JPS6251777A - 真空ポンプ装置内へのガス流を制御するためのオリフイス板 - Google Patents
真空ポンプ装置内へのガス流を制御するためのオリフイス板Info
- Publication number
- JPS6251777A JPS6251777A JP26516685A JP26516685A JPS6251777A JP S6251777 A JPS6251777 A JP S6251777A JP 26516685 A JP26516685 A JP 26516685A JP 26516685 A JP26516685 A JP 26516685A JP S6251777 A JPS6251777 A JP S6251777A
- Authority
- JP
- Japan
- Prior art keywords
- orifice plate
- flow
- flow rate
- opening
- viscous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 claims description 16
- 230000001052 transient effect Effects 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US77034385A | 1985-08-28 | 1985-08-28 | |
| US770343 | 1996-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6251777A true JPS6251777A (ja) | 1987-03-06 |
| JPH0125902B2 JPH0125902B2 (index.php) | 1989-05-19 |
Family
ID=25088238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26516685A Granted JPS6251777A (ja) | 1985-08-28 | 1985-11-27 | 真空ポンプ装置内へのガス流を制御するためのオリフイス板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251777A (index.php) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005183974A (ja) * | 2003-12-19 | 2005-07-07 | Palo Alto Research Center Inc | 可撓性ケーブル相互接続アセンブリ |
| JP2014509365A (ja) * | 2011-02-09 | 2014-04-17 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
-
1985
- 1985-11-27 JP JP26516685A patent/JPS6251777A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005183974A (ja) * | 2003-12-19 | 2005-07-07 | Palo Alto Research Center Inc | 可撓性ケーブル相互接続アセンブリ |
| JP2014509365A (ja) * | 2011-02-09 | 2014-04-17 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
| US9926919B2 (en) | 2011-02-09 | 2018-03-27 | Brooks Automation, Inc. | Cryopump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0125902B2 (index.php) | 1989-05-19 |
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