶で表面の
ものほど細く長く、きれいなもので2%に達するものも
得られる。内部標準を用い粉末X線回折によシ定量を行
った結電、− ℃であるが、1430〜1470℃が適当である。
A part of this bulky aggregate was measured using a microscope, and as shown in the figure, the thickness was 0.5 to 3μ and the length was 50 to 300μ.
It is a relatively uniform crystal with an average length of 100μ, and the surface is thinner and longer, and clean ones can reach 2%. The electrification was determined by powder X-ray diffraction using an internal standard at -°C, but 1430 to 1470°C is suitable.

0.5モル以上のマグネシウムを添加すると集合体の中
心部に合金の団塊が残シ均一な繊維状集合体を得ること
ができない。マグネシウムの添加量を減少させ0.1モ
ル以下とすると結晶性のよい針状結晶の生成が少なくな
る。マグネシウムは市販の純度99%以上のものを15
0μm以下、好ましくは50μm以下の粉末度にしたも
のが好適である。なお、ケイ素と二酸化ケイ素のうちケ
イ素は市販の純度99%、io〜50μmの粉末度を用
いたとき均一な繊度を有する結晶を生長させるのに好適
であり、かつその混合割合はケイ素3.5〜5に対し二
酸化ケイ素1(モル比)の範囲で比を変えても酸窒化ケ
イ素結晶を得られることが分った。
If 0.5 mol or more of magnesium is added, alloy nodules remain in the center of the aggregate, making it impossible to obtain a uniform fibrous aggregate. If the amount of magnesium added is reduced to 0.1 mol or less, the formation of needle-like crystals with good crystallinity will be reduced. Magnesium is commercially available with a purity of 99% or higher.
A powder having a fineness of 0 μm or less, preferably 50 μm or less is suitable. Of silicon and silicon dioxide, silicon is suitable for growing crystals with uniform fineness when a commercially available powder with a purity of 99% and io~50 μm is used, and the mixing ratio is 3.5% silicon. It has been found that silicon oxynitride crystals can be obtained even if the ratio is varied within the range of ~5 to 1 (molar ratio) of silicon dioxide.

二酸化ケイ素は10〜60μ慣が適当であり粒度が、微
− それ以上に粗くガると未度応となシ残留した。声金属、
アルミニウム、マグネシウムのモル比5:1 : 0.
006 : 0.02 : 01の大部分の繊維状集ケ
イ素2.556g(モル比)5に塩化第二銅0.014
8g(銅としてモ/V比0.006)、マグネシウム、
0.188g(モル比0.3)の各微粉末を混合する。
The appropriate particle size for silicon dioxide is 10 to 60 microns, and if the particle size is fine or coarser than that, it will remain unsuitable. voice metal,
Molar ratio of aluminum and magnesium: 5:1:0.
006: 0.02: 2.556 g (mole ratio) of mostly fibrous silicon aggregates of 01 and 0.014 cupric chloride
8g (Mo/V ratio 0.006 as copper), magnesium,
0.188 g (molar ratio 0.3) of each fine powder is mixed.

この混合物を実施例1と同様の工程によって成形体の1
0数倍のかさに達した集合体が生成する。繊維状結晶の
太さ1〜5μm、長さ30〜200μm、平均80μm
の長さで長いものでは2nに達するのも見られ生成相は
5i2ON268%、α−8i3N412%、β−81
3N44%である。
This mixture was applied to one part of the molded body by the same process as in Example 1.
An aggregate that has reached several times the size is generated. Fibrous crystals have a thickness of 1 to 5 μm, a length of 30 to 200 μm, and an average of 80 μm.
It can be seen that the long ones reach 2n, and the generated phases are 5i2ON268%, α-8i3N412%, β-81
3N44%.

繊維状結晶の生成する温度範囲は1880〜1500℃
であるが、1430〜1470℃が適当である。
The temperature range for fibrous crystal formation is 1880-1500℃
However, 1430 to 1470°C is suitable.

重金属を添加する場合、反応条件下で金属に変換される
様な塩、たとえば塩化物、硝酸塩、硫酸塩、炭酸塩を用
いることができる。
When adding heavy metals, salts which are converted to metals under the reaction conditions, such as chlorides, nitrates, sulfates, carbonates, can be used.

実施例3 施例1と同様にケイ素の表層部分にMg M n 2、
AlMg、Mg28i  を形成させる。次に合金粒子
に二酸化ケイ素0.6006g  (七〃比1)及び全
量の10重量%の酸窒化ケイ素結晶を加えメチルセルロ
ーズ3%溶液0.8 m/!加えて成形する。成形体は
80℃で20時間乾燥した後乳鉢で粉砕し7Qmesh
(0,2g++++)〜200mesh (0,07m
)に粒度を揃える。造粒したものを2.5gとD200
Kg/iで10flφX7se++の円柱状に成形し窒
化ケイ素容器に入れ窒素ガスを80 ’/分の割合で導
入し、7℃/分の速度で1470℃まで昇温し、この温
度で5時間保持した。
Example 3 As in Example 1, Mg M n 2,
AlMg and Mg28i are formed. Next, 0.6006 g of silicon dioxide (7 ratio 1) and 10% by weight of the total amount of silicon oxynitride crystals were added to the alloy particles, and 0.8 m/! of 3% methyl cellulose solution was added. Add and shape. The molded body was dried at 80°C for 20 hours and then ground in a mortar to form a 7Qmesh.
(0,2g++++)~200mesh (0,07m
). 2.5g of granulated material and D200
It was formed into a cylindrical shape of 10flφX7se++ at Kg/i, placed in a silicon nitride container, introduced nitrogen gas at a rate of 80'/min, heated to 1470°C at a rate of 7°C/min, and held at this temperature for 5 hours. .

