JPS6254589A - Mask substrate for laser marker - Google Patents

Abstract

PURPOSE:To decrease the loss of a laser beam by respectively laminating non- reflection coating layers on the front and rear surfaces of a glass substrate and further etching patterns such as characters and figures onto the non- reflection coating layers. CONSTITUTION:The non-reflection coating layers 2, 3 are formed of magnesium fluoride, etc. on both the front and rear surfaces of the glass substrate 1. A chromium layer 4 as a lattice matching layer and a gold layer 5 as a reflection layer or an aluminum layer 4 as the reflection layer and an aluminum oxide layer 5 as a protective layer are laminated on such coating layer 3. More specifically, a mask reflection layer 6 is formed of the chromium layer 4 and the gold layer 5, etc. The patterns 7 of the characters, figures. etc. are formed on the front surface of the mask reflection layer 6 by photoetching, etc. The loss of the laser beam to the mask substrate is decreased with the coating layer 6 by the above-mentioned method.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a 1/-za marker, particularly for displaying trademarks, product names, lot numbers, etc. on the surfaces of plastic molded integrated circuit parts, transistors, diodes, resistors, capacitors, and other electronic parts. The present invention relates to the structure of a mask substrate used as a 1/-za marker for arcing.

2. Description of the Related Art Conventionally, this type of one-norther marker has, for example, an L-shaped configuration as shown in FIG. A mask 11 with a trademark, product name, etc. etched thereon is irradiated with a laser beam with a wide luminous flux emitted from a laser light source 10, and the laser beam that has passed through the mask 11 is focused by an imaging 1/lens 12 to reduce the mask image. The surface of the electronic component 13 is marked = to burn it out.

Here, as the mask 11, a thin metal plate called a stencil in which patterns such as numbers and letters are etched, or a substrate having a vapor deposited layer of chromium and gold on which patterns such as letters are etched on the surface of a glass substrate is used. It's here.

Two Problems Solved by the Invention The former of the above-mentioned conventional masks, that is, those in which a pattern is formed by etching holes in a thin metal plate, can be used, for example, to form a pattern by etching holes in a thin metal plate.
Patterns such as "and @8" are hollowed out and missing. For this reason, it is necessary to create a bridge between the lines to support the hollow part, which may cause breaks in the marked characters or
The drawback is that complex trademarks may require trademark changes.

The latter of the above-mentioned conventional masks, that is, a glass substrate having a evaporated layer of chromium and gold without letters or figures on the surface thereof, does not have the above-mentioned drawbacks, but has the following problems. Glass plates always have reflections, and if the reflection loss on one side of the glass is, for example, 4%, the loss on the front and back sides is about 8%, and if four glass plates like this are stacked together, the loss is about 28%. arise. When the figure to be marked is complex, it is often insufficient to use only one glass substrate mask of this type, and several masks must be stacked one on top of the other. In this case, unlike the above method, the amount of transmitted light from the nose is significantly reduced, resulting in poor working efficiency.

Means for Solving the Problems The mask substrate according to the present invention has an anti-reflection coating layer against laser light laminated on the front and back surfaces of a glass substrate,
On the front side, a mask reflective layer with character and graphic patterns cut out is further coated and laminated on this non-reflective layer.

Function: Materials for the antireflection coating layer in the present invention include magnesium fluoride, cerium oxide, aluminum oxide, and titanium oxide.

Since this coating has a reflection loss of about 1% per surface, even if four mask substrates are stacked, the loss will only be about 8%. This is only the same level of loss as in the case of a single glass substrate in the conventional method without anti-reflection coating.

Next, for the material of the mask reflective layer, we use a laminated layer of chromium and gold that has sufficient light resistance to the strong light energy of laser light.
Alternatively, by using a laminated layer of aluminum and aluminum oxide, laser marking of complex patterns becomes possible.

Example Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a perspective sectional view of an embodiment of the present invention.

A non-reflective coating layer 2 is applied on both sides of the glass substrate 1 using magnesium fluoride, etc., and on this anti-reflective coating layer 3, a chromium layer 4 as a lattice matching layer, a metal 5 as a reflective layer, Alternatively, an aluminum layer 4 as a reflective layer and an aluminum oxide layer 5 as a protective layer are laminated. That is, a mask reflective layer 6 is formed of a chromium (or aluminum) layer 4 and a gold (or aluminum oxide) layer 5. Reference numeral 7 designates patterns such as letters and figures to be marked, and the mask reflective layer 6 is formed by photo-etching using photoresist without damaging the non-reflective coating layer 3.

Effects of the Invention As explained above, the present invention provides a non-reflective coating layer on both the front and back sides of a glass substrate, and further laminates a mask reflective layer on the front side to form a mask substrate for laser mercury. A laser marker with low laser beam loss can be obtained without causing disconnection in the characters or figures to be marked, even when a plurality of mask substrates must be stacked in a complex pattern.

[Brief explanation of the drawing]

FIG. 1 is a perspective sectional view of an embodiment of the present invention, and FIG.
FIG. 2 is an explanatory diagram of a schematic configuration of the marker. 1...Glass substrate, 2, 3...Anti-reflective coating layer, 4...Chromium (or aluminum) layer, 5...Gold (or aluminum oxide) ) Notification. 6...Mask reflective layer, 7...Pattern such as 2 characters, 10...Laser light source, 11
...Mask, 12...Imaging lens, 1
3.--Electronic parts. ,--1・ Agent Patent Attorney Kuri 1) Yu Haru-1■・, 口j,a
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Claims (1)

[Claims] A non-reflective coating layer against laser light is laminated on the front and back surfaces of the glass substrate, and a mask reflective layer formed by etching patterns such as letters and figures is further laminated on the front surface side on the anti-reflective coating layer. A mask substrate for a laser marker characterized by: