JPS6258170B2 - - Google Patents
Info
- Publication number
- JPS6258170B2 JPS6258170B2 JP1312179A JP1312179A JPS6258170B2 JP S6258170 B2 JPS6258170 B2 JP S6258170B2 JP 1312179 A JP1312179 A JP 1312179A JP 1312179 A JP1312179 A JP 1312179A JP S6258170 B2 JPS6258170 B2 JP S6258170B2
- Authority
- JP
- Japan
- Prior art keywords
- mask
- crystal
- electrode
- crystal resonator
- slit width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 44
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 6
- 230000010287 polarization Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1312179A JPS55105418A (en) | 1979-02-07 | 1979-02-07 | Manufacture of electrode for crystal oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1312179A JPS55105418A (en) | 1979-02-07 | 1979-02-07 | Manufacture of electrode for crystal oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55105418A JPS55105418A (en) | 1980-08-13 |
| JPS6258170B2 true JPS6258170B2 (enrdf_load_html_response) | 1987-12-04 |
Family
ID=11824316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1312179A Granted JPS55105418A (en) | 1979-02-07 | 1979-02-07 | Manufacture of electrode for crystal oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55105418A (enrdf_load_html_response) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0243187U (enrdf_load_html_response) * | 1988-09-17 | 1990-03-26 | ||
| TWI482974B (zh) * | 2009-04-27 | 2015-05-01 | Yokowo Seisakusho Kk | 接觸式探針及探針座 |
-
1979
- 1979-02-07 JP JP1312179A patent/JPS55105418A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0243187U (enrdf_load_html_response) * | 1988-09-17 | 1990-03-26 | ||
| TWI482974B (zh) * | 2009-04-27 | 2015-05-01 | Yokowo Seisakusho Kk | 接觸式探針及探針座 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55105418A (en) | 1980-08-13 |
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