JPS6255860U - - Google Patents

Info

Publication number
JPS6255860U
JPS6255860U JP14658885U JP14658885U JPS6255860U JP S6255860 U JPS6255860 U JP S6255860U JP 14658885 U JP14658885 U JP 14658885U JP 14658885 U JP14658885 U JP 14658885U JP S6255860 U JPS6255860 U JP S6255860U
Authority
JP
Japan
Prior art keywords
sample
evacuation
chamber
pump
exhaust pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14658885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14658885U priority Critical patent/JPS6255860U/ja
Publication of JPS6255860U publication Critical patent/JPS6255860U/ja
Pending legal-status Critical Current

Links

JP14658885U 1985-09-27 1985-09-27 Pending JPS6255860U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14658885U JPS6255860U (enrdf_load_stackoverflow) 1985-09-27 1985-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14658885U JPS6255860U (enrdf_load_stackoverflow) 1985-09-27 1985-09-27

Publications (1)

Publication Number Publication Date
JPS6255860U true JPS6255860U (enrdf_load_stackoverflow) 1987-04-07

Family

ID=31059190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14658885U Pending JPS6255860U (enrdf_load_stackoverflow) 1985-09-27 1985-09-27

Country Status (1)

Country Link
JP (1) JPS6255860U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014026839A (ja) * 2012-07-27 2014-02-06 Hitachi High-Technologies Corp 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014026839A (ja) * 2012-07-27 2014-02-06 Hitachi High-Technologies Corp 荷電粒子線装置

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