JPS6254240B2 - - Google Patents

Info

Publication number
JPS6254240B2
JPS6254240B2 JP15030081A JP15030081A JPS6254240B2 JP S6254240 B2 JPS6254240 B2 JP S6254240B2 JP 15030081 A JP15030081 A JP 15030081A JP 15030081 A JP15030081 A JP 15030081A JP S6254240 B2 JPS6254240 B2 JP S6254240B2
Authority
JP
Japan
Prior art keywords
quartz tube
heater element
heater
tightly wound
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15030081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5851492A (ja
Inventor
Kunyoshi Idota
Haruo Matsura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Ecology Systems Co Ltd
Original Assignee
Matsushita Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Seiko Co Ltd filed Critical Matsushita Seiko Co Ltd
Priority to JP15030081A priority Critical patent/JPS5851492A/ja
Publication of JPS5851492A publication Critical patent/JPS5851492A/ja
Publication of JPS6254240B2 publication Critical patent/JPS6254240B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP15030081A 1981-09-22 1981-09-22 縦形石英管ヒ−タ Granted JPS5851492A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15030081A JPS5851492A (ja) 1981-09-22 1981-09-22 縦形石英管ヒ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15030081A JPS5851492A (ja) 1981-09-22 1981-09-22 縦形石英管ヒ−タ

Publications (2)

Publication Number Publication Date
JPS5851492A JPS5851492A (ja) 1983-03-26
JPS6254240B2 true JPS6254240B2 (enExample) 1987-11-13

Family

ID=15493985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15030081A Granted JPS5851492A (ja) 1981-09-22 1981-09-22 縦形石英管ヒ−タ

Country Status (1)

Country Link
JP (1) JPS5851492A (enExample)

Also Published As

Publication number Publication date
JPS5851492A (ja) 1983-03-26

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