JPS6258421U - - Google Patents
Info
- Publication number
- JPS6258421U JPS6258421U JP14981785U JP14981785U JPS6258421U JP S6258421 U JPS6258421 U JP S6258421U JP 14981785 U JP14981785 U JP 14981785U JP 14981785 U JP14981785 U JP 14981785U JP S6258421 U JPS6258421 U JP S6258421U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- crystal substrate
- cantilever
- cantilever beam
- optical waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
Description
第１図及び第２図は本考案光スイツチの要部の
構成断面図である。
１…半導体単結晶基板、２…エピタキシヤル層
、３…片持はり部、５…ＳｉＮ膜、４１，４２…
光導波路、Ｅ…直流電源、ＳＷ…スイツチ。
1 and 2 are sectional views of the main parts of the optical switch of the present invention. DESCRIPTION OF SYMBOLS 1... Semiconductor single crystal substrate, 2... Epitaxial layer, 3... Cantilever beam part, 5... SiN film, 41, 42...
Optical waveguide, E...DC power supply, SW...switch.
Claims (1)
性異方性エツチングによつて構成した片持はり部
と、この片持はり部に設けた光導波路と、前記単
結晶基板と片持はり部との間に電圧を印加する手
段とからなり、単結晶基板と片持はり部との間に
生ずる静電力による片持はり部の変形を利用して
前記光導波路を通る光信号をスイツチングするよ
うにした光スイツチ。 A semiconductor single crystal substrate, a cantilever portion formed on the semiconductor substrate by selective anisotropic etching, an optical waveguide provided on the cantilever portion, and the single crystal substrate and the cantilever portion. means for applying a voltage between the single crystal substrate and the cantilever beam, and switches the optical signal passing through the optical waveguide by utilizing deformation of the cantilever beam due to electrostatic force generated between the single crystal substrate and the cantilever beam. light switch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981785U JPS6258421U (en) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981785U JPS6258421U (en) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6258421U true JPS6258421U (en) | 1987-04-11 |
Family
ID=31065381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14981785U Pending JPS6258421U (en) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6258421U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5767956A (en) * | 1980-10-15 | 1982-04-24 | Yokogawa Hokushin Electric Corp | Recorder |
| JPS57163205A (en) * | 1981-03-31 | 1982-10-07 | Matsushita Electric Works Ltd | Optical switch |
-
1985
- 1985-09-30 JP JP14981785U patent/JPS6258421U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5767956A (en) * | 1980-10-15 | 1982-04-24 | Yokogawa Hokushin Electric Corp | Recorder |
| JPS57163205A (en) * | 1981-03-31 | 1982-10-07 | Matsushita Electric Works Ltd | Optical switch |
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