JPS6252952U - - Google Patents

Info

Publication number
JPS6252952U
JPS6252952U JP14533685U JP14533685U JPS6252952U JP S6252952 U JPS6252952 U JP S6252952U JP 14533685 U JP14533685 U JP 14533685U JP 14533685 U JP14533685 U JP 14533685U JP S6252952 U JPS6252952 U JP S6252952U
Authority
JP
Japan
Prior art keywords
semiconductor chip
semiconductor
substrate
pressure
output signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14533685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14533685U priority Critical patent/JPS6252952U/ja
Publication of JPS6252952U publication Critical patent/JPS6252952U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
JP14533685U 1985-09-24 1985-09-24 Pending JPS6252952U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14533685U JPS6252952U (US20090163788A1-20090625-C00002.png) 1985-09-24 1985-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14533685U JPS6252952U (US20090163788A1-20090625-C00002.png) 1985-09-24 1985-09-24

Publications (1)

Publication Number Publication Date
JPS6252952U true JPS6252952U (US20090163788A1-20090625-C00002.png) 1987-04-02

Family

ID=31056781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14533685U Pending JPS6252952U (US20090163788A1-20090625-C00002.png) 1985-09-24 1985-09-24

Country Status (1)

Country Link
JP (1) JPS6252952U (US20090163788A1-20090625-C00002.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009041465A1 (ja) * 2007-09-25 2009-04-02 Alps Electric Co., Ltd. 半導体圧力センサ
WO2009057620A1 (ja) * 2007-10-30 2009-05-07 Yamatake Corporation 圧力センサ及びその製造方法
JP2009109347A (ja) * 2007-10-30 2009-05-21 Yamatake Corp 圧力センサ及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009041465A1 (ja) * 2007-09-25 2009-04-02 Alps Electric Co., Ltd. 半導体圧力センサ
WO2009057620A1 (ja) * 2007-10-30 2009-05-07 Yamatake Corporation 圧力センサ及びその製造方法
JP2009109347A (ja) * 2007-10-30 2009-05-21 Yamatake Corp 圧力センサ及びその製造方法

Similar Documents

Publication Publication Date Title
JPS6252952U (US20090163788A1-20090625-C00002.png)
JPS6358731U (US20090163788A1-20090625-C00002.png)
JPS6262234U (US20090163788A1-20090625-C00002.png)
JPS6378229U (US20090163788A1-20090625-C00002.png)
JPS6049438U (ja) 半導体圧力センサ
JPS60152949U (ja) セラミツク圧力センサ
JPS6030554U (ja) 半導体圧力センサ
JPH0178928U (US20090163788A1-20090625-C00002.png)
JPS61110138U (US20090163788A1-20090625-C00002.png)
JPS6172866U (US20090163788A1-20090625-C00002.png)
JPS6367841U (US20090163788A1-20090625-C00002.png)
JPS59179352U (ja) 半導体圧力センサ
JPH0197232U (US20090163788A1-20090625-C00002.png)
JPH01131139U (US20090163788A1-20090625-C00002.png)
JPS6212834U (US20090163788A1-20090625-C00002.png)
JPS59123350U (ja) 半導体圧力センサ
JPS6363737U (US20090163788A1-20090625-C00002.png)
JPH0166046U (US20090163788A1-20090625-C00002.png)
JPS627045U (US20090163788A1-20090625-C00002.png)
JPS5837530U (ja) 圧力検出装置
JPS6367266U (US20090163788A1-20090625-C00002.png)
JPS645137U (US20090163788A1-20090625-C00002.png)
JPH0213753U (US20090163788A1-20090625-C00002.png)
JPS6410639U (US20090163788A1-20090625-C00002.png)
JPH01131136U (US20090163788A1-20090625-C00002.png)