JPS6255105U

JPS6255105U -

Info

Publication number: JPS6255105U
Application number: JP14749685U
Authority: JP
Priority date: 1985-09-27
Filing date: 1985-09-27
Publication date: 1987-04-06

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例を示す構成図、第２
図、第３図は間隙基準部材の一例を示す説明図、
第４図は光検出器の出力波形の一例を示す説明図
、第５図、第６図は他の実施例を示す構成図、第
７図ａ，ｂは間隙基準部材２０の他の形状を示す
説明図、第８図ａ，ｂ、第９図ａ，ｂは間隙基準
部材の位置による光検出器の出力の関係を示す図
、第１０図〜第１２図は従来例を示す説明図。１……スピンドルモータ、２……透明板（ガラ
スデイスク）、３……測定対象ヘツド）、４……
光源、５……光検出器、６……ビームエキスパン
ダ、７，１７……ハーフミラー、８……レンズ、
９……コリメータレンズ、１０……干渉フイルタ
、１１……収納箱、１６，２９ａ，２９ｂ，２９
ｃ……圧電素子、１８，１９……シヤツタ、２０
……間隙基準部材、２３……ミラー、２４，２７
……オプチカルフラツト、２５……薄膜、２６，
２８……参照部材。 Fig. 1 is a configuration diagram showing one embodiment of the present invention;
FIG. 3 is an explanatory diagram showing an example of a gap reference member,
FIG. 4 is an explanatory diagram showing an example of the output waveform of the photodetector, FIGS. 5 and 6 are configuration diagrams showing other embodiments, and FIGS. 7a and 7b show other shapes of the gap reference member 20. FIGS. 8a and 9b and 9a and 9b are diagrams showing the relationship between the output of the photodetector depending on the position of the gap reference member, and FIGS. 10 to 12 are explanatory diagrams showing conventional examples. 1...Spindle motor, 2...Transparent plate (glass disk), 3...Measurement target head), 4...
Light source, 5... Photodetector, 6... Beam expander, 7, 17... Half mirror, 8... Lens,
9... Collimator lens, 10... Interference filter, 11... Storage box, 16, 29a, 29b, 29
c... Piezoelectric element, 18, 19... Shutter, 20
... Gap reference member, 23 ... Mirror, 24, 27
...Optical flat, 25... Thin film, 26,
28...Reference member.

Claims

[Scope of utility model registration request]

A measurement object that is placed close to or in contact with one surface of a transparent plate and whose gap with the transparent plate is measured, and the other side of the transparent plate on which the measurement object is placed via a filter, a lens, a half mirror, etc. In this micro-gap measuring device, which has a light source that illuminates the surface of the plane and a photodetector that measures the amount of interference of the reflected light, a gap reference member having a constant or variable inclination and a gap is provided separately from this measurement system, and A microgap measuring device comprising a switching means for switching a reflected optical path from the transparent plate and a reflected optical path from the gap reference member.