JPS6255556U - - Google Patents
Info
- Publication number
- JPS6255556U JPS6255556U JP14652285U JP14652285U JPS6255556U JP S6255556 U JPS6255556 U JP S6255556U JP 14652285 U JP14652285 U JP 14652285U JP 14652285 U JP14652285 U JP 14652285U JP S6255556 U JPS6255556 U JP S6255556U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum chamber
- storage section
- material storage
- vacuum deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 24
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 claims 5
- 239000011236 particulate material Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 2
- 239000008187 granular material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14652285U JPS6255556U (enExample) | 1985-09-27 | 1985-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14652285U JPS6255556U (enExample) | 1985-09-27 | 1985-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6255556U true JPS6255556U (enExample) | 1987-04-06 |
Family
ID=31059065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14652285U Pending JPS6255556U (enExample) | 1985-09-27 | 1985-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255556U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0390565A (ja) * | 1989-08-31 | 1991-04-16 | Laser Noushiyuku Gijutsu Kenkyu Kumiai | 金属原料供給装置 |
-
1985
- 1985-09-27 JP JP14652285U patent/JPS6255556U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0390565A (ja) * | 1989-08-31 | 1991-04-16 | Laser Noushiyuku Gijutsu Kenkyu Kumiai | 金属原料供給装置 |