JPS6251942U - - Google Patents

Info

Publication number
JPS6251942U
JPS6251942U JP14360185U JP14360185U JPS6251942U JP S6251942 U JPS6251942 U JP S6251942U JP 14360185 U JP14360185 U JP 14360185U JP 14360185 U JP14360185 U JP 14360185U JP S6251942 U JPS6251942 U JP S6251942U
Authority
JP
Japan
Prior art keywords
stator
rotor
vacuum motor
cann
joined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14360185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH038067Y2 (US07413550-20080819-C00001.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14360185U priority Critical patent/JPH038067Y2/ja
Publication of JPS6251942U publication Critical patent/JPS6251942U/ja
Application granted granted Critical
Publication of JPH038067Y2 publication Critical patent/JPH038067Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Motor Or Generator Frames (AREA)
JP14360185U 1985-09-20 1985-09-20 Expired JPH038067Y2 (US07413550-20080819-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14360185U JPH038067Y2 (US07413550-20080819-C00001.png) 1985-09-20 1985-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14360185U JPH038067Y2 (US07413550-20080819-C00001.png) 1985-09-20 1985-09-20

Publications (2)

Publication Number Publication Date
JPS6251942U true JPS6251942U (US07413550-20080819-C00001.png) 1987-03-31
JPH038067Y2 JPH038067Y2 (US07413550-20080819-C00001.png) 1991-02-27

Family

ID=31053437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14360185U Expired JPH038067Y2 (US07413550-20080819-C00001.png) 1985-09-20 1985-09-20

Country Status (1)

Country Link
JP (1) JPH038067Y2 (US07413550-20080819-C00001.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001320858A (ja) * 2000-05-09 2001-11-16 Tamagawa Seiki Co Ltd 真空モータ用センサ
JP2001339920A (ja) * 2000-05-30 2001-12-07 Tamagawa Seiki Co Ltd 真空モータ
JP2002534282A (ja) * 1998-12-30 2002-10-15 ブルックス オートメーション インコーポレイテッド 共通回転軸を有する複数アームを持つ基板搬送装置
JP2013038964A (ja) * 2011-08-09 2013-02-21 Ulvac Japan Ltd 位置検出器および真空モータ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002534282A (ja) * 1998-12-30 2002-10-15 ブルックス オートメーション インコーポレイテッド 共通回転軸を有する複数アームを持つ基板搬送装置
JP2001320858A (ja) * 2000-05-09 2001-11-16 Tamagawa Seiki Co Ltd 真空モータ用センサ
JP2001339920A (ja) * 2000-05-30 2001-12-07 Tamagawa Seiki Co Ltd 真空モータ
JP2013038964A (ja) * 2011-08-09 2013-02-21 Ulvac Japan Ltd 位置検出器および真空モータ

Also Published As

Publication number Publication date
JPH038067Y2 (US07413550-20080819-C00001.png) 1991-02-27

Similar Documents

Publication Publication Date Title
JPS6251942U (US07413550-20080819-C00001.png)
JPS62180693U (US07413550-20080819-C00001.png)
JPS6438281U (US07413550-20080819-C00001.png)
JPS63680U (US07413550-20080819-C00001.png)
JPS6192164U (US07413550-20080819-C00001.png)
JPS626497U (US07413550-20080819-C00001.png)
JPS61205265U (US07413550-20080819-C00001.png)
JPS6251944U (US07413550-20080819-C00001.png)
JPH01139125U (US07413550-20080819-C00001.png)
JPS6148997U (US07413550-20080819-C00001.png)
JPS60149557U (ja) リングギヤ
JPS61157591U (US07413550-20080819-C00001.png)
JPH0168003U (US07413550-20080819-C00001.png)
JPS61199165U (US07413550-20080819-C00001.png)
JPH02107245U (US07413550-20080819-C00001.png)
JPH0339387U (US07413550-20080819-C00001.png)
JPS6382099U (US07413550-20080819-C00001.png)
JPS63153769U (US07413550-20080819-C00001.png)
JPH046272U (US07413550-20080819-C00001.png)
JPS61118994U (US07413550-20080819-C00001.png)
JPS62188953U (US07413550-20080819-C00001.png)
JPS61200482U (US07413550-20080819-C00001.png)
JPS624878U (US07413550-20080819-C00001.png)
JPH0325891U (US07413550-20080819-C00001.png)
JPS61147577U (US07413550-20080819-C00001.png)