JPS6256576B2 - - Google Patents
Info
- Publication number
- JPS6256576B2 JPS6256576B2 JP13096180A JP13096180A JPS6256576B2 JP S6256576 B2 JPS6256576 B2 JP S6256576B2 JP 13096180 A JP13096180 A JP 13096180A JP 13096180 A JP13096180 A JP 13096180A JP S6256576 B2 JPS6256576 B2 JP S6256576B2
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- light
- lens
- point
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 35
- 238000001514 detection method Methods 0.000 claims description 14
- 230000005855 radiation Effects 0.000 claims description 4
- 239000011295 pitch Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 9
- 238000000926 separation method Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
- G02B7/30—Systems for automatic generation of focusing signals using parallactic triangle with a base line
- G02B7/32—Systems for automatic generation of focusing signals using parallactic triangle with a base line using active means, e.g. light emitter
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Automatic Focus Adjustment (AREA)
- Moving Of The Head For Recording And Reproducing By Optical Means (AREA)
- Optical Recording Or Reproduction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13096180A JPS5754907A (en) | 1980-09-19 | 1980-09-19 | Focus detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13096180A JPS5754907A (en) | 1980-09-19 | 1980-09-19 | Focus detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5754907A JPS5754907A (en) | 1982-04-01 |
JPS6256576B2 true JPS6256576B2 (zh) | 1987-11-26 |
Family
ID=15046670
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13096180A Granted JPS5754907A (en) | 1980-09-19 | 1980-09-19 | Focus detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5754907A (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2304890A (en) * | 1995-09-12 | 1997-03-26 | Richard Jackson | Testing apparatus for metal items |
-
1980
- 1980-09-19 JP JP13096180A patent/JPS5754907A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5754907A (en) | 1982-04-01 |
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