JPH038313U - - Google Patents
Info
- Publication number
- JPH038313U JPH038313U JP6848289U JP6848289U JPH038313U JP H038313 U JPH038313 U JP H038313U JP 6848289 U JP6848289 U JP 6848289U JP 6848289 U JP6848289 U JP 6848289U JP H038313 U JPH038313 U JP H038313U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- plating layer
- metal plating
- electrode pattern
- optical deflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Description
第１図は本考案に係る水晶光偏向子の一実施例
のバネ部を示す構成断面図、第２図および第３図
は第１図が示す水晶光偏向子の特性曲線図、第４
図は従来の水晶光偏向子を示す構成斜視図、第５
図は第４図のコイル部の部分構成断面図、第６図
は第４図のバネ部の部分構成断面図である。
１……ミラー部、２……コイル部、３……バネ
部、２０，３０……水晶基板、２１，３１……Ａ
ｕ薄膜、２２，３２……金属メツキ層。
FIG. 1 is a structural sectional view showing a spring portion of an embodiment of a crystal light deflector according to the present invention, FIGS. 2 and 3 are characteristic curve diagrams of the crystal light deflector shown in FIG. 1, and FIG.
The figure is a perspective view of the structure of a conventional crystal light deflector.
This figure is a partial cross-sectional view of the coil portion shown in FIG. 4, and FIG. 6 is a partial cross-sectional view of the spring portion shown in FIG. 4. 1...Mirror part, 2...Coil part, 3...Spring part, 20, 30...Crystal substrate, 21, 31...A
u thin film, 22, 32...metal plating layer.
Claims (1)
ラフイによりミラー部、コイル部およびバネ部を
形成した水晶光偏向子において、コイル部の電極
パターンがＡｕ薄膜上に金属メツキ層を備え、バ
ネ部の電極パターンがＡｕ薄膜のみで構成された
ことを特徴とする水晶光偏向子。 In a crystal optical deflector in which a mirror part, a coil part, and a spring part are formed on a crystal substrate by anisotropic etching and photolithography, the electrode pattern of the coil part has a metal plating layer on an Au thin film, and the spring part has a metal plating layer on the Au thin film. A crystal optical deflector characterized in that an electrode pattern is composed only of an Au thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6848289U JPH038313U (en) | 1989-06-12 | 1989-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6848289U JPH038313U (en) | 1989-06-12 | 1989-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH038313U true JPH038313U (en) | 1991-01-25 |
Family
ID=31602959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6848289U Pending JPH038313U (en) | 1989-06-12 | 1989-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038313U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002116402A (en) * | 2000-10-05 | 2002-04-19 | Miyota Kk | Light deflecting element and its manufacturing method |
| WO2002035275A1 (en) * | 2000-10-25 | 2002-05-02 | The Nippon Signal Co., Ltd | Actuator |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63197911A (en) * | 1987-02-12 | 1988-08-16 | Konica Corp | Optical deflector for image signal |
-
1989
- 1989-06-12 JP JP6848289U patent/JPH038313U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63197911A (en) * | 1987-02-12 | 1988-08-16 | Konica Corp | Optical deflector for image signal |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002116402A (en) * | 2000-10-05 | 2002-04-19 | Miyota Kk | Light deflecting element and its manufacturing method |
| JP4526676B2 (en) * | 2000-10-05 | 2010-08-18 | シチズンファインテックミヨタ株式会社 | Optical deflection element and manufacturing method thereof |
| WO2002035275A1 (en) * | 2000-10-25 | 2002-05-02 | The Nippon Signal Co., Ltd | Actuator |
| KR100845398B1 (en) * | 2000-10-25 | 2008-07-10 | 더 니뽄 시그널 컴파니, 리미티드 | Actuator |