JPH0323932U - - Google Patents

Info

Publication number
JPH0323932U
JPH0323932U JP1989083420U JP8342089U JPH0323932U JP H0323932 U JPH0323932 U JP H0323932U JP 1989083420 U JP1989083420 U JP 1989083420U JP 8342089 U JP8342089 U JP 8342089U JP H0323932 U JPH0323932 U JP H0323932U
Authority
JP
Japan
Prior art keywords
plate
temperature control
gas chamber
temperature
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989083420U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989083420U priority Critical patent/JPH0323932U/ja
Publication of JPH0323932U publication Critical patent/JPH0323932U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP1989083420U 1989-07-14 1989-07-14 Pending JPH0323932U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989083420U JPH0323932U (enExample) 1989-07-14 1989-07-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989083420U JPH0323932U (enExample) 1989-07-14 1989-07-14

Publications (1)

Publication Number Publication Date
JPH0323932U true JPH0323932U (enExample) 1991-03-12

Family

ID=31631075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989083420U Pending JPH0323932U (enExample) 1989-07-14 1989-07-14

Country Status (1)

Country Link
JP (1) JPH0323932U (enExample)

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