この工程によって成形体は10数倍のかさとなり、ふわ
ふわとした崩れにくい酸窒化ケイ素集合体が得られる。
Through this process, the molded body becomes more than ten times as bulky, and a fluffy silicon oxynitride aggregate that is hard to crumble is obtained.

繊維状結晶は0.2〜2μmと細く、長さ70〜300
μm、平均長さ120μm と揃つきつづき均等な結晶
の核生成に貫献した。その結果、細い繊維状結晶からな
る集合体を生成させることができた。
The fibrous crystals are as thin as 0.2 to 2 μm and have a length of 70 to 300 mm.
μm, and the average length was 120 μm, which led to uniform crystal nucleation. As a result, we were able to generate an aggregate consisting of thin fibrous crystals.

実施例4〜20 実施例1あるいは実施例3と同じ様にして銅、鉄、マン
ガン、ニッケル、コバルト、クロムマタはその塩を用い
て処理することによシ結晶性のよい酸窒化ケイ素繊維状
結晶を得ることができた。
Examples 4 to 20 Copper, iron, manganese, nickel, cobalt, and chromium metal are treated with their salts in the same manner as in Example 1 or 3 to obtain silicon oxynitride fibrous crystals with good crystallinity. was able to obtain.

この際の生成条件と生成相の収率を次表に示す。The production conditions and yield of the produced phase are shown in the following table.

@)発明の効果 このように本発明は細くからみのある結晶よりなる形状
保持性のよい酸窒化ケイ素繊維状集合体を容易に製造す
ることができる。
@) Effects of the Invention As described above, the present invention makes it possible to easily produce a silicon oxynitride fibrous aggregate having good shape retention and consisting of thin, entangled crystals.

本発明によって得られる酸窒化ケイ素繊維状結晶集合体
は宇宙、海洋及び環境化学用材料、軽合金、窯業、高温
電気等、あるいは原子力、石油化学等プラントに用いら
れる耐熱及び断熱材料としであるいは金属やプラスチッ
クやガラスの複合強化材料として壬の性能を向上させる
一方、フィルターなどにも利用され得るものである。
The silicon oxynitride fibrous crystal aggregate obtained by the present invention can be used as a heat-resistant and heat-insulating material used in space, ocean, and environmental chemical materials, light alloys, ceramics, high-temperature electricity, etc., or nuclear power, petrochemical, and other plants. It can be used as a composite reinforcing material for plastics, glass, etc. to improve the performance of bottles, and it can also be used in filters.

j・−・j・−・

Claims (1)

【特許請求の範囲】 1、ケイ素粉末にマグネシウム及び銅、鉄、マンガン、
ニッケル、コバルト、クロムの中から選ばれた金属もし
くはその塩の少なくとも一種の混合物に必要に応じてア
ルミニウムを添加し、不活性あるいは還元性雰囲気中で
1450℃以下に加熱、合金形成粉末となし、この合金
粉末に二酸化ケイ素と酸窒化ケイ素を加え混合、あるい
は必要に応じて粒状化して成形し、この成形体を窒素気
流中1380℃以上に加熱することを特徴とする酸窒化
ケイ素繊維状集合体の製造法。 2、ケイ素に金属もしくはその塩を加えて加熱しケイ素
を合金化する特許請求の範囲第1項記載の方法。 3、ケイ素合金形成粉末に酸窒化ケイ素結晶を加えた二
酸化ケイ素の混合物を、粒径0.07〜2mmに粒状化
する特許請求の範囲第1項記載の方法。
[Claims] 1. Silicon powder containing magnesium, copper, iron, manganese,
If necessary, aluminum is added to a mixture of at least one metal selected from nickel, cobalt, and chromium or its salt, and heated to 1450°C or less in an inert or reducing atmosphere to form an alloy-forming powder, A silicon oxynitride fibrous aggregate characterized by adding silicon dioxide and silicon oxynitride to this alloy powder, mixing it, or granulating it as necessary, molding it, and heating this molded product to 1380°C or higher in a nitrogen stream. manufacturing method. 2. The method according to claim 1, wherein a metal or a salt thereof is added to silicon and heated to alloy the silicon. 3. The method according to claim 1, wherein a mixture of silicon dioxide in which silicon oxynitride crystals are added to silicon alloy-forming powder is granulated to a particle size of 0.07 to 2 mm.
JP20087185A 1985-09-10 1985-09-10 Production of fibrous aggregate of silicon nitride oxide Granted JPS6259600A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20087185A JPS6259600A (en) 1985-09-10 1985-09-10 Production of fibrous aggregate of silicon nitride oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20087185A JPS6259600A (en) 1985-09-10 1985-09-10 Production of fibrous aggregate of silicon nitride oxide

Publications (2)

Publication Number Publication Date
JPS6259600A true JPS6259600A (en) 1987-03-16
JPH0352440B2 JPH0352440B2 (en) 1991-08-09

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP20087185A Granted JPS6259600A (en) 1985-09-10 1985-09-10 Production of fibrous aggregate of silicon nitride oxide

Country Status (1)

Country Link
JP (1) JPS6259600A (en)

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Publication number Publication date
JPH0352440B2 (en) 1991-08-09

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